A backwater valve has a hollow valve body with an inlet and an outlet and a valve member pivotally movable about a pivot axis disposed above the inlet. The valve member is movable between a closed position covering the inlet and an open position. The valve member has a specific gravity that is greater than water and has a basin that causes the valve member to be buoyant when the basin is filled with air. A releasable latch holds the valve member in the open position and releases the valve member when the valve member pivots to a release position. A rotational stop engages the valve member at a fill position permitting water to overflow into the basin.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.

A backwater valve has a hollow valve body with an inlet and an outlet and a valve member pivotally movable about a pivot axis disposed above the inlet. The valve member is movable between a closed position covering the inlet and an open position. The valve member has a specific gravity that is greater than water and has a basin that causes the valve member to be buoyant when the basin is filled with air. A releasable latch holds the valve member in the open position and releases the valve member when the valve member pivots to a release position. A rotational stop engages the valve member at a fill position permitting water to overflow into the basin.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.