An apparatus including a robot drive, a first arm connected to the robot drive, and a second arm connected to the robot drive. The first arm includes a first upper arm, a first forearm and a first end effector. The second arm includes a second upper arm, a second forearm and a second end effector. The first and second upper arms are connected to a first drive shaft of the robot drive. The first and second upper arms are either a same member or two members stationarily connected to one another. While the first arm is being extended and retracted, straight movement of the first end effector is provided relative to the robot drive along an axis which intersects a drive axis of the robot drive, where a wrist joint of the first arm does not intersect the drive axis while the first arm is being extended and retracted.

An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

Systems and methods for robotic positioning of multiple tools. The system may include one or more robotic devices, multiple tools, and one or more controllers. The one or more robotic devices are each configured to connect to the tools, move the tools to a desired work position, and release the tools at the work position. The tools are able to operate mechanically independently from the robotic devices to perform an operation at the position to which they are delivered. After releasing the tools the robotic devices are able to perform other operations including moving additional tools to different work positions. The one or more controllers oversee the operation of the one or more robotic devices and tools and control the overall operation on a work piece.

A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.

In an apparatus for controlling the positioning of an object having a specified point, a first limiter establishes a movable range of the specified point of the object, and limits movement of the specified point of the object within the movable range. The movable range includes a line connecting the position of the specified point of the object and a target position for the specified point of the object. A second limiter limits change of a specified orientation of the object from increasing an angular difference between the specified orientation of the object a target orientation for the specified orientation of the object.

A tool welding system is disclosed that includes a table that heats a tool. A multi-axis robot includes a welding head that is moved relative to the table in response to a command. A controller is in communication with the robot and generates the command in response to welding parameters. The weld parameters are based upon a difference between an initial tool shape and a desired tool shape. The difference between the initial tool shape and the desired tool shape corresponds to a desired weld shape. The desired weld shape is adjusted based upon initial tool shape variations, which includes thermal growth of the tool. The tool is welded to provide the desired weld shape to achieve a desired tool shape.

A transport apparatus including a drive with a drive axis and a first arm connected to the drive. The first arm includes a first link, a second link and an end effector connected in series with the drive. The end effector includes a substrate support section and a leg connecting the substrate support section to a wrist joint of the end effector with the second link. The leg has a first section connected to the wrist joint, a second section connected to the substrate support section, and a bend portion between the first and second sections such that the first and second sections are angled or offset relative to each other. Connection of the leg to the second link at the wrist joint is offset relative to a centerline of the substrate support section and offset relative to the drive axis.

An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

A robotic arm that extends in a longitudinal direction includes a pivot assembly that pivots a gripping portion around an axis that is substantially perpendicular to the robotic arm, in a direction transverse to the longitudinal direction of the robotic arm, and between at least a maximum-left position, a maximum-right position, and a centered position. The pivot assembly includes a first actuator that extends and retracts a first cable coupled to a left side of the gripping portion in order to pivot the gripping portion. The pivot assembly further includes a second actuator that extends and retracts a second cable coupled to a right side of the gripping portion in order to pivot the gripping portion.

An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.