A drift tube may include a middle portion, arranged as a hollow cylinder, and coupled to receive an RF voltage signal. The drift tube may include a first end portion, adjacent to and electrically connected to the middle portion. The middle portion and the first end portion may define a central opening to conduct an ion beam therethrough, along a direction of beam propagation. The first end portion may include a first focus assembly, and a second focus assembly, where the first focus assembly and the second focus assembly are movable with respect to one another along the direction of beam propagation, from a first configuration to a second configuration.

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.

An accelerator (30, 40, 50) includes: a plurality of acceleration cavities (31, 41, 51) having one or two acceleration gaps; and a plurality of first control means (33, 43, 53) provided with respect to each of the plurality of acceleration cavities, each of the plurality of first control means independently generating an oscillating electric field and controlling a motion of an ion beam inside a corresponding acceleration cavity. In addition, M-number of multipole magnets (32, 42, 52) which generate a magnetic field and which control a motion of an ion beam may be provided downstream to N-number of acceleration cavities. The first control means independently controls acceleration voltage and a phase thereof and supplies radiofrequency power. Accordingly, particularly in a front stage of acceleration, a DC beam from an ion generation source can be adiabatically captured.

A hybrid linear accelerator is disclosed comprising a standing wave linear accelerator section (“SW section”) followed by a travelling wave linear accelerator section (“TW section”). In one example, RF power is provided to the TW section and power not used by the TW section is provided to the SW section via a waveguide. An RF switch, an RF phase adjuster, and/or an RF power adjuster is provided along the waveguide to change the energy and/or phase of the RF power provided to the SW section. In another example, RF power is provided to both the SW section and the TW section, and RF power not used by the TW section is provided to the SW section, via an RF switch, an RF phase adjuster, and/or an RF power. In another example, an RF load is matched to the output of the TW section by an RF switch.

Disclosed herein is a waveguide for use in a linear accelerator. The waveguide comprises cells arranged to receive a beam of charged particles therethrough along a particle path, and is configured to receive an electromagnetic field from a source of electromagnetic radiation. A plurality of the cells are individually switchable cells, with each individually switchable cell comprising a respective switch configured to adjust the supply of electromagnetic radiation to the individually switchable cell.

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.

Disclosed herein is a method of manufacturing a radio frequency cavity resonator, wherein said radio frequency cavity resonator comprises a tubular structure extending along a longitudinal axis, said tubular structure comprising a circumferential wall structure surrounding said longitudinal axis, one or more tubular elements and a first and a second support structure associated with each of said tubular elements, wherein said first and second support structures are provided on opposite sides of each tubular element and extend radially along a diameter of the tubular structure, wherein the method comprises producing the resonator by additive manufacturing in a manufacturing direction that is parallel to said diameter.

An apparatus may include a drift tube assembly, the drift tube assembly defining a triple gap configuration, and arranged to accelerate and transmit an ion beam along abeam path. The apparatus may include a resonator, to output an RF signal to the drift tube assembly, and an RF quadrupole triplet, connected to the drift tube assembly, and arranged circumferentially around the beam path.

A drift tube may include a middle portion, arranged as a hollow cylinder, and coupled to receive an RF voltage signal. The drift tube may include a first end portion, adjacent to and electrically connected to the middle portion. The middle portion and the first end portion may define a central opening to conduct an ion beam therethrough, along a direction of beam propagation. The first end portion may include a first focus assembly, and a second focus assembly, where the first focus assembly and the second focus assembly are movable with respect to one another along the direction of beam propagation, from a first configuration to a second configuration.

An apparatus, system and method. An apparatus may include an RF power assembly, arranged to output an RF signal; a resonator, coupled to receive the RF signal, the resonator comprising a first output end and a second output end, and a drift tube assembly, configured to transmit an ion beam, and coupled to the resonator. As such, the drift tube assembly may include a first AC drift tube electrode, coupled to the first output end, and a second AC drift tube electrode, coupled to the second output end and separated from the first AC drift tube by a first gap. The RF power assembly may be switchable to switch output from a first Eigenmode frequency to a second Eigenmode frequency.