H ELECTRICITY
H10 SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10N ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
30/00 Piezoelectric or electrostrictive devices
H10N30/01 Manufacture or treatment
H10N30/05 Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes