H
ELECTRICITY
H
ELECTRICITY
H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10N
ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10N
ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
30/00
Piezoelectric or electrostrictive devices
30/00
Piezoelectric or electrostrictive devices
H10N30/20
with electrical input and mechanical output, e.g. functioning as actuators or vibrators
H10N30/20
with electrical input and mechanical output, e.g. functioning as actuators or vibrators
H10N30/204
using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
H10N30/204
using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
H10N30/2047
Membrane type
H10N30/2047
Membrane type