In an example, for manufacturing a semiconductor device, first dopants are implanted through a first surface section of a first surface of a silicon carbide body. A trench is formed that extends from the first surface into the silicon carbide body. The trench includes a first sidewall surface and an opposite second sidewall surface. A spacer mask is formed. The spacer mask covers at least the first sidewall surface. Second dopants are implanted through a portion of a bottom surface of the trench exposed by the spacer mask. The first dopants and the second dopants have a same conductivity type. The first dopants and the second dopants are activated. The first dopants form a doped top shielding region adjoining the second sidewall surface. The second dopants form a doped buried shielding region adjoining the bottom surface.

A power semiconductor device includes a substrate of a first conductivity type, a drift layer of a first conductivity type on the substrate, a well region of a second conductivity type on the drift layer, a source region of the first conductivity type on the well region, a gate electrode disposed in a gate trench penetrating through the source region and the well region, a first gate insulating layer, a second gate insulating layer, and a third gate insulating layer sequentially disposed between the well region and the gate electrode, a dielectric layer on the gate electrode, and a drain electrode on a lower surface of the substrate.

A semiconductor device includes a substrate having a first conductivity type and including a cell region and a termination region. A trench is disposed in the substrate and located in the cell region, and a gate electrode disposed in the trench. A shielding doped region having a second conductivity type is disposed in the substrate and directly below the trench. A buried guard ring having the second conductivity type is disposed in the substrate and located in the termination region. The buried guard ring and the shielding doped region are disposed at the same depth in the substrate. In addition, a junction termination extension structure having the second conductivity type is disposed in the substrate, located directly above and separated from the buried guard ring.

A method for forming an interface layer on a silicon carbide body comprises removing an oxide layer from a surface of a silicon carbide body to obtain a silicon carbide surface. The silicon carbide body comprises a source region of a first conductivity type and a body region of a second conductivity type. The method further comprises after removing the oxide layer, depositing an interface layer directly on the silicon carbide surface. The interface layer has a thickness of less or equal to 15 nm. The method further comprises forming an electrical insulator over the interface layer, and forming a gate electrode over the electrical insulator.

A semiconductor device includes a drain, a substrate, an epitaxial layer, and a semiconductor layer. The semiconductor layer includes a source region located on a side the semiconductor layer away from the epitaxial layer. A trench extending to the epitaxial layer is disposed on a side of the source region is away from the epitaxial layer. A gate, an electrode plate, a first shield gate, and a second shield gate are disposed in the trench. The electrode plate is located between the first shield gate and the second shield gate. The trench is further filled with an oxidized layer structure. The first shield gate and the second shield gate are separately spaced from the electrode plate to form electrode plate capacitance. One of the source region, the drain, and the gate is electrically connected to the electrode plate a first electrode, and a second one of the source region, the drain, and the gate is electrically connected to the shield gate structure.

A method of manufacturing a superjunction silicon carbide semiconductor device is provided, enabling a reduction of the number of times a combination of epitaxial growth and ion implantation for forming a parallel pn structure is performed. In the method of manufacturing the superjunction silicon carbide semiconductor device, forming an epitaxial layer 2a, 2b of a second conductivity type on a front surface of a silicon carbide semiconductor substrate 1 of a first conductivity type and selectively forming semiconductor regions 4a, 4b of the first conductivity type by implanting nitrogen ions in the epitaxial layer are repeated multiple times, thereby forming the parallel pn structure.

A method includes growing an epitaxial layer over a substrate, forming a plurality of gates in the epitaxial layer, forming a breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprising a body ring structure, forming a source and a body region in the epitaxial layer, forming an interlayer dielectric layer over the epitaxial layer, forming a gate-source Electrostatic Discharge (ESD) diode structure in the interlayer dielectric layer, forming a source contact connected to the source, and a first terminal of the gate-source ESD diode structure, forming a gate contact connected to the plurality of gates and a second terminal of the gate-source ESD diode structure, and forming a drain contact underneath the substrate.

A switched-mode power supply includes a power semiconductor device that includes a semiconductor body comprising transistor cells and a drift zone between a drain layer and the transistor cells, the transistor cells comprising source zones, wherein the device exhibits a first output charge gradient when a voltage between the drain layer and the source zones of the transistor cells increases from a depletion voltage of the semiconductor device to a maximum drain/source voltage of the semiconductor device, wherein the device exhibits a second output charge gradient when a voltage between the drain layer and the source zones of the semiconductor device decreases from the maximum drain/source voltage to the depletion voltage of the semiconductor device, and wherein the semiconductor device is configured such that the first output charge gradient deviates by less than 5% from the second output charge gradient.

A semiconductor device includes a semiconductor part, first to third electrodes, and a control electrode. The first electrode is provided on a back surface of the semiconductor part. The second electrode is provided at a front surface side of the semiconductor part. The third electrode and the control electrode are provided inside a trench of the semiconductor part. The control electrode includes first and second control portions. The semiconductor device further includes first to third insulating films. The first insulating film is between the control electrode and the semiconductor part. The second insulating film covers the first and second control portions. The third insulating film is between the second electrode and the second insulating film. The third insulating film includes a portion extending between the first and second control portions. The third electrode is between the first electrode and the extension portion of the third insulating film.

devices and methods of forming a semiconductor device that includes a deep shielding pattern that may improve a reliability and/or a functioning of the device. An example method may include forming a wide band-gap semiconductor layer structure on a substrate, the semiconductor layer structure including a drift region that has a first conductivity type; forming a plurality of gate trenches in an upper portion of the semiconductor layer structure, the gate trenches spaced apart from each other, each gate trench having a bottom surface, a first sidewall, a second sidewall, and an upper opening; forming an obstruction over a portion of each gate trench that partially obscures the upper opening; and implanting dopants having a second conductivity type that is opposite the first conductivity type into the bottom surfaces of the gate trenches, where the dopants implanted into the bottom surface of the gate trenches form deep shielding patterns.