A method for manufacturing a semiconductor device includes: forming a transistor on a semiconductor substrate, in which the transistor includes a gate structure and a source/drain structure; forming a patterned dielectric layer on the semiconductor substrate, in which the patterned dielectric layer includes an opening extending from a top surface of the patterned dielectric layer to a top surface of the source/drain structure; forming a dielectric contact spacer to cover a sidewall of the opening; and forming a conductive contact in the opening such that the conductive contact is connected to the source/drain structure and is isolated from the gate structure by the dielectric contact spacer and the patterned dielectric layer.

A semiconductor device for power amplification includes: a source electrode, a drain electrode, and a gate electrode disposed above a semiconductor stack structure including a first nitride semiconductor layer and a second nitride semiconductor layer; and a source field plate that is disposed above the semiconductor stack structure between the gate electrode and the drain electrode, and has a same potential as a potential of the source electrode. The source field plate has a staircase shape, and even when length LF2 of an upper section is increased for electric field relaxation, an increase in parasitic capacitance Cds generated between the source field plate and a 2DEG surface is inhibited.

In a non-insulated DC-DC converter having a circuit in which a power MOSFET high-side switch and a power MOSFET low-side switch are connected in series, the power MOSFET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOSFET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOSFET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.

There is provided a semiconductor device. The semiconductor device includes a source layer, a well pickup layer formed on the source layer, a body structure formed on the well pickup layer and including a well region contacting the well pickup layer and first junctions formed on side walls of the body structure, channel pillars contacting the body structure and protruding from the body structure, and contact layers formed on the side walls of the body structure and electrically connecting the body structure and the well pickup layer.

The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a split gate and a semi-insulating field plate. The present invention also provides manufacturing methods of the structures.

A semiconductor structure includes a first layered dipole structure formed within a gate trench within a first polarity region of the semiconductor structure. A second layered dipole structure is formed within a gate trench within a second polarity region of the semiconductor structure and formed upon the first layered dipole structure. The layered dipole structure nearest to the bottom of the gate trench includes a dipole layer of opposite polarity relative to the polarity region of the semiconductor structure where the gate trench is located and reduces source to drain leakage.

A nanosheet field effect transistor design in which the threshold voltage is adjustable by adjusting the composition of the gate. The channel of the nanosheet field effect transistor may be composed of a III-V semiconductor material, and the gate, which may be separated from the channel by a high dielectric constant dielectric layer, may also be composed of a III-V semiconductor material. Adjusting the composition of the gate may result in a change in the affinity of the gate, in turn resulting in a change in the threshold voltage. In some embodiments the channel is composed, for example, of In.sub.xGa.sub.1-xAs, with x between 0.23 and 0.53, and the gate is composed of InAs.sub.1-yN.sub.y with y between 0.0 and 0.4, and the values of x and y may be adjusted to adjust the threshold voltage.

In a non-insulated DC-DC converter having a circuit in which a power MOSFET high-side switch and a power MOSFET low-side switch are connected in series, the power MOSFET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOSFET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOSFET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.

A device includes a semiconductor layer of a first conductivity type, and a first and a second body region over the semiconductor layer, wherein the first and the second body regions are of a second conductivity type opposite the first conductivity type. A doped semiconductor region of the first conductivity type is disposed between and contacting the first and the second body regions. A gate dielectric layer is disposed over the first and the second body regions and the doped semiconductor region. A first and a second gate electrode are disposed over the gate dielectric layer, and overlapping the first and the second body regions, respectively. The first and the second gate electrodes are physically separated from each other by a region, and are electrically interconnected. The region between the first and the second gate electrodes overlaps the doped semiconductor region.

A method of forming a double-gated junction field effect transistors (JFET) and a tri-gated metal-oxide-semiconductor field effect transistor (MOSFET) on a common substrate is provided. The double-gated JFET is formed in a first region of a substrate by forming a semiconductor gate electrode contacting sidewall surfaces of a first channel region of a first semiconductor fin and a top surface of a portion of a first fin cap atop the first channel region. The tri-gated MOSFET is formed in a second region of the substrate by forming a metal gate stack contacting a top surface and sidewall surfaces of a second channel region of a second semiconductor fin.