An element including: a first electrode; an intermediate layer made of a silicone rubber composition containing a silicone rubber; and a second electrode, where the first electrode, the intermediate layer, and the second electrode are disposed in this order, wherein a peak intensity ratio (1095±5 cm.sup.−1/1025±5 cm.sup.−1) of an infrared absorption spectrum of the intermediate layer varies along a vertical direction relative to a surface of the first electrode, and to a surface of the second electrode.

An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

A method of manufacturing a porous pressure sensor, comprising: providing a substrate; forming a piezoelectric film on an upper surface of the substrate; performing a porosification process on the piezoelectric film, such as performing a wet etching process or a heat treatment process to form a porous pressure sensing layer; and forming a first electrode and a second electrode on two opposite sides of the upper surface of the porous pressure sensing layer, respectively. The present application is also directed to a pressure sensors manufactured by the method of manufacturing the porous pressure sensor.

A method of manufacturing a porous pressure sensor, comprising: providing a substrate; forming a piezoelectric film on an upper surface of the substrate; performing a porosification process on the piezoelectric film, such as performing a wet etching process or a heat treatment process to form a porous pressure sensing layer; and forming a first electrode and a second electrode on two opposite sides of the upper surface of the porous pressure sensing layer, respectively. The present application is also directed to a pressure sensors manufactured by the method of manufacturing the porous pressure sensor.

Provided is an actuator including a piezoelectric element capable of satisfying three of a large amplitude, a high resonance frequency, and a large generated force. Actuator (100) is a drive source having a cantilever structure in which one end is a fixed end and the other end is displaced, and includes first piezoelectric body (110), second piezoelectric body (120), and shim member base (130) disposed between first piezoelectric body (110) and second piezoelectric body (120). In first piezoelectric body (110) and second piezoelectric body (120), piezoelectric body removal parts (110a) and (120a) are formed.

Emergency stop pressure sensors 17 are installed on both side surfaces of a movable link 11 of a robot arm 14 of an assembly robot. When a worker S unintentionally walks in a swing range Ra of the robot arm 14 and contacts the emergency stop pressure sensor 17, a detection signal is transmitted to a control unit 19, and the control unit 19 shuts power transmission to a driving source swinging the robot arm. The emergency stop pressure sensor 17 has a first electrode and a second electrode constituting a pair of electrodes and an intermediate layer formed of rubber or a rubber composition, which is disposed between the pair of electrodes, the intermediate layer generating power upon deformation caused by contact with a contacted body (the worker). A side of the intermediate layer in a laminate direction undergoes surface modification treatment and/or inactivation treatment. With this treatment, the one side and the other side of the intermediate layer have different degrees of deformation to the same deformation adding force.

In some embodiments, a piezoelectric device is provided. The piezoelectric device includes a semiconductor substrate. A first electrode is disposed over the semiconductor substrate. A piezoelectric structure is disposed on the first electrode. A second electrode is disposed on the piezoelectric structure. A heating element is disposed over the semiconductor substrate. The heating element is configured to heat the piezoelectric structure to a recovery temperature for a period of time, where heating the piezoelectric structure to the recovery temperature for the period of time improves a degraded electrical property of the piezoelectric device.

Provided is an energy conversion film excellent in charge retention performance and suppressed in deterioration of piezoelectricity even if it is exposed to a high temperature environment and an energy conversion element and the like using the film. An energy conversion element comprising: an energy conversion film at least comprises a charged resin film consisting of a resin film at least containing a thermoplastic resin and a metal soap; and an electrode provided on at least one of the two surfaces of the energy conversion film.

Examples include a device including a nanovoided polymer element having a first surface and a second surface, a first plurality of electrodes disposed on the first surface, a second plurality of electrodes disposed on the second surface, and a control circuit configured to apply an electrical potential between one or more of the first plurality of electrodes and one or more of the second plurality of electrodes to induce a physical deformation of the nanovoided polymer element.

A mechanically and piezoelectrically anisotropic polymer thin film is formed from a crystallizable polymer and an additive configured to interact with the polymer to facilitate chain alignment and, in some examples, create a higher crystalline content within the polymer thin film. The polymer thin film and its method of manufacture may be characterized by a bimodal molecular weight distribution where the molecular weight of the additive may be less than approximately 5% of the molecular weight of the crystallizable polymer. Example polymers may include vinylidene fluoride, trifluoroethylene, chlorotrifluoroethylene, hexafluoropropylene, and vinyl fluoride. Example additives may occupy up to approximately 60 wt. % of the polymer thin film. The polymer thin film may be characterized by a piezoelectric coefficient (d.sub.31) of at least approximately 5 pC/N or an electromechanical coupling factor (k.sub.31) of at least approximately 0.1.