A multiple action forced fluid evacuation system includes a reservoir for receiving a working fluid therein, and a shutoff valve provided in the reservoir. An outer rigid conduit and an inner flexible conduit are connected between the shutoff valve and a receiver. A processing module is provided for at least controlling pressurized gas between the outer conduit and the inner conduit, and is operatively connected to the outer conduit and the inner conduit. A nozzle has one end in fluid communication with a source of the working fluid, and an opposite end removably coupled to the receiver. The nozzle normally enables flow of the working fluid through the inner conduit to the reservoir when the nozzle is connected to the receiver until the working fluid in the reservoir activates the shutoff valve causing the nozzle to cease flow of the working fluid leaving a portion of the working fluid trapped in the receiver and the inner conduit. Removal of the nozzle from the receiver activates the processing module and causes the portion of the working fluid trapped in the inner conduit and the receiver to be completely and sequentially evacuated into the reservoir.

A method of maintaining a backpressure of a fluidic product is provided. The method includes pressurizing a first reservoir to a first predetermined pressure level using compressed air, delivering the fluidic product to the pressurized first reservoir until a current level of the fluidic product in the first reservoir reaches a first predetermined level, pressurizing a second reservoir to a second predetermined pressure level using the compressed air, delivering the fluidic product to the pressurized second reservoir until a current level of the fluidic product in the second reservoir reaches a second predetermined level, and controlling the backpressure of the fluidic product using the first reservoir and the second reservoir such that a discharge flow of the fluidic product is continuous.

According to one embodiment, a substrate processing apparatus includes a tank that stores a treatment liquid; a liquid level pipe connected to the tank such that the treatment liquid stored in the tank flows therein, and configured such that the liquid level of the treatment liquid therein moves according to increase and decrease of the treatment liquid in the tank; a liquid level sensor that detects the liquid level in the liquid level pipe; an air supply pipe for supplying a gas to a piping space above the liquid level in the liquid level pipe; and a controller that determines whether there is erroneous detection of the liquid level sensor based on a detection result obtained by the liquid level sensor in response to the movement of the liquid level in the liquid level pipe caused by supply of the gas to the piping space from the air supply pipe.

The present invention relates to a pressure-increasing unit (1) comprising first receiving means (2) for receiving a pipeline (4) conveying pressurized gas, at least one first pipeline (3) for further transferring the pressurized gas to applications utilizing it, and second receiving means (6) for receiving a second pipeline (5) conveying reduced-pressure gas returning from the applications. The present solution is characterized in that the receiving means (6) are connected with at least one pressure intensifier (7). This pressure intensifier, in turn, is connected to the first receiving means (2) receiving pressurized gas for transferring gas re-pressurized by a substitution means (8) back to the applications utilizing it.

A method and a system for controlling automatic quantitative fluid supply are disclosed, and the method and the system automatically control the quantitative fluid supply by timing a period of time t required for introducing gas (20) into a sealing tank (4) in such a way that the pressure in the sealing tank (4) reaches a default value and calculating a period of time T, required for continuously introducing the gas (20) into the sealing tank (4) to extrude a fixed volume (V) of the fluid, from the time t, in the process of automatic quantitative fluid supply, so as to automatically control the switching-on and -off of a gas passage (1), overcome the impact of the reduction of the liquid level on the quantitative supply accuracy and guarantee the accuracy requirement of repeated quantitative supply.

A method of maintaining a backpressure of a fluidic product is provided. The method includes pressurizing a first reservoir to a first predetermined pressure level using compressed air, delivering the fluidic product to the pressurized first reservoir until a current level of the fluidic product in the first reservoir reaches a first predetermined level, pressurizing a second reservoir to a second predetermined pressure level using the compressed air, delivering the fluidic product to the pressurized second reservoir until a current level of the fluidic product in the second reservoir reaches a second predetermined level, and controlling the backpressure of the fluidic product using the first reservoir and the second reservoir such that a discharge flow of the fluidic product is continuous.

A liquid storage tank has a breathing valve that vents the tank's headspace at a high-pressure value and admits an ambient gas at a low-pressure value. A controller generates a first control signal when the percentage of the catalyst gas is less than a catalyst threshold, a second control signal when the percentage of the catalyst gas exceeds the catalyst threshold, and a third control signal when the pressure in the headspace is equal to a low-pressure threshold between the breathing valve's low-pressure value and high-pressure value. The first valve is only opened to output inert gas at a discharge pressure greater than the breathing valve's high-pressure value in response to the second control signal. The second valve is only opened to output inert gas at a discharge pressure that is between the breathing valve's low-pressure value and high-pressure value in response to the third control signal.

A method of maintaining a backpressure of a fluidic product is provided. The method includes pressurizing a first reservoir to a first predetermined pressure level using compressed air, delivering the fluidic product to the pressurized first reservoir until a current level of the fluidic product in the first reservoir reaches a first predetermined level, pressurizing a second reservoir to a second predetermined pressure level using the compressed air, delivering the fluidic product to the pressurized second reservoir until a current level of the fluidic product in the second reservoir reaches a second predetermined level, and controlling the backpressure of the fluidic product using the first reservoir and the second reservoir such that a discharge flow of the fluidic product is continuous.

A container may be supplied with an incompressible fluid. For example, the container may be partially or completely prefilled with the incompressible fluid. The container may be supplied with a flow of compressible gas via a first valve. The first valve may regulate the flow of the compressible gas supplied to the container based on a pressure setting of the first valve. A second valve may release the incompressible fluid from the container as the container is filled with the compressible gas and in response to a pressure of the container being greater than a pressure setting of the second valve. The pressure setting of the first valve may be greater than the pressure setting of the second valve.

A liquid storage tank has a breathing valve that vents the tank's headspace at a high-pressure value and admits an ambient gas at a low-pressure value. A controller generates a first control signal when the percentage of the catalyst gas is less than a catalyst threshold, a second control signal when the percentage of the catalyst gas exceeds the catalyst threshold, and a third control signal when the pressure in the headspace is equal to a low-pressure threshold between the breathing valve's low-pressure value and high-pressure value. The first valve is only opened to output inert gas at a discharge pressure greater than the breathing valve's high-pressure value in response to the second control signal. The second valve is only opened to output inert gas at a discharge pressure that is between the breathing valve's low-pressure value and high-pressure value in response to the third control signal.