Patent classifications
H10D84/988
Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including snake open configured fill cells, and the second DOE including metal island open configured fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The first DOE contains fill cells configured to enable non-contact (NC) detection of snake opens, and the second DOE contains fill cells configured to enable NC detection of metal island opens.
Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, TS-short-configured, metal-short configured, and AA-short-configured, NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one TS-short-related failure mode, one metal-short-related failure mode, and one AA-short-related failure mode.
Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATE-short-configured, and GATECNT-short-configured, NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of short-circuit failure modes, including at least one chamfer-short-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one GATECNT-short-related failure mode.
Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including snake open configured fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The first DOE contains fill cells configured to enable non-contact (NC) detection of merged-via opens, and the second DOE contains fill cells configured to enable NC detection of snake opens.
Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including metal island open configured fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The first DOE contains fill cells configured to enable non-contact (NC) detection of merged-via opens, and the second DOE contains fill cells configured to enable NC detection of metal island opens.
Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including chamfer short configured fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The first DOE contains fill cells configured to enable non-contact (NC) detection of side-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of chamfer shorts.
Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including via open configured fill cells, and the second DOE including merged-via configured fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The first DOE contains fill cells configured to enable non-contact (NC) detection of via opens, and the second DOE contains fill cells configured to enable NC detection of merged-via opens.
Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of short-circuit failure modes, including at least one chamfer-short-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one TS-short-related failure mode.
Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATECNT-short-configured, metal-short-configured, and AA-short-configured, NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATECNT-short-related failure mode, one metal-short-related failure mode, and one AA-short-related failure mode.
Integrated circuit containing standard logic cells and ilbrary-compatible, NCEM-enabled fill cells, including at least via-open-configured, gate-short-configured, TS-short-configured, and AA-short-conigured, NCEM-enabled fill cells
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (NCEM). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATE-short-related failure mode, one TS-short-related failure mode, and one AA-short-related failure mode.