H ELECTRICITY
H10 SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10N ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
30/00 Piezoelectric or electrostrictive devices
H10N30/20 with electrical input and mechanical output, e.g. functioning as actuators or vibrators
H10N30/204 using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
H10N30/2047 Membrane type