According to various embodiments, there is provided a MOSFET device. The MOSFET device may include a substrate; a first doped region disposed in the substrate; a second doped region disposed in the substrate, wherein the first doped region and the second doped region are laterally adjacent to each other; a third doped region disposed in the first doped region; a fourth doped region disposed in the second doped region; a gate disposed on the substrate, over the first and second doped regions, and between the third and fourth doped regions; and at least one high resistance region embedded in at least the second doped region, wherein the first doped region has a first conductivity type, wherein the second doped region, the third doped region, and the fourth doped region have a second conductivity type, wherein the first conductivity type and the second conductivity type are different.

A semiconductor substrate includes a p-type substrate body, an n-type buried layer on the p-type substrate body, and a p-type semiconductor layer on the n-type buried layer. A DTI region penetrates through the p-type semiconductor layer and the n-type buried layer, and reaches the p-type substrate body. An n-type semiconductor region, which is a cathode region of a Zener diode, and a p-type anode region of the Zener diode are formed in the semiconductor layer. The p-type anode region includes a p-type first semiconductor region formed under the n-type semiconductor region, and a p-type second semiconductor region formed under the p-type first semiconductor region. A PN junction is formed between the p-type first semiconductor region and the n-type semiconductor region. An impurity concentration of the p-type second semiconductor region is higher than an impurity concentration of the p-type first semiconductor region.

A semiconductor structure is provided. The semiconductor structure includes a shallow trench isolation (STI) region on a well region of a substrate, a plurality of transistors, and a power rail. Each of the transistors includes at least one fin, a gate electrode formed on the fin, and a doping region formed on the fin. The fin is formed on the well region, and is extending in a first direction. The gate electrode is extending in a second direction that is perpendicular to the first direction. The power rail is formed in the STI region and below the doping regions of the transistors, and extending in the first direction. Each of the doping regions is electrically connected to the power rail, so as to form a source region of the respective transistor. The power rail is electrically connected to the well region of the substrate.

A transistor includes a semiconductor body; a body region of a first conductivity type formed in the semiconductor body; a gate electrode formed partially overlapping the body region and insulated from the semiconductor body by a gate dielectric layer; a source region of a second conductivity type formed in the body region on a first side of the gate electrode; a trench formed in the semiconductor body on a second side of the gate electrode, the trench being lined with a sidewall dielectric layer and filled with a bottom dielectric layer and a conductive layer above the bottom dielectric layer, the conductive layer being electrically connected to the gate electrode; and a doped sidewall region of the second conductivity type formed in the semiconductor body along the sidewall of the trench where the doped sidewall region forms a vertical drain current path for the transistor.

First and second transistors with different electrical characteristics are supported by a substrate having a first-type dopant. The first transistor includes a well region within the substrate having the first-type dopant, a first body region within the well region having a second-type dopant and a first source region within the first body region and laterally offset from the well region by a first channel. The second transistor includes a second body region within the semiconductor substrate layer having the second-type dopant and a second source region within the second body region and laterally offset from material of the substrate by a second channel having a length greater than the length of the first channel. A gate region extends over portions of the first and second body regions for the first and second channels, respectively.

In a method for manufacturing a semiconductor device, a doped layer is formed in a substrate. A barrier layer that is in contact with the doped layer is formed. A semiconductor layer is formed over the substrate and the barrier layer. A fin structure is formed by patterning the semiconductor layer, the barrier layer, and the doped layer such that the fin structure includes a channel region including the semiconductor layer and a well region including the doped layer. An isolation insulating layer is formed such that a first portion of the fin structure protrudes from the isolation insulating layer and a second portion of the fin structure is embedded in the isolation insulating layer. A gate structure is formed over the fin structure and the isolation insulating layer.

A semiconductor device comprises a bulk semiconductor substrate that includes a first conductivity type floating buried doped region bounded above by a second conductivity type doped region and bounded below by another second conductivity semiconductor region. Trench isolation regions extend through the second conductivity doped region and the first conductivity floating buried doped region into the semiconductor region. Functional devices are disposed within the second conductivity type doped region. The first conductivity type floating buried doped region is configured as a self-biased region that laterally extends between adjacent trench isolation regions.

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

A semiconductor structure includes first, second, and third transistor elements each having a first screening region concurrently formed therein. A second screening region is formed in the second and third transistor elements such that there is at least one characteristic of the screening region in the second transistor element that is different than the second screening region in the third transistor element. Different characteristics include doping concentration and depth of implant. In addition, a different characteristic may be achieved by concurrently implanting the second screening region in the second and third transistor element followed by implanting an additional dopant into the second screening region of the third transistor element.

There is provided a semiconductor device including a memory region and a logic region. The memory region includes a transistor (memory transistor) that stores information by accumulating charge in a sidewall insulating film. The width of the sidewall insulating film of the memory transistor included in the memory region is made larger than the width of a sidewall insulating film of a transistor (logic transistor) included in the logic region.