Patent classifications
H10D62/115
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Provided are a semiconductor device and a method for forming the same. The semiconductor device includes a substrate including first and second active regions defined by an element isolation structure, a first element in the first active region and including a gate structure on the substrate, a second element in the second active region and including an insulation pattern in the substrate and including a first portion and a second portion surrounding the first portion, and a dummy gate structure in the second active region and including first and second patterns respectively on the first and second portions and a third pattern on the device isolation structure. The second portion and the element isolation structure define a region where a first doped region of the second element is formed. The second portion and the first portion define a region where a second doped region of the second element is formed.
SILICON CONTROL RECTIFIERS
The present disclosure relates to semiconductor structures and, more particularly, to a device triggered silicon control rectifiers (SCR) and methods of manufacture. The structure includes: a first device comprising a first shallow diffusion region of a first conductivity type within a first well of a second conductivity type and a second shallow diffusion region of the first conductivity type within the first well of the second conductivity type.
METHODS OF FORMING ARRAYS OF MEMORY CELLS INCLUDING PAIRS OF MEMORY CELLS HAVING RESPECTIVE CHARGE STORAGE NODES BETWEEN RESPECTIVE ACCESS LINES
Arrays of memory cells including an isolation region between first and second access lines, a first memory cell having a control gate in contact with the first access line and a charge storage node having a curved cross-section having a first end in contact with a first portion of the isolation region on a first side of the isolation region and a second end in contact with a second portion of the isolation region on the isolation region's first side, and a second memory cell having a control gate in contact with the second access line and a charge storage node having a curved cross-section having a first end in contact with the first portion of the isolation region on a second side of the isolation region and a second end in contact with the second portion of the isolation region on the isolation region's first side.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
A method includes forming first, second, third, fourth, fifth, and sixth channel patterns on a semiconductor substrate; forming a first isolation wall interposing the first and second channel patterns, a second isolation wall interposing the third and fourth channel patterns, wherein the first isolation wall further continuously extends to interpose the fifth and sixth channel patterns; forming a first gate pattern extending across the first, second, third, and fourth channel patterns and the first and second isolation walls, and a second gate pattern extending across the fifth and sixth channel patterns and the first isolation wall from the top view, wherein the first, second, third, fourth, and sixth channel patterns respectively have first, second, third, fourth, and sixth dimensions in a lengthwise direction of the first gate pattern, and the sixth dimension is greater than the first, second, third, and fourth dimensions.
STACKED FET WITH LOW PARASITIC-CAPACITANCE GATE
A semiconductor device comprises a top field effect transistor (FET) and a bottom FET in a stacked profile. The semiconductor device also comprises a gate. The gate comprises two top-FET gate extensions and two bottom-FET gate extensions. The semiconductor device also comprises an insulator liner. The insulator liner interfaces with the two top-FET gate extensions and two bottom-FET gate extensions. The semiconductor device also comprises a dielectric that interfaces with the insulator liner.
SEMICONDUCTOR DEVICE INCLUDING A BIPOLAR JUNCTION TRANSISTOR
A semiconductor device includes a semiconductor body having opposing first and second surfaces along a vertical direction, and a bipolar junction transistor that includes an emitter region electrically connected to an emitter contact at the first surface, a base region electrically connected to a base contact at the first surface, and a collector region electrically connected to a collector contact. A dielectric isolation structure extends into the semiconductor body from the first surface and includes a first sub-structure arranged, along a first lateral direction, between the emitter contact and the base contact. A field plate structure including a field plate dielectric and a field plate electrode is arranged on the field plate dielectric. A first part of the field plate structure is arranged on the first surface of the semiconductor body. A second part of the field plate structure is arranged on the first sub-structure of the dielectric isolation structure.
MULTI-LAYERED INSULATING FILM STACK
A method for forming a semiconductor device includes: forming a gate structure over a fin, where the fin protrudes above a substrate; forming an opening in the gate structure; forming a first dielectric layer along sidewalls and a bottom of the opening, where the first dielectric layer is non-conformal, where the first dielectric layer has a first thickness proximate to an upper surface of the gate structure distal from the substrate, and has a second thickness proximate to the bottom of the opening, where the first thickness is larger than the second thickness; and forming a second dielectric layer over the first dielectric layer to fill the opening, where the first dielectric layer is formed of a first dielectric material, and the second dielectric layer is formed of a second dielectric material different from the first dielectric material.
SEMICONDUCTOR DEVICE
A semiconductor device includes a substrate, a bit line structure formed over and protruding from the substrate, a spacer structure formed on and extending along sidewall of the bit line structure, and a landing pad disposed on the bit line structure and covering the slope. The spacer structure includes a first segment near a top of the spacer structure with a slope and a second segment beneath the first segment. A first segment consists of a first spacer layer contacting the bit line structure and a third spacer layer contacting the first spacer layer. A second segment consists of the first spacer layer contacting the bit line structure, a second spacer layer contacting the first spacer layer, and the third spacer layer contacting the second spacer layer, and the second segment is capped with the first segment.
Capacitor cell and structure thereof
Capacitor cells are provided. A first PMOS transistor is coupled between a power supply and a first node, and has a gate directly connected to a second node. A first NMOS transistor is coupled between a ground and the second node, and has a gate directly connected to the first node. A second PMOS transistor is coupled between the second node and the power supply, and has a gate directly connected to the second node. A second NMOS transistor is coupled between the first node and the ground, and has a gate directly connected to the first node. Sources of the first and second NMOS transistors share an N+ doped region in the P-type well region. The first NMOS transistor is disposed between the second NMOS transistor and the first and second PMOS transistors. Source of the first PMOS transistor is directly connected to the power supply.
Cyclic spin-on coating process for forming dielectric material
The present disclosure is generally related to semiconductor devices, and more particularly to a dielectric material formed in semiconductor devices. The present disclosure provides methods for forming a dielectric material layer by a cyclic spin-on coating process. In an embodiment, a method of forming a dielectric material on a substrate includes spin-coating a first portion of a dielectric material on a substrate, curing the first portion of the dielectric material on the substrate, spin-coating a second portion of the dielectric material on the substrate, and thermal annealing the dielectric material to form an annealed dielectric material on the substrate.