An embodiment comprises: a guide moving in the vertical direction or the horizontal direction; a transfer arm provided on the guide and loading spaced apart wafers; a laser emission unit disposed on the guide and emitting first laser beams at the spaced apart wafers loaded on the transfer arm; and a laser detection unit disposed below the transfer arm and collecting, from among the first laser beams, second laser beams having passed through gaps between the spaced apart wafers.

A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

A temporary storage system has a large capacity and loads and unloads articles promptly. The temporary storage system includes a grid-shaped travelling rail and buffers over processing equipment except for an area over a load port, and local vehicles travel along the rail. The carriage of the local vehicles is provided with at least a longitudinal travelling unit, at least a lateral travelling unit, and at least an advancement and retraction mechanism selectively advancing one of the longitudinal travelling unit and the lateral travelling unit to a position supported by the travelling rail, and travels along the travelling rail longitudinally and laterally, and the transfer unit of the local vehicles is provided with a hoist and an arm moving the hoist horizontally. The local vehicles stop at a position corresponding to the load port, advances the arm towards the load port, and transfers an article between the load port.

A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

An article storage facility is disclosed which has a relatively high article storage efficiency and which can reduce the possibility of degradation, etc., of articles that may occur within a storage structure. The article storage facility includes: a storage structure; a first support station provided inside the storage structure and configured to support a storage container; a second support station configured to support a transporting container; and an article transfer device. A transporting container is a container that is used to transport articles outside the storage structure whereas a storage container is a container that is used to transport and store articles inside the storage structure, and is configured to hold a plurality of articles with greater holding efficiency than a transporting container. The article transfer device is configured to transfer articles, one or more articles at a time, between a storage container placed on the first support station and a transporting container placed on the second support station.

A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate, and, after automatically determining the type of the substrate, and before transporting the substrate stored in the substrate storage container, performing mapping based on conditions set in the parameter data set to detect an abnormality of the substrate stored in the substrate storage container.

An article storage facility is disclosed which has a relatively high article storage efficiency and which can reduce the possibility of degradation, etc., of articles that may occur within a storage structure. The article storage facility includes: a storage structure; a first support station provided inside the storage structure and configured to support a storage container; a second support station configured to support a transporting container; and an article transfer device. A transporting container is a container that is used to transport articles outside the storage structure whereas a storage container is a container that is used to transport and store articles inside the storage structure, and is configured to hold a plurality of articles with greater holding efficiency than a transporting container. The article transfer device is configured to transfer articles, one or more articles at a time, between a storage container placed on the first support station and a transporting container placed on the second support station.

A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate, and, after automatically determining the type of the substrate, and before transporting the substrate stored in the substrate storage container, performing mapping based on conditions set in the parameter data set to detect an abnormality of the substrate stored in the substrate storage container.

A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; and, by referring to a storage unit that stores parameter data set related to a transport condition for each type of substrate, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined substrate type to process the substrate.