A piezoelectric device includes a connection section including a first coupling portion, a second coupling portion, and a bridging portion. The first coupling portion extends along a slit and is connected to one of a pair of beam sections. The second coupling portion extends along the slit and is connected to another of the pair of beam sections. The bridging portion is located between the slit and an opening and is connected to both of the first coupling portion and the second coupling portion. The beam sections are connected to each other in a circumferential direction of a base having an annular shape via the connecting section while each of the beam sections is interposed between the slits extending in intersecting directions.

Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.

A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

A suspended piezoelectric ultrasonic transducer includes a semiconductor substrate and a piezoelectric ultrasonic sensing element. The semiconductor substrate includes a columnar arrangement area, a peripheral wall, and one or more bridge portions. A cavity is between the columnar arrangement area and the peripheral wall. The cavity surrounds the columnar arrangement area, and the bridge portion is connected to the columnar arrangement area and the peripheral wall. The piezoelectric ultrasonic sensing element is disposed on the columnar arrangement area. Through providing the cavity and the bridge portion on the semiconductor substrate, the resonance frequency, the acoustic pressure, and the emitting angle of the transducer can be adjusted, thereby providing a greater manufacturing tolerance for the transducer.

A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.

A piezoelectric element and a method of manufacturing the piezoelectric element are provided. The piezoelectric element is provided with a substrate having an intermediate layer disposed between a first substrate layer and a second substrate layer, a first electrode layer of an electrically conductive non-ferroelectric material disposed on the second substrate layer, a ferroelectric, piezoelectric and/or flexoelectric layer disposed on the first electrode layer, and a second electrode layer of an electrically conductive non-ferroelectric material disposed on the ferroelectric, piezoelectric and/or flexoelectric layer. The intermediate layer and/or the first substrate layer is removed below a layer stack formed by the first electrode layer, the ferroelectric, piezoelectric and/or flexoelectric layer, and the second electrode layer so that the layer stack can be moved in a translatory manner along its normal directed along the layer sequence.

A safety valve is provided with an electronic control unit for generating a control voltage. An electro-fluidic preliminary stage has a piezo bending actuator which can be actuated between a working position and a safety position by the control voltage and influences the flow of a secondary control fluid flow depending on its position. A fluid-mechanical main stage has an influencing device for influencing the flow of a primary working fluid flow. The influencing device can be actuated by means of the secondary control fluid flow which flows into a control chamber of the main stage. The control unit caries out a test of the preliminary stage repeatedly in an iterative manner after the expiration of a specified time interval. As part of the functionality test, the position of the piezo bending actuator is changed slightly by varying the control voltage.

According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.

An actuating device includes an actuator and a stationary portion. The actuator has at least one driving portion. The stationary portion is provided at an arbitrary position along the actuator such that the driving portion forms a first driving portion and a second driving portion. The first driving portion and the second driving portion can be provided with the same actuating ability or with different actuating abilities respectively by adjusting the position of the stationary portion.

An actuator includes a piezoelectric element, a vibration plate, and a support. The vibration plate has the piezoelectric element joined thereto and vibrates in accordance with displacement of the piezoelectric element. The support supports the vibration plate. A holder is disposed on the vibration plate. The holder is configured to join the vibration plate to an object of vibration. The vibration plate and the support are integrally molded.