The present disclosure relates to the field of semiconductor devices and to the edge termination of an active area of a semiconductor device. It is an object of the present disclosure to provide for a semiconductor device that has an improved termination area, and a corresponding method and power device.

Provided a semiconductor device including: a semiconductor layer with an extended depletion layer; and an electrode disposed on the semiconductor layer directly or via another layer, the semiconductor layer including a first region containing, as a major component, a crystalline oxide semiconductor containing gallium, and a second region containing, as a major component, an oxide containing gallium, the second region including a linear crystal defect region in a cross section perpendicular to an upper surface of the semiconductor layer.

A semiconductor device includes a silicon carbide layer including an element region, a termination region surrounding the element region, a first semiconductor part including a first portion in the element region, and a second semiconductor part located on the first semiconductor part in a first direction, the second semiconductor part being adjacent to the first portion in a second direction; a gate electrode facing the second semiconductor part of the element region; a first insulating film located between the gate electrode and the silicon carbide layer; and a second insulating film located on the first portion of the first semiconductor part, the second insulating film being thicker than the first insulating film.

A semiconductor device includes a substrate comprising a first surface and a second surface positioned on an opposite side of the substrate. A first gate structure is located above the first surface of the substrate and a second gate structure is located above the first surface of the substrate, adjacent to the first gate structure. A first dielectric layer covers the first gate structure, the second gate structure, and the first surface of the substrate. The first dielectric layer has a first opening between the first gate structure and the second gate structure. A current spreading layer is located at a bottom of the first opening. The current spreading layer has a first width approximately equal to a width of the bottom of the first opening. A conductive plug is located between the first gate structure and the second gate structure and in contact with the current spreading layer.

Provided is a nitride semiconductor device including a p-type region having a high effective acceptor concentration while exhibiting good electrical characteristics, and a method of manufacturing the same. The nitride semiconductor device includes: a nitride semiconductor; and a p-type region provided in the nitride semiconductor. The p-type region includes an acceptor element and entirely has a concentration in a range of 510.sup.18 cm.sup.3 or higher and 110.sup.21 cm.sup.3 or lower. The p-type region includes a segregation part in which the acceptor element is partly segregated, and a matrix in which the acceptor element is not segregated. The concentration of the acceptor element in the segregation part is 4.6 times or smaller as high as that in the matrix.

A method for making a semiconductor device may include forming a first superlattice layer on a semiconductor substrate. The first superlattice layer may include a plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may further include forming a first device layer on the first superlattice layer and comprising silicon, forming a second device layer on the first superlattice layer laterally adjacent the first device layer, with the second device layer comprising a Group III-N semiconductor, forming a first device on the first device layer, and forming a second device on the second device layer.

A semiconductor device may include a semiconductor substrate and a superlattice layer on the semiconductor substrate. The superlattice layer may include a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The semiconductor device may also include a piezoelectric layer on the superlattice layer and comprising a Group III-N semiconductor.

A method for making a semiconductor device may include forming a superlattice layer on a first substrate and including a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base silicon portions. The method may further include forming a Group III-N semiconductor stack comprising a plurality of layers of Group III-N semiconductor layers above the superlattice layer, and separating the Group III-N semiconductor stack from the first substrate at the superlattice layer.

A method for making a semiconductor device may include forming a semiconductor substrate, and forming a superlattice layer on the semiconductor substrate and including a plurality of stacked groups of layers. Each group of layers may including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may also include forming a Group III-N semiconductor stack comprising a plurality of layers of Group III-N semiconductor layers above the superlattice layer.

A semiconductor device may include a semiconductor substrate and a first superlattice layer on the semiconductor substrate. The first superlattice layer may include a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The semiconductor device may further include a first device layer on the first superlattice layer and comprising silicon, a second device layer on the first superlattice layer laterally adjacent the first device layer, with the second device layer comprising a Group III-N semiconductor, a first device on the first device layer, and a second device on the second device layer.