A semiconductor device including a transistor having a minute size is provided. In the semiconductor device, a second conductive layer is provided over a first conductive layer; the second conductive layer has a first opening overlapping with the first conductive layer; a third conductive layer is provided over the second conductive layer; the third conductive layer has a second opening overlapping with the first opening; a first insulating layer is in contact with a sidewall of the first opening in the second conductive layer; a semiconductor layer is in contact with a top surface of the first conductive layer, a side surface of the first insulating layer, and a top surface of the third conductive layer; a second insulating layer is provided over the semiconductor layer; a fourth conductive layer is provided over the second insulating layer; the first insulating layer includes a region sandwiched between the sidewall of the first opening in the second conductive layer and the semiconductor layer; and the semiconductor layer includes a region sandwiched between the sidewall of the first opening in the second conductive layer and the fourth conductive layer.

A semiconductor device having a high degree of integration is provided. A first and second transistors which are electrically connected to each other and a first insulating layer are included. The first transistor includes a first semiconductor layer, a second insulating layer, and a first to third conductive layers. The second transistor includes a second semiconductor layer, a third insulating layer, and a fourth to sixth conductive layers. The first insulating layer is positioned over the first conductive layer and includes an opening reaching the first conductive layer. The second conductive layer is positioned over the first insulating layer. The first semiconductor layer is in contact with a top surface of the first conductive layer, an inner wall of the opening, and the second conductive layer. The third conductive layer is positioned over the second insulating layer to overlap with the inner wall of the opening. The third insulating layer is positioned over the fourth conductive layer. The fifth and sixth conductive layers are positioned over the fourth conductive layer with the third insulating layer therebetween. The second semiconductor layer is in contact with top surfaces of the fifth and sixth conductive layers, side surfaces thereof that face each other, and a top surface of the third insulating layer sandwiched between the fifth conductive layer and the sixth conductive layer.

A semiconductor device includes an oxide semiconductor layer, a first electrode and a second electrode, which are arranged apart from each other on the oxide semiconductor layer, a metal oxide layer arranged between the oxide semiconductor layer and at least one of the first electrode and the second electrode, and a metal nitride layer arranged between the metal oxide layer and the oxide semiconductor layer.

A semiconductor device includes a buried power rail (BPR) over a substrate and a semiconductor structure over the BPR. The semiconductor structure is tube-shaped and extends along a vertical direction. The semiconductor structure includes a first source/drain (S/D) region over the BPR, a gate region over the first S/D region, and a second S/D region over the gate region. The semiconductor device includes a first S/D interconnect structure extending from the BPR and further into the semiconductor structure such that a top portion of the first S/D interconnect structure is surrounded by the first S/D region. The semiconductor device includes a gate structure that includes (i) a gate oxide formed along an inner surface of the gate region and (ii) a gate electrode formed along sidewalls of the gate oxide in the gate region. The semiconductor device includes a second S/D interconnect structure positioned over the second S/D region.

The present disclosure relates to semiconductor structures and, more particularly, to a device with a vertical nanowire channel region and methods of manufacture. The structure includes: a bottom source/drain region; a top source/drain region; a gate structure extending between the bottom source/drain region and the top source/drain region; and a vertical nanowire in a channel region of the gate structure.

Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.

A strained vertical channel semiconductor device, a method of manufacturing the same, and an electronic apparatus including the same are provided. The method includes: providing a vertical channel layer on a substrate, wherein the vertical channel layer is held by a first supporting layer on a first side in a lateral direction, and is held by a second supporting layer on a second side opposite to the first side; replacing the first supporting layer with a first gate stack while the vertical channel layer is held by the second supporting layer; and replacing the second supporting layer with a second gate stack while the vertical channel layer is held by the first gate stack.

Disclosed herein are dual gate trench shaped thin film transistors and related methods and devices. Exemplary thin film transistor structures include a non-planar semiconductor material layer having a first portion extending laterally over a first gate dielectric layer, which is over a first gate electrode structure, and a second portion extending along a trench over the first gate dielectric layer, a second gate electrode structure at least partially within the trench, and a second gate dielectric layer between the second gate electrode structure and the first portion.

A semiconductor structure and a method for manufacturing the semiconductor structure are provided. The semiconductor structure includes a semiconductor base, a bit line and a word line. The semiconductor base includes a substrate and an isolation structure. The isolation structure is arranged above the substrate and configured to isolate a plurality of active regions from each other. The bit line is arranged in the substrate and connected to the plurality of active regions. The word line is arranged in the isolation structure, intersects with the plurality of active regions and surrounds the plurality of active regions. The substrate is a Silicon-On-Insulator (SOI) substrate.

Structures and methods are disclosed in which a layer stack can be formed with a plurality of layers of a metal, where each of the layers of metal can be separated by a layer of a dielectric. An opening in the layer stack can be formed such that a semiconductor layer beneath the plurality of layers of the metal is uncovered. One or more vertical channel structures can be formed within the opening by epitaxial growth. The vertical channel structure can include a vertically oriented transistor. The vertical channel structure can include an interface of a silicide metal with a first metal layer of the plurality of metal layers. The interface can correspond to one of a source or a drain connection of a transistor. The silicide metal can be annealed above a temperature threshold to form a silicide interface between the vertical channel structure and the first metal layer.