A semiconductor device a first semiconductor layer of a first conductivity type at a first main side of a semiconductor wafer and a second semiconductor layer of a second conductivity type at second main side. The second semiconductor layer forms a pn junction with the first semiconductor layer. A first electrode is in ohmic contact with the first semiconductor layer and a second electrode layer is in ohmic contact with the second semiconductor layer. A first semiconductor region of the first conductivity type completely embedded in the second semiconductor layer and a second semiconductor region of the first conductivity type completely embedded in the second semiconductor layer.

A semiconductor device is provided that maintains assembly and improves stress tolerance. The semiconductor device includes a plurality of trenches, a plurality of trench electrodes, an insulation film, and a first electrode. The trench electrodes are provided respectively inside the trenches. The insulation film covers two or more of the trench electrodes. The first electrode is provided on the insulation film. The insulation film has an opening provided between the two or more trench electrodes covered with the insulation film. The first electrode is provided on the semiconductor substrate to fill the opening. Each of the trench electrodes has an upper surface that includes a first recessed portion. The insulation film has an upper surface that includes a second recessed portion located immediately above the first recessed portion. The first electrode has an upper surface that includes a third recessed portion located immediately above the opening.

Process flow for a stacked power diode and design of the resulting diode is disclosed. Blanket epitaxy over heavy doped wafers is performed. By controlling dopant addition during epitaxy, desired n-type, diode base, and p-type doping profiles and thicknesses achieved. V-groove pattern if formed on wafers by depositing mask film, lithography and anisotropic etch. Islands surrounded by V-grooves define individual diodes. V-grooves serve as side insulation. Next, oxidation step passivates V-grooves. Further, the mask film is stripped to open diode contact areas on both sides of wafers. Next high melting point metal and low melting point metal films are selectively electroplated on all open silicon surfaces. Stacking is performed on wafer level by bonding of desired wafer count by solid-liquid interdiffusion process. Wafer stacks are sawed into individual stacked diode dies along outer slopes of V-grooves. Final stacked devices can be used as DSRDdrift step recovery diodes. Compared to DSRDs made by known methods, better fabrication yield and higher pulse power electrical performance is achieved.

A power diode includes a semiconductor body having an anode region and a drift region, the semiconductor body being coupled to an anode metallization of the power diode and to a cathode metallization of the power diode, and an anode contact zone and an anode damage zone, both implemented in the anode region, the anode contact zone being arranged in contact with the anode metallization, and the anode damage zone being arranged in contact with and below the anode contact zone, wherein fluorine is included within each of the anode contact zone and the anode damage zone at a fluorine concentration of at least 1016 atoms*cm-3.

An ESD protection device includes an MOS transistor with a source region, drain region and gate region. A node designated for ESD protection is electrically coupled to the drain. A diode is coupled between the gate and source, wherein the diode would be reverse biased if the MOS transistor were in the active operating region.

Monolithic integration of low-capacitance p-n junctions and low-resistance p-n junctions (when conducting in reverse bias) is provided. Three epitaxial layers are used. The low-capacitance junctions are formed by the top two epitaxial layers. The low-resistance p-n junction is formed in the top epitaxial layer, and two buried structures at interfaces between the three epitaxial layers are used to provide a high doping region that extends from the low-resistance p-n junction to the substrate, thereby providing low resistance to current flow. The epitaxial layers are lightly doped as required by the low-capacitance junction design, so the buried structures are needed for the low-resistance p-n junction. The high doping region is formed by diffusion of dopants from the substrate and from the buried structures during thermal processing.

A method of manufacturing a semiconductor device includes irradiating the semiconductor body with particles through a first side of the semiconductor body, removing at least a part of impurities from an irradiated part of the semiconductor body by out-diffusion during thermal treatment in a temperature range between 450 C. to 1200 C., and forming a first load terminal structure at the first side of the semiconductor body.

This invention involves a fabrication method of fast recovery diode, which includes following steps: growing a sacrificial oxide layer on a surface of an N substrate; forming a P type doped field-limiting ring region on the substrate; forming a P type doped anode region on the substrate; removing the sacrificial oxide layer; annealing the substrate to form a PN junction; implanting oxygen into the surface of the substrate by ion implantation; annealing the substrate to form a silicon dioxide layer on the surface of the substrate; removing the silicon dioxide layer; forming an anode electrode and a cathode electrode of the fast recovery diode. The method eliminates the curved parts near the silicon surface of the profile of PN junction, decreases electric field intensity at the surface of the substrate, therefore increases the breakdown voltage and reliability of the fast recovery diode.

Semiconductor devices includes a thin epitaxial layer (nanotube) formed on sidewalls of mesas formed in a semiconductor layer. In one embodiment, a semiconductor device includes a first semiconductor layer, a second semiconductor layer formed thereon and of the opposite conductivity type, and a first epitaxial layer formed on mesas of the second semiconductor layer. An electric field along a length of the first epitaxial layer is uniformly distributed.

A vertical gallium nitride (GaN) PN diode uses epitaxial growth of a thick drift region with a very low carrier concentration and a carefully designed multi-zone junction termination extension to achieve high voltage blocking and high-power efficiency. An exemplary large area (1 mm.sup.2) diode had a forward pulsed current of 3.5 A, an 8.3 m-cm.sup.2 specific on-resistance, and a 5.3 kV reverse breakdown. A smaller area diode (0.063 mm.sup.2) was capable of 6.4 kV breakdown with a specific on-resistance of 10.2 m-cm.sup.2, when accounting for current spreading through the drift region at a 45 angle.