Patent classifications
Y
Y10
Y10S
203/00
Y10S203/20
Y10S203/20
Trihalosilane refining device having divided wall distillation column
Trihalosilane refining device having a divided wall distillation column is disclosed. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.