A device structure includes a substrate, a fin structure disposed on the substrate and elongated in an X direction, a gate structure formed on the fin structure and elongated in a Y direction transverse to the X direction to terminate at two opposite ends, at least one dielectric portion connected to at least one of the two opposite ends of the gate structure, and having two sides that are opposite to each other in the X direction, and a pair of gate spacers which are spaced apart from each other in the X direction and are respectively disposed on two lateral sides of the gate structure, and which are elongated in the Y direction to cover the two sides of the dielectric portion, respectively. A method for manufacturing the device structure is also disclosed.

A semiconductor structure and a method for fabricating the same are provided. The semiconductor structure includes a substrate, a source region, a drain region and a gate structure. The source region is located in the substrate. The drain region is located in the substrate. The gate structure is disposed on the substrate and located between the source region and the drain region, and includes a first sub-gate structure and a second sub-gate structure. The first sub-gate structure is adjacent to the source region and includes a first sub-gate insulating layer. The second sub-gate structure is adjacent to the drain region and includes a second sub-gate insulating layer. The second sub-gate insulating layer and the first sub-gate insulating layer are separated from each other. The first sub-gate insulating layer has a first thickness, and the second sub-gate insulating layer has a second thickness greater than the first thickness.

The embodiments of the disclosure provide a FinFET. The FinFET includes a substrate, a first gate stack and a second gate stack. The substrate has a first fin and a second fin. The first gate stack is across the first fin and extends along a widthwise direction of the first fin. The second gate stack is across the second fin and extends along a widthwise direction of the second fin. A bottommost surface of the first gate stack is lower than a bottommost surface of the second gate stack, and a first gate height of the first gate stack directly on the first fin is substantially equal to a second gate height of the second gate stack directly on the second fin.

The present disclosure describes a structure including a fin field effect transistor (finFET) and a nano-sheet transistor on a substrate and a method of forming the structure. The method can include forming first and second vertical structures over a substrate, where each of the first and the second vertical structures can include a buffer region and a first channel layer formed over the buffer region. The method can further include disposing a masking layer over the first channel layer of the first and second vertical structures, removing a portion of the first vertical structure to form a first recess, forming a second channel layer in the first recess, forming a second recess in the second channel layer, and disposing an insulating layer in the second recess.

A method includes forming an active region on a substrate, forming a sacrificial gate stack engaging the active region, measuring a gate length of the sacrificial gate stack at a height lower than a top surface of the active region, selecting an etching recipe based on the measured gate length of the sacrificial gate stack, etching the sacrificial gate stack with the etching recipe to form a gate trench, and forming a metal gate stack in the gate trench.

A semiconductor device includes a first transistor in a first region of a substrate and a second transistor in a second region of the substrate. The first transistor includes multiple first semiconductor patterns; a first gate electrode; a first gate dielectric layer; a first source/drain region; and an inner-insulating spacer. The second transistor includes multiple second semiconductor patterns; a second gate electrode; a second gate dielectric layer; and a second source/drain region. The second gate dielectric layer extends between the second gate electrode and the second source/drain region and is in contact with the second source/drain region. The first source/drain region is not in contact with the first gate dielectric layer.

Integrated circuits including MOSFETs with selectively recessed gate electrodes. Transistors having recessed gate electrodes with reduced capacitive coupling area to adjacent source and drain contact metallization are provided alongside transistors with gate electrodes that are non-recessed and have greater z-height. In embodiments, analog circuits employ transistors with gate electrodes of a given z-height while logic gates employ transistors with recessed gate electrodes of lesser z-height. In embodiments, subsets of substantially planar gate electrodes are selectively etched back to differentiate a height of the gate electrode based on a given transistor's application within a circuit.

A semiconductor device is disclosed that includes a plurality of fins on a substrate. A long channel gate is disposed over a first portion of the plurality of fins. A gate contact is provided having an extended portion that extends into an active area from a gate contact base outside the active area.

Radio-frequency (RF) switching devices having improved voltage handling capability. In some embodiments, a switching device can include a first terminal and a second terminal, and a plurality of switching elements connected in series to form a stack between the first terminal and the second terminal. The switching elements can have a non-uniform distribution of a parameter that results in the stack having a first voltage handling capacity that is greater than a second voltage handling capacity corresponding to a similar stack having a substantially uniform distribution of the parameter.

Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, buried channel structures integrated with non-planar structures. In an example, an integrated circuit structure includes a first fin structure and a second fin structure above a substrate. A gate structure is on a portion of the substrate directly between the first fin structure and the second fin structure. A source region is in the first fin structure. A drain region is in the second fin structure.