A semiconductor device includes a chip having a principal surface, a pn-junction portion extending in a horizontal direction along the principal surface inside the chip, a trench insulating structure formed in the principal surface such that the trench insulating structure penetrates through the pn-junction portion, and demarcating a diode region in the chip, a barrier forming region formed in a surface layer portion of the principal surface in the diode region, and a metal layer located on the principal surface such that the metal layer covers the barrier forming region in the diode region, and forming a Schottky-junction portion with the barrier forming region.

A semiconductor device and a method of fabricating the semiconductor device are disclosed. The method includes forming a fin base on a substrate, epitaxially growing a S/D region on the fin base, forming a contact opening on the S/D region, forming a semiconductor nitride layer on a sidewall of the contact opening, performing a densification process on the semiconductor nitride layer to form a densified semiconductor nitride layer, forming a silicide layer on an exposed surface of the S/D region in the contact opening, forming a contact plug in the contact opening, and forming a via structure in the contact plug.

Methods of manufacturing memory devices are provided. The method comprises forming a first epitaxial layer on a substrate; and forming a memory array on the first epitaxial layer, the memory array comprising a memory stack of alternating layers of an oxide material and a metal material on the first epitaxial layer, at least one memory cell extending from the first epitaxial layer through the memory stack, and a slit filled with a fill material adjacent to the at least one memory cell.

A semiconductor structure, a system, and a method of forming a multi-silicide structure for stacked FETs within the semiconductor. The semiconductor structure may include an NFET. The semiconductor structure may also include a PFET. The semiconductor structure may also include an NFET silicide proximately connected to the NFET, where the NFET silicide is a first material. The semiconductor structure may also include a PFET silicide proximately connected to the PFET, where the PFET silicide is a second material different than the first material. The system may include the semiconductor structure. The method may include forming an NFET silicide proximately connected to an NFET, where the NFET silicide is a first material. The method may also include forming a PFET silicide proximately connected to a PFET, where the PFET silicide is a second material different than the first material.

Method to form low-contact-resistance contacts to source/drain features are provided. A method of the present disclosure includes receiving a workpiece including an opening that exposes a surface of an n-type source/drain feature and a surface of a p-type source/drain feature, selectively depositing a first silicide layer on the surface of the p-type source/drain feature while the surface of the n-type source/drain feature is substantially free of the first silicide layer, depositing a metal layer on the first silicide layer and the surface of the n-type source/drain feature, and depositing a second silicide layer over the metal layer. The selectively depositing includes passivating the surface of the surface of the n-type source/drain features with a self-assembly layer, selectively depositing the first silicide layer on the surface of the p-type source/drain feature, and removing the self-assembly layer.

The present disclosure discloses a gate-all-around field effect transistor which not only can suppress the occurrence of punch through in the lower end of the substrate and direct leakage of current from the source region/drain region into the lower ends of the channels, but also can facilitate heat release of the substrate by forming trench inner spacers (TIS) and thus preventing source region/drain region impurities from diffusing into the substrate, and a method for manufacturing the same.

A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.

In a method of manufacturing a semiconductor device, first and second gate structures are formed. The first (second) gate structure includes a first (second) gate electrode layer and first (second) sidewall spacers disposed on both side faces of the first (second) gate electrode layer. The first and second gate electrode layers are recessed and the first and second sidewall spacers are recessed, thereby forming a first space and a second space over the recessed first and second gate electrode layers and first and second sidewall spacers, respectively. First and second protective layers are formed in the first and second spaces, respectively. First and second etch-stop layers are formed on the first and second protective layers, respectively. A first depth of the first space above the first sidewall spacers is different from a second depth of the first space above the first gate electrode layer.

A semiconductor device includes a semiconductor layer that is of a first conductivity type, a body region of a second conductivity type, a source region to be separated inwardly from an outer edge of the body region, a drain region formed on a surface of the semiconductor layer so as to be separated from the body region in a first direction orthogonal to a thickness direction of the semiconductor layer, a gate insulating layer formed on a portion of the surface of the semiconductor layer between the source region and the drain region in the first direction, a gate electrode that is formed on the gate insulating layer, an exposed region that is formed in the body region at a different position from the source region and in which the semiconductor layer is exposed, and a metal layer that forms a Schottky junction with the exposed region.

A semiconductor device including a memory cell featuring a first gate insulating film over a semiconductor substrate, a control gate electrode over the first gate insulating film, a second gate insulating film over the substrate and a side wall of the control gate electrode, a memory gate electrode over the second gate insulating film arranged adjacent with the control gate electrode through the second gate insulating film, first and second semiconductor regions in the substrate positioned on a control gate electrode side and a memory gate side, respectively, the second gate insulating film featuring a first film over the substrate, a charge storage film over the first film and a third film over the second film, the first film having a first portion between the substrate and memory gate electrode and a thickness greater than that of a second portion between the control gate electrode and the memory gate electrode.