H10B43/20
characterised by three-dimensional arrangements, e.g. with cells on different height levels
H10B43/20
characterised by three-dimensional arrangements, e.g. with cells on different height levels
H10B43/23
with source and drain on different levels, e.g. with sloping channels
H10B43/23
with source and drain on different levels, e.g. with sloping channels