A semiconductor device and fabrication method are described for integrating a nanosheet transistor with a multimodal transistor (MMT) in a single nanosheet process flow by processing a wafer substrate to form buried metal source/drain structures in an MMT region that are laterally spaced apart from one another and positioned below an MMT semiconductor channel layer before forming a transistor stack of alternating Si and SiGe layers in an FET region which are selectively processed to form gate electrode openings so that a first ALD oxide and metal layer are patterned and etched to form gate electrodes in the transistor stack and to form a channel control gate electrode over the MMT semiconductor channel layer, and so that a second oxide and conductive layer are patterned and etched to form a current control gate electrode over the MMT semiconductor channel layer and adjacent to the channel control gate electrode.

A semiconductor device that includes a lower pattern extending in a first direction, a first channel pattern on the lower pattern, and includes a plurality of first sheet patterns, a second channel pattern on the lower pattern, includes a plurality of second sheet patterns and spaced apart from the first channel pattern, a first gate structure which extends around the first sheet pattern, and includes a first gate electrode and a first gate insulating film, a second gate structure which extends around the second sheet pattern, and includes a second gate electrode and a second gate insulating film, a first gate capping pattern and a second gate capping pattern. The number of first sheet patterns is different from the number of second sheet patterns, and a thickness of the first gate capping pattern is different from a thickness of the second gate capping pattern.

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate including a first peripheral region and a second peripheral region; a plurality of recessed gates respectively including a recessed gate dielectric layer inwardly positioned in the first peripheral region and including a U-shaped cross-sectional profile, a recessed gate bottom conductive layer positioned on the recessed gate dielectric layer and including a valley-shaped cross-sectional profile, resulting in a first valley, a recessed gate top conductive layer conformally positioned on the first valley of the recessed gate bottom conductive layer, and a recessed gate capping layer positioned on the recessed gate top conductive layer; and a peripheral gate structure positioned on the second peripheral region. An element density of the first peripheral region is greater than an element density of the second peripheral region.

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate including a first peripheral region and a second peripheral region; a plurality of recessed gates respectively including a recessed gate dielectric layer inwardly positioned in the first peripheral region and including a U-shaped cross-sectional profile, a recessed gate bottom conductive layer positioned on the recessed gate dielectric layer and including a valley-shaped cross-sectional profile, resulting in a first valley, a recessed gate top conductive layer conformally positioned on the first valley of the recessed gate bottom conductive layer, and a recessed gate capping layer positioned on the recessed gate top conductive layer; and a peripheral gate structure positioned on the second peripheral region. An element density of the first peripheral region is greater than an element density of the second peripheral region.

In an output circuit included in an IO cell, between transistor rows of an output transistor, placed is a first interconnect connected to the gates of the transistors. Second interconnects connected to the drains of the transistors are placed for the transistor rows. The first interconnect is located between the second interconnects separated from each other in planar view. That is, the second interconnects connected to the drains of the transistors do not overlap the first interconnect connected to the gates of the transistors in planar view.

An integrated circuit with mixed poly pitch cells with a plurality of different pitch sizes is disclosed. The integrated circuit includes: at least a minimum unit each with at least a first number of first poly pitch cells with a first pitch size, and a second number of second poly pitch cells with a second pitch size, the first pitch size PP is different from the second pitch size PP1, the greatest common divisor of the first pitch size PP and the second pitch size PP1 is GCD, wherein GCD is an integer greater than 1; a gate length of the first pitch size is Lg; a gate length of the second pitch size is Lg1; Lg and Lg1 are capable of being extended to achieve G-bias for power and speed optimization of the minimum unit and the integrated circuit.

A semiconductor device includes a substrate; and a plurality of sub-word line drivers, each of the sub-word line drivers including a plurality of transistors, wherein at least one of the plurality of transistors has a buried gate structure positioned in the substrate.

Semiconductor devices and methods of manufacturing are presented wherein a gate dielectric is treated within an analog region of a semiconductor substrate. The gate dielectric may be treated with a plasma exposure and/or an annealing process in order to form a recovered region of the gate dielectric. A separate gate dielectric is formed within a logic region of the semiconductor substrate, and a first gate electrode and second gate electrode are formed over the gate dielectrics.

A semiconductor device may include a substrate, a lower power line in a lower portion of the substrate, metal layers on the substrate, and a protection structure that is electrically connected to the lower power line and the metal layers. The protection structure may include a doping pattern in the substrate, and a first source/drain pattern that is on the substrate and is electrically connected to an upper portion of the doping pattern. The doping pattern and the first source/drain pattern may include different dopants from each other.

A high voltage field effect transistor includes a thick silicon oxide gate dielectric and polysilicon gate electrode, while a low voltage field effect transistor includes a high dielectric constant metal oxide gate dielectric and a metallic gate electrode.