A semiconductor device includes a plurality of standard cells. The plurality of standard cells include a first group of standard cells arranged in a first row extending in a row direction and a second group of standard cells arranged in a second row extending in the row direction. The first group of standard cells and the second group of standard cells are arranged in a column direction. A cell height of the first group of standard cells in the column direction is different from a cell height of the second group of standard cells in the column direction.

A method is provided, and including operations as below: forming multiple active areas extending in a first direction; forming multiple conductive patterns extending in a second direction different from the first direction and arranged in a first layer above the active areas; forming multiple gates extending parallel to the conductive patterns; and forming a first set of conductive lines extending in the first direction and arranged in three first metal tracks that are in a second layer above the first layer, wherein one of the first set of conductive lines is arranged in a middle track of the three first metal tracks, coupled to one of the gates and overlap a first shallow trench region between two of the active areas.

A layout structure of a standard cell using a complementary FET (CFET) is provided. First and second transistors that are three-dimensional transistors lie between first and second power supply lines as viewed in plan, the second transistor being formed above the first transistor in the depth direction. A first local interconnect is connected with the source or drain of the first transistor, and a second local interconnect is connected with the source or drain of the second transistor. The first and second local interconnects extend in the Y direction, overlap each other as viewed in plan, and both overlap the first and second power supply lines as viewed in plan.

A method includes fabricating a first-voltage underlayer power rail conductively connecting to the source region of a first-type transistor and fabricating a second-voltage underlayer power rail conductively connecting to the source region of a second-type transistor. Each of the first-voltage and second-voltage underlayer power rails extends in a first direction. The method also includes patterning a first connection layer to form a first-voltage power rail and a second-voltage power rail extending in the second direction which is perpendicular to the first direction. The first-voltage power rail is directly connected with the first-voltage underlayer power rail through a first via-connector and the second-voltage power rail is directly connected with the second-voltage underlayer power rail through a second via-connector.

A method is provided, and including operations as below: forming multiple active areas extending in a first direction; forming multiple conductive patterns extending in a second direction different from the first direction and arranged in a first layer above the active areas; forming multiple gates extending parallel to the conductive patterns; and forming a first set of conductive lines extending in the first direction and arranged in three first metal tracks that are in a second layer above the first layer, wherein one of the first set of conductive lines is arranged in a middle track of the three first metal tracks, coupled to one of the gates and overlap a first shallow trench region between two of the active areas.

An integrated circuit includes a first-voltage underlayer power rail and a second-voltage underlayer power rail extending in a first direction below a first connection layer. A first-type transistor and a second-type transistor are underneath the first connection layer. The source region of the first-type transistor is connected to the first-voltage underlayer power rail, and the source region of the second-type transistor is connected to the second-voltage underlayer power rail. The integrated circuit also includes a first-voltage power rail, a second-voltage power rail, and a signal conducting line, each of which extends in a second direction in the first connection layer. The first-voltage power rail is connected to the first-voltage underlayer power rail, and the second-voltage power rail is connected to the second-voltage underlayer power rail. The signal conducting line is conductively connected to either a terminal-conductor or a gate-conductor.

Provided is a semiconductor integrated circuit device including a nanowire field effect transistor (FET) and having a layout configuration effective for making manufacturing the device easy. A standard cell having no logical function is disposed adjacent to a standard cell having a logical function. The standard cell includes nanowire FETs having nanowires and pads. The standard cell further includes dummy pads, which have no contribution to a logical function of a circuit.

An integrated circuit includes a first standard cell including a first first-type transistor, a first second-type transistor, a third second-type transistor, and a third first-type transistor, a second standard cell including a second first-type transistor, a second second-type transistor, a fourth second-type transistor and a fourth first-type transistor, a plurality of wiring layers which are disposed on the first and second standard cells and includes a first wiring layer, a second wiring layer, and a third wiring layer sequentially stacked. A source contact of the first first-type transistor and a source contact of the second first-type transistor are electrically connected through a first power rail of the plurality of wiring layers, and a source contact of the third first-type transistor and a source contact of the fourth first-type transistor are electrically connected through a second power rail of the plurality of wiring layers.

A chip includes a first row of cells including a first cell, and a second row of cells including a second cell, wherein the second row of cells is adjacent to the first row of cells. The chip also includes first tracks providing signal routing for the first cell, wherein each of the first tracks extends in a first direction, and one of the first tracks overlaps a boundary between the first cell and the second cell. The chip also includes second tracks providing signal routing for the second cell, wherein each of the second tracks extends in the first direction.

A method includes a first set of active areas extending in a first direction and separated from each other along a second direction in a cell; first and second gate s that cross the first set of active areas along the second direction, the first gate being shared by a first transistor of a first type and a second transistor of a second type and the second gate being shared by a third transistor of the first type and a fourth transistor of the second type; and a set of conductive lines arranged in three metal tracks in the cell and coupling at least one of terminals of the first to fourth transistors to another one of the terminals of the first to fourth transistor. The first transistor is turned off to electrically disconnect a source/drain terminal of the first transistor from a source/drain terminal of the fourth transistor.