Apparatuses and method are described to create an energy harvesting microstructure, referred to herein as a transduction micro-electro mechanical system (T-MEMS). A T-MEMS includes a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate. The first buckled membrane further includes a transduction material, a first conductor, the first conductor is applied to a first area of the transduction material; and a second conductor, the second conductor is applied to a second area of the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.

The present disclosure is of a bone conduction sound transmission device. The bone conduction sound transmission device includes of a laminated structure and a base structure. The laminated structure is formed by a vibration unit and an acoustic transducer unit. The base structure is configured to load the laminated structure. At least one side of the laminated structure is physically connected to the base structure. The base structure vibrates based on an external vibration signal, and the vibration unit deforms in response to the vibration of the base structure; and the acoustic transducer unit generates an electrical signal based on the deformation of the vibration unit.

A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

Emergency stop pressure sensors 17 are installed on both side surfaces of a movable link 11 of a robot arm 14 of an assembly robot. When a worker S unintentionally walks in a swing range Ra of the robot arm 14 and contacts the emergency stop pressure sensor 17, a detection signal is transmitted to a control unit 19, and the control unit 19 shuts power transmission to a driving source swinging the robot arm. The emergency stop pressure sensor 17 has a first electrode and a second electrode constituting a pair of electrodes and an intermediate layer formed of rubber or a rubber composition, which is disposed between the pair of electrodes, the intermediate layer generating power upon deformation caused by contact with a contacted body (the worker). A side of the intermediate layer in a laminate direction undergoes surface modification treatment and/or inactivation treatment. With this treatment, the one side and the other side of the intermediate layer have different degrees of deformation to the same deformation adding force.

A piezoelectric thin film 3 contains a metal oxide, the metal oxide contains bismuth, potassium, titanium, iron and element M, the element M is at least one of magnesium and nickel, at least a part of the metal oxide is a crystal having a perovskite structure, and a (001) plane, a (110) plane or a (111) plane of the crystal is oriented in a normal direction dn of the surface of the piezoelectric thin film 3.

A microphone with an additional piezoelectric component for energy harvesting is provided, and includes a substrate penetrated through by a cavity, a diaphragm, and a piezoelectric conversion. The diaphragm includes a vibration portion and at least one connecting arm, and two ends of each of the at least one connecting arm are connected to the vibration portion and the substrate, respectively. The piezoelectric conversion component is disposed on one of the at least one connecting arm and configured to convert mechanical energy collected from a displacement of the diaphragm by sound to electrical energy. The piezoelectric conversion component is mounted on the diaphragm, so as to convert the mechanical energy collected from the diaphragm by the sound to the electrical energy, thereby effectively recycling the mechanical energy and avoiding a waste of energy.

An energy harvesting circuit is disclosed and comprises one or more electrical loads that consume direct current (DC) power, a rectifier, and a hybrid acoustic absorber. The rectifier comprises one or more active switching elements that are driven by a gate drive voltage. The hybrid acoustic absorber comprises a diaphragm and a voice coil. The diaphragm is constructed at least in part of a piezoelectric material. The piezoelectric material is configured to generate a diaphragm voltage in response to sound waves deforming the diaphragm. The diaphragm voltage is at least equal to the gate drive voltage to drive the one or more active switching elements of the rectifier. The voice coil is attached to the diaphragm and configured to generate a voice coil voltage that is less than the gate drive voltage of the one or more active switching elements.

A method of manufacturing a semiconductor device includes: forming a first substrate includes a membrane stack over a first dielectric layer, the membrane stack having a first electrode, a second electrode over the first electrode and a piezoelectric layer between the first electrode and the second electrode, a third electrode over the first dielectric layer, and a second dielectric layer over the membrane stack and the third electrode; forming a second substrate, including: a redistribution layer (RDL) over a third substrate, the RDL having a fourth electrode; and a first cavity on a surface of the RDL adjacent to the fourth electrode; forming a second cavity in one of the first substrate and the second substrate; and bonding the first substrate to the second substrate.

The present application provides a human joint energy harvesting apparatus for capturing the biomechanical energy of a joint to generate electrical energy. The generated electrical energy may provide a real-time power supply to the wearable electronics. The apparatus employs a linear slide rail mechanism and cooperates with the user's first limb and second limb to form a slider-crank mechanism, which converts the rotating motion of the joint into a linear motion of the linear slide rail mechanism. The bending beam converts the linear motion of the linear slide rail mechanism into a bending motion. A piezoelectric film may be bonded to the upper and lower surfaces of the bending beam. During walking, the bending beam is deformed, causing the piezoelectric film to be stretched or compressed to generate electrical energy. To harvest more energy, the bending beam used in the apparatus is designed to be subjected to forced motion and free vibration, and a proof mass is attached to it. The present application also provides a wearable electronic device equipped with the human joint energy harvesting apparatus.

A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.