H ELECTRICITY
H05 ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1/00 Generating plasma; Handling plasma
H05H1/24 Generating plasma
H05H1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy