A method of forming a portion of a gate-all-around field-effect transistor (GAA FET) nanosheet structure includes performing a trim back recess process to form recesses in inner spacers of a fin-shaped column in a first direction from a sidewall of the fin-shaped column, wherein the fin-shaped column includes a stack of nanosheet channels and sacrificial layers having the inner spacers on both sides thereof in the first direction, performing an interface epitaxial growth process to grow interface source/drain (S/D) epi layers from exposed surfaces of the nanosheet channels of the fin-shaped column on the sidewalls of the fin-shaped column, performing an etch back process to etch back the interface S/D epi layer and form a continuous surface of the interface S/D epi layer, and performing a full epitaxial growth process to fully grow an S/D epi layer from the continuous surface of the interface S/D epi layer.

An integrated circuit device includes: a substrate including a first surface and a second surface that is opposite to the first surface; and a diode structure including: an upper semiconductor layer disposed on the first surface of the substrate and including a first dopant of a first conductivity type; a lower semiconductor layer disposed on the second surface of the substrate and including a second dopant of a second conductivity type that is different from the first conductivity type; and a first well region provided in a portion of the substrate that is between the upper semiconductor layer and the lower semiconductor layer, wherein the first well region is in contact with the upper semiconductor layer or the lower semiconductor layer.

Gate-all-around integrated circuit structures having differential nanowire thickness and gate oxide thickness, and methods of fabricating gate-all-around integrated circuit structures having differential nanowire thickness and gate oxide thickness, are described. For example, an integrated circuit structure includes a nanowire with an outer thickness and an inner thickness, the inner thickness less than the outer thickness. The nanowire tapers from outer regions having the outer thickness to an inner region having the inner thickness. A dielectric material is on and surrounding the nanowire such that a combined thickness of the nanowire and the dielectric material in the inner region is approximately the same as the outer thickness of the nanowire.

A semiconductor device is provided. The semiconductor device includes a substrate and channel structures stacked over each other along a first direction substantially perpendicular to a working surface of the substrate and each configured to have a current direction along a second direction substantially parallel to the working surface of the substrate. Source/drain (S/D) structures are positioned on opposing sides of the channel structure along the second direction. Gate structures are positioned on opposite sides of the channel structures along a third direction substantially parallel to the working surface of the substrate. The channel structures each have a shape of a nanosheet extending substantially perpendicular to the working surface of the substrate.

A method for producing a device comprising GAA transistors. Advantageously, the channels of the transistors are produced by deposition of a semiconductor material, preferably a 2D material, after successive removal of certain layers of the initial stack. The gates-all-around are produced after selective removal of the other layers from the initial stack. The initial stack does not comprise the semiconductor material, nor the material of the gates. The subsequent deposition of the semiconductor material aims to better preserve the semiconductor material.

A method for fabricating a GAA nanosheet structure, comprising: forming at least two channel layers and at least one sacrificial layer alternately stacked on a substrate to form a channel stack; forming, on the substrate, a dummy gate astride the channel stack; forming a first sidewall on a surface of the dummy gate; etching the sacrificial layer to form a recess at a side surface of the channel stack; forming a second sidewall within the recess; forming a source and a drain at two sides of the channel stack; in response to a channel layer being in contact with the dummy gate, etching the dummy gate and the channel layer to expose the at least one sacrificial layer, and then etching the at least one sacrificial layer to form a space for manufacturing a surrounding gate; and forming a metallic surrounding gate in the space.

The invention relates to a device comprising a transistor (T1, T2) comprising: a source (42) and a drain (43), a plurality of channels (41a, 41b, 41c) based on a semi-metallic material, a gate-all-around (50) surrounding the channels (41a, 41b, 41c), a gate dielectric layer (30) separating each channel (41a, 41b, 41c) and the gate-all-around (50), source and drain contacts (40S, 40D) based on the semi-metallic material,

Advantageously, the gate-all-around (50) totally surrounds one or more of the channels (41a, 41b, 41c), according to a GAA architecture.

The invention also relates to a method for producing such a device.

The invention relates to a device comprising transistors (T1, T2, T3), each comprising: a channel (41) with the basis of a semiconductive material, a gate-all-around (50), totally surrounding said channel (41), a source (42) and a drain (43) on either side of the channel (41), and source and drain contacts (60S, 60, 60D), a gate dielectric layer (30) separating the channel (41) and the gate-all-around (50), spacers (70) on either side of the gate (50). Advantageously, the gate dielectric layer (30) and the spacers (70) are formed by at least one single and same continuous layer (73) surrounding the gate-all-around (50). The invention also relates to a method for producing such a device.

A device comprising two transistors stacked along a main direction, the first transistor comprising channels stacked along the main direction and first source and drain contacts, the second transistor comprising channels stacked along the main direction and second source and drain contacts, wherein the first source (respectively drain) contact and the second source (respectively drain) contact are distinct and isolated from one another by a first gate dielectric layer and by a second gate dielectric layer. The invention also relates to a method for manufacturing the device.

The present invention relates to a semiconductor device and a method for manufacturing a semiconductor device. In one embodiment, a method for manufacturing a semiconductor device may comprise the steps of: growing a stack layer by alternately stacking sacrificial layers and channel regions on a substrate; forming a sacrificial poly gate on the stack layer; forming inner spacers and side spacers on side surfaces of the sacrificial layers and side surfaces of the sacrificial poly gate; and heat treating the inner spacers or the side spacers in a chamber set to a predetermined process pressure and a predetermined process temperature.