Patent classifications
H10D30/6757
LIQUID CRYSTAL DISPLAY PANEL
According to an aspect, a liquid crystal display panel includes an extending portion. The extending portion is metal wiring provided on the same plane as a plane parallel to a surface of a TFT substrate on which a scan line extends in the X-direction, and is electrically conductive metal extending from the scan line. The extending portion partially overlaps a space, but does not overlap an opening area, in the Z-direction.
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
A method for forming a semiconductor structure includes the following steps. A semiconductor device is formed over a substrate. A trench is formed in the semiconductor device. The trench is filled with a gap-fill material using a deposition process, wherein a precursor used in the deposition process includes azidosilane, di-azidosilane or halide azidosilane.
GATE-ALL-AROUND TRANSISTOR HAVING MULTIPLE GATE LENGTHS
A semiconductor structure and a method of forming the same are provided. In an embodiment, an exemplary method includes forming a fin-shaped active region over a substrate and comprising a number of channel layers interleaved by a number of sacrificial layers, removing a source/drain region of the fin-shaped active region to form a source/drain opening, forming a source/drain feature in the source/drain opening, selectively removing the number of sacrificial layers to form a number of gate openings, and forming a gate structure in the number of gate openings, where the gate structure includes a first portion formed in a first gate opening of the number of gate openings and a second portion formed in a second gate opening of the number of gate openings, a gate length of the first portion is different from a gate length of the second portion.
SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF FORMING THE SAME
Embodiments of the present disclosure provide a semiconductor device structure and methods of forming the same. The structure includes a source/drain region disposed over a substrate, an interlayer dielectric layer disposed over the source/drain region, a first conductive feature disposed over the source/drain region, a gate electrode layer disposed over the substrate, and a dielectric layer surrounding the first conductive feature. The dielectric layer includes a first portion disposed between the interlayer dielectric layer and the first conductive feature and a second portion disposed between the first conductive feature and the gate electrode layer, at least a portion of the first portion has a first thickness, and the second portion has a second thickness substantially greater than the first thickness.
SEMICONDUCTOR DEVICE AND METHODS OF FORMATION
Inner spacers between a source/drain region of a nanostructure transistor and sacrificial nanostructure layers of the nanostructure transistor are removed prior to formation of a gate structure of the nanostructure transistor. The sacrificial nanostructure layers are removed, and then the inner spacers are removed. The sacrificial nanostructure layers are then replaced with the gate structure of the nanostructure transistor such that the gate structure and the source/drain region are spaced apart by air gaps that result from the removal of the inner spacers. The dielectric constant (or relative permittivity) of the air gaps between the source/drain region and the gate structure is less than the dielectric constant of the material of the inner spacers. The lesser dielectric constant of the air gaps reduces the amount of capacitance between the source/drain region and the gate structure.
FORMING A CAVITY WITH A WET ETCH FOR BACKSIDE CONTACT FORMATION
In some embodiments, the present disclosure relates to an integrated chip that includes a channel structure extending between a first source/drain region and a second source/drain region. Further, a gate electrode is arranged directly over the channel structures, and an upper interconnect contact is arranged over and coupled to the gate electrode. A backside contact is arranged below and coupled to the first source/drain region. The backside contact has a width that decreases from a bottommost surface of the backside contact to a topmost surface of the backside contact.
SEMICONDUCTOR DEVICE
A semiconductor device includes a first power supply line, a second power supply line, a first ground line, a switch circuit connected to the first and the second power supply line, and a switch control circuit connected to the first ground line and the first power supply line. The switch circuit includes a first and a second transistor of a first conductive type. A first gate electrode of the first transistor is connected to a second gate electrode of the second transistor. The switch control circuit includes a third transistor of a second conductive type, and a fourth transistor of a third conductive type. A third gate electrode of the third transistor is connected to a fourth gate electrode of the fourth transistor. A semiconductor device includes a signal line that electrically connects a connection point between the third and fourth transistor to the first and second gate electrode.
Semiconductor Structure with Gate Isolation Layer and Manufacturing Method Thereof
A method includes forming a lower semiconductor region, forming an upper semiconductor region overlapping the lower semiconductor region, forming a lower gate dielectric and an upper gate dielectric on the lower semiconductor region and the upper semiconductor region, respectively, forming a lower gate electrode on the lower gate dielectric and the upper gate dielectric, etching back the lower gate electrode, forming a gate isolation layer on the lower gate electrode that has been etched back, and forming an upper gate electrode over the gate isolation layer. The upper gate electrode is on the upper gate dielectric.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
A method includes forming a first bottom-tier transistor; forming a second bottom-tier transistor, the first and second bottom-tier transistors sharing a same source/drain region; forming a first top-tier transistor over the first bottom-tier transistor, the first top-tier transistor comprising a first channel layer and a first gate structure around the first channel layer; forming a second top-tier transistor over the second bottom-tier transistor, the second top-tier transistor comprising a second channel layer and a second gate structure around the second channel layer, the first and second top-tier transistors sharing a same source/drain region, wherein from a top view, a first dimension of the first channel layer in a lengthwise direction of the first gate structure is different than a second dimension of the second channel layer in the lengthwise direction of the first gate structure.
THREE-DIMENSIONAL FLOATING BODY MEMORY
Integrated circuit (IC) devices implementing three-dimensional (3D) floating body memory are disclosed. An example IC device includes a floating body memory cell comprising a transistor having a first source or drain (S/D) region, a second S/D region, and a gate over a channel portion between the first and second S/D regions; a BL coupled to the first S/D region and parallel to a first axis of a Cartesian coordinate system; a SL coupled to the second S/D region and parallel to a second axis of the coordinate system; and a WL coupled to or being a part of the gate and parallel to a third axis of the coordinate system. IC devices implementing 3D floating body memory as described herein may be used to address the scaling challenges of conventional memory technologies and enable high-density embedded memory compatible with advanced CMOS processes.