According to one aspect of the present disclosure, a semiconductor device includes a substrate having a first type dopant. In some embodiments, the semiconductor device also includes an epitaxial layer above the substrate, having a second type dopant and a top region. In some embodiments, the semiconductor device also includes a trench in the top region of the epitaxial layer; at least one doped ring implanted in the epitaxial layer below the trench; and a dielectric material filling within the trench. In some embodiments, there is a twelve-sided body tie in the epitaxial layer, wherein the sides of the twelve-sided body tie are not all equal to each other.

Example embodiments relate to a field-effect transistors having improved layouts. One example field-effect transistor includes a semiconductor substrate on which at least one transistor cell array is arranged. Each transistor cell includes a first transistor cell unit. Each first transistor cell unit includes a plurality of gate fingers, a main gate finger segment, a plurality of drain fingers, and a main drain finger segment. Each first transistor cell unit also includes a main gate finger base connected to the main gate finger segment of the first transistor cell unit and extending from that main gate finger segment towards the main drain finger segment of that first transistor cell unit. Further, each first transistor cell unit includes a main drain finger base connected to the main drain finger segment of that first transistor cell and extending from that main drain finger segment towards that main gate finger segment.

A method of forming an integrated DMOS transistor/EEPROM cell includes forming a first mask over a substrate, forming a drift implant in the substrate using the first mask to align the drift implant, simultaneously forming a first floating gate over the drift implant, and a second floating gate spaced apart from the drift implant, forming a second mask covering the second floating gate and covering a portion of the first floating gate, forming a base implant in the substrate using an edge of the first floating gate to self-align the base implant region, and simultaneously forming a first control gate over the first floating gate and a second control gate over the second floating gate. The first floating gate, first control gate, drift implant, and base implant form components of the DMOS transistor, and the second floating gate and second control gate form components of the EEPROM cell.

A method includes forming a first isolation region in a substrate, wherein a top surface of the first isolation region is level with a top surface of the substrate, removing an upper portion of the first isolation region to form a recess, depositing a gate dielectric layer over the first isolation region, forming a gate electrode layer over the gate dielectric layer and patterning the gate electrode layer to form a gate electrode region, wherein a first portion of the gate electrode region is vertically aligned with the first isolation region and a second portion of the gate electrode region is formed over the substrate, and where a top surface of the first portion is lower than a top surface of the second portion.

A vertical conduction integrated electronic device including: a semiconductor body; a trench that extends through part of the semiconductor body and delimits a portion of the semiconductor body, which forms a first conduction region having a first type of conductivity and a body region having a second type of conductivity, which overlies the first conduction region; a gate region of conductive material, which extends within the trench; an insulation region of dielectric material, which extends within the trench and is arranged between the gate region and the body region; and a second conduction region, which overlies the body region. The second conduction region is formed by a conductor.

Provided in the present invention is a trench gate power MOSFET (TMOS/UMOS) structure with a heavily doped polysilicon source region. The polysilicon source region is formed by deposition, and a trench-shaped contact hole is used at the source region, in order to attain low contact resistance and small cell pitch. The present invention may also be implemented in an IGBT.

A transistor includes a first gate electrode and a second gate electrode over a substrate and on opposite sides of a drain region, a first source region and the drain region on opposite sides of the first gate electrode, a second source region and the drain region on opposite sides of the second gate electrode, a first doped well formed under the first source region, a second doped well formed under the first source region, wherein the first doped well is embedded in the second doped well, and wherein a doping density of the first doped well is greater than a doping density of the second doped well and a body contact region adjacent to the first source region, wherein sidewalls of the body contact region are aligned with sidewalls of the first source region from a top view.

A vertical conduction integrated electronic device including: a semiconductor body; a trench that extends through part of the semiconductor body and delimits a portion of the semiconductor body, which forms a first conduction region having a first type of conductivity and a body region having a second type of conductivity, which overlies the first conduction region; a gate region of conductive material, which extends within the trench; an insulation region of dielectric material, which extends within the trench and is arranged between the gate region and the body region; and a second conduction region, which overlies the body region. The second conduction region is formed by a conductor.

A semiconductor device includes first source/drain regions disposed at both sides of a first gate structure and including dopants of a first conductivity type, counter regions being in contact with upper portions of the first source/drain regions and under both end portions of the first gate structure, and first halo regions in contact with bottom surfaces of the first source/drain regions. The counter regions include dopants of a second conductivity type that is different from the first conductivity type. The first halo regions include dopants of the second conductivity type.

A device includes a plurality of isolation regions formed in a substrate, wherein a top surface of a first isolation region is lower than a top surface of the substrate and a second isolation region has a first portion in a high voltage region and a second portion in a low voltage region, a first gate electrode layer over the high voltage region, a second gate electrode layer over the second isolation region and a third gate electrode layer over the low voltage region, wherein a bottom surface of the first gate electrode layer is higher than a bottom surface of the third gate electrode layer.