Certain embodiments of the present disclosure relate to a gas flow valve. The gas flow valve includes a housing configured to receive a flow of gas. The gas flow valve further includes a plunger configured to move between a closed position and one or more open positions within the housing. The gas flow valve further includes a position sensor configured to measure a distance associated with a difference in position of the plunger between the closed position and the one or more open position. The gas flow valve further includes a force sensor coupled to the plunger and configured to measure a force exerted by the plunger in the closed position on a sealing surface.

A fluidic valve includes a valve seat, a valve sealing body placeable at the valve seat when the fluidic valve is closed and being displaced with respect to the valve seat when the fluidic valve is open, a force transmission element coupled with the valve sealing body, and an actuator mechanism configured for actuating the force transmission element for triggering the valve sealing body to carry out an additional movement different from an opening movement and a closing movement of the valve sealing body.

A gas flow valve includes a plunger configured to move between a closed position and one or more open positions within a housing. The gas flow valve further includes a force sensor configured to measure a force exerted by the plunger in the closed position and further configured to induce vibration responsive to being energized to dislodge particles from one or more surfaces of the gas flow valve.