A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

A vehicle sensor assembly includes an optical sensor surface, at least two transducers arranged to input energy into the optical surface to produce an energy wave through the optical sensor surface and sense an attribute of an energy wave within the optical sensor surface. A controller arranged to drive the at least two transducers to input energy into the optical surface to produce an energy wave within the optical sensor surface to dislodge debris from the optical sensor surface.

Method for operating an ultrasonic motor with an ultrasonic actuator formed as a plate and an electrical excitation device. The ultrasonic actuator has at least four identical volume regions arranged symmetrically in relation to a transverse plane and in relation to a longitudinal plane, each volume region forming acoustic standing waves and static bending deformations. The electrical excitation device provides at least one electric alternating voltage and two static electric voltages the at least one alternating voltage U1 being applied in a dynamic operating mode simultaneously to two of the generators for forming an acoustic standing wave in the ultrasonic actuator, and the two static electric voltages being applied in a static operating mode simultaneously to all generators for forming a static bending deformation of the ultrasonic actuator.

A haptic actuator is disclosed. The haptic actuator includes a polygonal piezoelectric element configured to generate a displacement thereof while expanding and contracting in accordance with polarities of a voltage applied thereto, and a jig member coupled to the piezoelectric element at upper and lower sides of the piezoelectric element in a thickness direction of the piezoelectric element in a state of contacting only corners of the piezoelectric element and configured to amplify the displacement generated at the piezoelectric element, thereby vibrating. The jig member amplifies the displacement generated at the piezoelectric element and, as such, vibrates. Accordingly, it is possible to provide excellent haptic effects with high resolution to the user, using even a small voltage.

A control method of a piezoelectric driving device which includes a vibrator including a piezoelectric element and vibrating by application of a drive signal to the piezoelectric element, a driven unit moving by the vibration of the vibrator, a drive signal generation unit generating the drive signal based on a pulse signal, the control method including: stopping the application of the drive signal to the piezoelectric element at the time when a driving speed of the driven unit is a reference speed, in a case of stopping driving of the driven unit.

Examples include a device including a nanovoided polymer element having a first surface and a second surface, a first plurality of electrodes disposed on the first surface, a second plurality of electrodes disposed on the second surface, and a control circuit configured to apply an electrical potential between one or more of the first plurality of electrodes and one or more of the second plurality of electrodes to induce a physical deformation of the nanovoided polymer element.

A metal substrate supported by a wiring substrate includes a first extending portion and a first connection portion connected to the first extending portion. The first connection portion includes a first region facing a portion of a wiring substrate in a Z-axis direction, a second region being continuous from the first region, and a third region being continuous from the second region. When viewed in the Z-axis direction, in a direction perpendicular to a connection direction in which the third region is connected to the second region, a width of the second region is larger than a width of the third region. A first bonding member bonding the wiring substrate and the metal substrate includes a first portion disposed between the portion and the first region, and a second portion being continuous from the first portion. The second portion reaches the second region but does not reach the third region.

A metal substrate supported by a wiring substrate includes a movable portion, a first extending portion, a first coupling portion that couples the first extending portion and the movable portion, and a first connection portion connected to the first extending portion. The first connection portion includes a first fixing region fixed to the wiring substrate, and a first connection region connected to the first extending portion and to the first fixing region. The first connection region includes a first bent portion. The first bent portion has a first outer edge on a movable portion side, and a second outer edge opposite the movable portion, and each of the first outer edge and the second outer edge is bent toward the movable portion side when viewed in a Z-axis direction.

An apparatus may include a vibration member and a vibration device configured to vibrate the vibration member. The vibration device may be configured to comprise a first vibration portion and a second vibration portion which is different from the first vibration portion.

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.