In some embodiments, the present disclosure relates to an integrated chip that includes a channel structure extending between a first source/drain region and a second source/drain region. Further, a gate electrode is arranged directly over the channel structures, and an upper interconnect contact is arranged over and coupled to the gate electrode. A backside contact is arranged below and coupled to the first source/drain region. The backside contact has a width that decreases from a bottommost surface of the backside contact to a topmost surface of the backside contact.

A device structure includes a substrate, a fin structure disposed on the substrate and elongated in an X direction, a gate structure formed on the fin structure and elongated in a Y direction transverse to the X direction to terminate at two opposite ends, at least one dielectric portion connected to at least one of the two opposite ends of the gate structure, and having two sides that are opposite to each other in the X direction, and a pair of gate spacers which are spaced apart from each other in the X direction and are respectively disposed on two lateral sides of the gate structure, and which are elongated in the Y direction to cover the two sides of the dielectric portion, respectively. A method for manufacturing the device structure is also disclosed.

A thin film transistor includes an oxide semiconductor layer having crystallinity over a substrate, a gate electrode overlapping the oxide semiconductor layer, and an insulating layer between the oxide semiconductor layer and the gate electrode. The oxide semiconductor layer includes a plurality of crystal grains. Each of the plurality of crystal grains includes at least one of a crystal orientation <001>, a crystal orientation <101>, and a crystal orientation <111> obtained by an EBSD method. In occupancy rates of crystal orientations calculated based on measurement points having crystal orientations with a crystal orientation difference greater than or equal to 0 degrees and less than or equal to 15 degrees with respect to a normal direction of a surface of the substrate, an occupancy rate of the crystal orientation <111> is greater than an occupancy rate of the crystal orientation <001> and an occupancy rate of the crystal orientation <101>.

Provided is a thin film transistor unit. The thin film transistor unit includes a first gate, a first gate insulating layer, a first semiconductor layer and a first source/drain electrode layer that are sequentially arranged on a substrate, wherein the first source/drain electrode layer includes a first source and a first drain that are spaced apart from each other along a first direction; and a floating electrode disposed on a side of the first semiconductor layer away from the first gate insulating layer, wherein in the first direction, an orthographic projection of the floating electrode on the substrate falls between an orthographic projection of the first source on the substrate and an orthographic projection of the first drain on the substrate.

Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises forming a first stack structure and a second stack structure in a first area over a substrate, wherein each of the stack structures includes semiconductor layers separated and stacked up; depositing a first interfacial layer around each of the semiconductor layers of the stack structures; depositing a gate dielectric layer around the first interfacial layer; forming a dipole oxide layer around the gate dielectric layer; removing the dipole oxide layer around the gate dielectric layer of the second stack structure; performing an annealing process to form a dipole gate dielectric layer for the first stack structure and a non-dipole gate dielectric layer for the second stack structure; and depositing a first gate electrode around the dipole gate dielectric layer of the first stack structure and the non-dipole gate dielectric layer of the second stack structure.

The present disclosure describes a semiconductor device and methods for forming the same. The semiconductor device includes nanostructures on a substrate and a source/drain region in contact with the nanostructures. The source/drain region includes epitaxial end caps, where each epitaxial end cap is formed at an end portion of a nanostructure of the nanostructures. The source/drain region also includes an epitaxial body in contact with the epitaxial end caps and an epitaxial top cap formed on the epitaxial body. The semiconductor device further includes gate structure formed on the nanostructures.

Semiconductor devices and method of forming the same are provided. In one embodiment, a semiconductor device includes a first transistor and a second transistor. The first transistor includes two first source/drain features and a first number of nanostructures that are stacked vertically one over another and extend lengthwise between the two first source/drain features. The second transistor includes two second source/drain features and a second number of nanostructures that are stacked vertically one over another and extend lengthwise between the two second source/drain features.

A semiconductor device includes: a first active pattern extended in a first direction on a substrate; a second active pattern extended in the first direction and spaced apart from the first active pattern in a second direction on the substrate; a field insulating layer between the first active pattern and the second active pattern on the substrate; a first gate electrode on the first active pattern; a second gate electrode on the second active pattern; and a gate isolation structure separating the first gate electrode and the second gate electrode from each other on the field insulating layer, wherein a width of the gate isolation structure in the second direction varies in a downward direction from the upper isolation pattern.

Nanosheet transistor devices are provided. A nanosheet transistor device includes a transistor stack that includes a lower nanosheet transistor having a first nanosheet width and a lower gate width. The transistor stack also includes an upper nanosheet transistor that is on the lower nanosheet transistor and that has a second nanosheet width and an upper gate width that are different from the first nanosheet width and the lower gate width, respectively. Related methods of forming a nanosheet transistor device are also provided.

An integrated circuit includes a first nanostructure transistor having a first gate electrode and a second nanostructure transistor having a second gate electrode. A dielectric isolation structure is between the first and second gate electrodes. A gate connection metal is on a portion of the top surface of the first gate electrode and on a portion of a top surface of the second gate electrode. The gate connection metal is patterned to expose other portions of the top surfaces of the first and second gate electrodes adjacent to the dielectric isolation structure. A conductive via contacts the exposed portion of the top surface of the second gate electrode.