A source region of a MOSFET includes a source contact region connected to a source electrode, a source extension region adjacent to a channel region of a well region, and a source resistance control region provided between the source extension region and the source contact region. The source resistance control region includes a low concentration source resistance control region which has an impurity concentration lower than that of the source contact region or the source extension region and a high concentration source resistance control region which is formed between the well region and the low concentration source resistance control region and has an impurity concentration higher than that of the low concentration source resistance control region.

Integrated circuit structures including a pillar resistor disposed over a surface of a substrate, and fabrication techniques to form such a resistor in conjunction with fabrication of a transistor over the substrate. Following embodiments herein, a small resistor footprint may be achieved by orienting the resistive length orthogonally to the substrate surface. In embodiments, the vertical resistor pillar is disposed over a first end of a conductive trace, a first resistor contact is further disposed on the pillar, and a second resistor contact is disposed over a second end of a conductive trace to render the resistor footprint substantially independent of the resistance value. Formation of a resistor pillar may be integrated with a replacement gate transistor process by concurrently forming the resistor pillar and sacrificial gate out of a same material, such as polysilicon. Pillar resistor contacts may also be concurrently formed with one or more transistor contacts.

A transistor includes: a semiconductor substrate; a plurality of gate electrodes, a plurality of source electrodes, and a plurality of drain electrodes on the semiconductor substrate; a drain pad on the semiconductor substrate and connected to the plurality of drain electrodes; a metal wiring on the semiconductor substrate and arranged spaced apart from, adjacent to and parallel to the drain pad; and a ground pad on the semiconductor substrate and connected to both ends of the metal wiring.

A semiconductor variable resistance device includes: a substrate; a gate formed on the substrate, the substrate further including a first trench the first trench formed outside a side of the gate; first and second doped regions, formed in the substrate, the first and second doped regions formed on two sides of the gate, the first trench formed between the gate and the first doped region; and first and second lightly-doped drain (LDD) regions, formed in the substrate. The first LDD region is formed between the first trench and the first doped region. The second LDD region is formed between the gate and the second doped region. The first and second doped regions form a source and a drain, respectively. The first trench is deeper than the first and the second lightly-doped drain regions.

Integrated circuit structures including a pillar resistor disposed over a surface of a substrate, and fabrication techniques to form such a resistor in conjunction with fabrication of a transistor over the substrate. Following embodiments herein, a small resistor footprint may be achieved by orienting the resistive length orthogonally to the substrate surface. In embodiments, the vertical resistor pillar is disposed over a first end of a conductive trace, a first resistor contact is further disposed on the pillar, and a second resistor contact is disposed over a second end of a conductive trace to render the resistor footprint substantially independent of the resistance value. Formation of a resistor pillar may be integrated with a replacement gate transistor process by concurrently forming the resistor pillar and sacrificial gate out of a same material, such as polysilicon. Pillar resistor contacts may also be concurrently formed with one or more transistor contacts.

Described herein are semiconductor devices and methods of forming the same. In some aspects, methods of forming a semiconductor device includes forming a gate stack having a self-aligning cap and a gate metal on a substrate, depositing a resist mask onto the semiconductor device, and patterning the resist mask such that the gate stack is exposed. Additionally, methods include removing the self-aligning cap and the gate metal from the exposed gate stack, depositing a resistor metal on the semiconductor device such that a metal resistor is formed within the exposed gate stack, and forming a bar contact and contact via above the metal resistor.

Described herein are semiconductor devices and methods of forming the same. In some aspects, methods of forming a semiconductor device includes forming a gate stack having a self-aligning cap and a gate metal on a substrate, depositing a resist mask onto the semiconductor device, and patterning the resist mask such that the gate stack is exposed. Additionally, methods include removing the self-aligning cap and the gate metal from the exposed gate stack, depositing a resistor metal on the semiconductor device such that a metal resistor is formed within the exposed gate stack, and forming a bar contact and contact via above the metal resistor.

A method of making a semiconductor device includes etching an insulation layer to form a plurality of openings over a first region of the substrate and a plurality of openings over a second region of the substrate. The method includes filling a first opening of the plurality of openings over the first region with a first P-metal. The method includes filling a second opening of the plurality of openings over the first region with a first N-metal. An area of the first N-metal substantially differs in size from an area of the first P-metal. The method includes filling a first opening of the plurality of openings over the second region with a second P-metal. The method includes filling a second opening of the plurality of openings over the second region with a second N-metal. An area of the second N-metal differs from an area of the second P-metal.

A semiconductor device for high-frequency amplification includes a substrate; a first nitride semiconductor layer above the substrate; a two-dimensional electron gas layer; a second nitride semiconductor layer; and a source electrode, a drain electrode, and a gate electrode spaced apart from each other above the first nitride semiconductor layer. In a plan view, an active region with a two-dimensional electron gas layer includes a high-electron-mobility transistor and the resistor provided above the second nitride semiconductor layer. In the plan view, a non-active region includes a drain terminal and a gate terminal connected to the drain electrode or the gate electrode; and a first resistor terminal and a second resistor terminal connected to the resistor.

An Ill-nitride semiconductor based heterojunction power device is disclosed and includes a first and second heterojunction transistors formed on a substrate. The first and second heterojunction transistors include first and second Ill-nitride semiconductor regions formed over the substrate. The first Ill-nitride semiconductor region includes a first heterojunction, a first terminal connected to the first Ill-nitride semiconductor region, a second terminal laterally spaced from the first terminal and connected to the first Ill-nitride semiconductor region, and a first gate region over the first Ill-nitride semiconductor region between the first and second terminals. The second Ill-nitride semiconductor region includes a second heterojunction, a third terminal connected to the second Ill-nitride semiconductor region, a fourth terminal laterally spaced from the third terminal and connected to the second Ill-nitride semiconductor region, first highly doped semiconductor regions of a first conductivity type formed over the second Ill-nitride semiconductor region.