A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A method for operating a grasping device and grasping devices therefrom are provided. The grasping device is configured to use a plurality of parallel, bi-directional state flow maps each defining a sequence of poses for a plurality of joints in the grasping device. The method include receiving at least one control signal, determining a current pose of the grasping device within the one of the plurality of state flow maps currently selected for the grasping device, and selectively actuating the plurality of joints to traverse the sequence of poses, where a direction for traversing the sequence of poses is based on the at least one control signal.

A robot arm mechanism has a plurality of joints. Of the plural joints, a first joint is a rotational joint that rotates on a first axis, a second joint is a rotational joint that rotates on a second axis, and a third joint is a linear motion joint that moves along a third axis. The second axis is perpendicular to the first axis and is a first distance away from the first axis. The third axis is perpendicular to the second axis and is a second distance away from the second axis.

A bend sensor is used to determine force applied to a robotic arm. The force may be an external force applied to the arm, an internal actuation force, or both. In some aspects, a stiffening element is used to restore the arm to a minimum kinematic energy state. In other aspects, the stiffening element is eliminated, and the arm is fully actuated.

A control system 1 includes a first controller, and a second controller. The second controller includes a program storage module that stores two or more coordinate conversion programs, and a control processing module 240 that acquires program designation information for designating one of two or more coordinate conversion programs from the first controller. Additionally, the control processing module may acquire a first operation command in the coordinate system for the first controller from the first controller, and convert the first operation command to an operation target value of two or more joint axes of a multi-axis robot using the coordinate conversion programs according to the program designation information. Driving power according to the operation target value may be output to the joint axes.

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

A wire-driven manipulator including a driver, a first deforming section including a first distal member, a plurality of first guide members, and a plurality of first wires, and a second deforming section provided between the first deforming section and the driver with the second deforming section including a second distal member, a plurality of second guide members, and a plurality of second wires. The plurality of first wires are fixed to the first distal member, and at least one of the plurality of first wires is further fixed to the plurality of first guide members and other wires of the plurality of the first wires are slidable with respect to the plurality of first guide members. The plurality of second wires are fixed to the second distal member, and at least one of the plurality of second wires is further fixed to the plurality of second guide members and the other wires of the plurality of the first wires are slidable with respect to the plurality of second guide members. In addition, the length of the first deforming section is shorter than the length of the second deforming section.

Medical, surgical, and/or robotic devices and systems often including offset remote center parallelogram manipulator linkage assemblies which constrains a position of a surgical instrument during minimally invasive robotic surgery are disclosed. The improved remote center manipulator linkage assembly advantageously enhances the range of instrument motion while at the same time reduces the overall complexity, size, and physical weight of the robotic surgical system.

A surgical system comprising: a surgical mechanical arm comprising a plurality of surgical arm sections sequentially coupled by surgical arm joints; an input arm comprising: a plurality of input arm sections sequentially coupled by input arm joints; and an elongate handle: sized and shaped to be held between a human adult's thumb and one or more finger, coupled to a distal end of said input arm by a flexion joint; and extending proximally with respect to a most distal input arm section so a user grasping said handle bends said flexion joint to hold said handle above other portions of the input arm; at least one sensor configured to measure movement of one or more of said sections; and circuitry configured to receive a measurement signal from said at least one sensor and to generate a control signal, based on said measurement signal for control of movement of said surgical mechanical arm.