Patent classifications
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GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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TECHNICAL SUBJECTS COVERED BY FORMER USPC
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TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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430/00
Radiation imagery chemistry: process, composition, or product thereof
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Y10S430/1053
Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
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Y10S430/1055
Radiation sensitive composition or product or process of making
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Y10S430/12

Photoacid generators and lithographic resists comprising the same
10310375 · 2019-06-04 ·

The present invention provides photoacid generators for use in chemically amplified resists and lithographic processes using the same.