The present disclosure provides a self-contained system that contains a plurality of target cartridges, automatically inserts a selected target cartridge into position for irradiation, advances a foil to facilitate irradiation over the target chamber, replaces the foil for additional irradiation (if desired), serves as a dissolution cell for retrieval of the irradiated material, removes the used target cartridge and inserts a new cartridge for subsequent cycles of operation. Consequently, only the dissolved target material and dissolution medium are transferred between the target system and any post processing cells/labs. Accordingly, a system is disclosed for processing a target material without disturbance to irradiated material (thereby eliminating risk of impurities) and without requiring manual access/intervention (thereby eliminating risk of exposure).

The present disclosure provides a self-contained system that contains a plurality of target cartridges, automatically inserts a selected target cartridge into position for irradiation, advances a foil to facilitate irradiation over the target chamber, replaces the foil for additional irradiation (if desired), serves as a dissolution cell for retrieval of the irradiated material, removes the used target cartridge and inserts a new cartridge for subsequent cycles of operation. Consequently, only the dissolved target material and dissolution medium are transferred between the target system and any post processing cells/labs. Accordingly, a system is disclosed for processing a target material without disturbance to irradiated material (thereby eliminating risk of impurities) and without requiring manual access/intervention (thereby eliminating risk of exposure).

To provide a functional membrane for ion beam transmission capable of enhancing ion beam transmittance and improving beam emittance. A functional membrane for ion beam transmission according to the present invention is used in a beam line device through which an ion beam traveling in one direction passes and has a channel. The axis of the channel is substantially parallel to the travel direction of the ion beam.

Aspects of the present disclosure describe techniques for fast cooling of ion motion in a long chain using local motional modes. For example, a method is described for cooling down ions in a chain of ions that includes performing a cooling down sequence in which phonons are removed from the ions in the chain of ions by exciting and de-exciting local motional modes associated with individual ions, wherein sideband transitions that are part of the cooling down sequence are driven faster for the local motional modes than for collective motional modes for the same chain of ions; and completing the cooling down sequence when the local motional modes reach a ground state. A corresponding system and computer-readable storage medium for fast cooling of ion motion in a long chain using local motional modes are also described.

An ion implantation system has a source that generates ions from a beam species to form an ion beam, and a mass analyzer mass analyzes the ion beam. An accelerator receives the ion beam having ions at a first charge state and exits the ion beam having ions at a second positive charge state. The accelerator has a charge stripper, a gas source, and a plurality of accelerator stages. The charge stripper converts the ions from the first charge state to the second charge state. The gas source provides a high molecular weight gas, such as hexafluoride, to the charge stripper, and the plurality of accelerator stages respectively accelerate the ions. An end station supports a workpiece to be implanted with ions at the second charge state.

An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.

Method includes providing a substrate layer, depositing a first layer along an exposed side of the substrate layer, and depositing a second layer along an exposed side of the first layer such that the first layer is disposed between the substrate layer and the second layer. One of the first or second layers is a backing layer and the other is a conductive layer. The first and second layers form a stripping sheet that is configured to strip electrons from charged particles passing through the stripping sheet. The method also includes removing at least a portion of the substrate layer.

A charge stripping method includes irradiating a charge stripping film with an ion beam. The charge stripping film includes a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25 C. of at least 800 W/mK, or a laminated body of the graphitic film. The charge stripping film has a thickness of not less than 100 nm and less than 10 m, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of not more than 110.sup.5/K, and an area of at least 4 cm.sup.2.

System includes a particle accelerator configured to direct a particle beam of charged particles along a designated path. The system also includes an extraction device positioned downstream from the particle accelerator. The extraction device includes a stripper foil and a foil holder that holds the stripper foil. The foil holder is configured to position the stripper foil across the designated path of the particle beam such that the particle beam is incident thereon. The stripper foil is configured to remove electrons from the charged particles, wherein the stripper foil includes a backing layer and a conductive layer stacked with respect to one another. The backing layer includes synthetic diamond.

To provide a functional membrane for ion beam transmission capable of enhancing ion beam transmittance and improving beam emittance. A functional membrane for ion beam transmission according to the present invention is used in a beam line device through which an ion beam traveling in one direction passes and has a channel. The axis of the channel is substantially parallel to the travel direction of the ion beam.