A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

A fluid pressure regulating unit, comprises a fluid inlet port, a fluid outlet port, a valve comprising a movable valve part, wherein the movable part comprises at least one fluid pressure balancing means and wherein the at least one pressure balancing means comprises a tapered surface, and a main valve biasing means. The main valve biasing means biases said valve in the direction of an open position. An auxiliary valve biasing means is provided, biasing the valve in the direction of a closed position. Wherein essentially every surface part, being in fluid connection to the fluid inlet port and having a surface normal at least partially in parallel to the moving direction of the moving part of the valve, is balance by a balancing surface part.

A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

Multidirectional vent limiting devices for use with fluid regulators are described. An example vent limiting device includes a housing having an interior surface, a fluid inlet, a fluid outlet, and a first fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The interior surface includes a first sealing surface that defines a portion of the first fluid passageway. The vent limiting device further includes a stem having a first end, a second end located opposite the first end, and an axial portion located between the first end and the second end. The vent limiting device further includes a poppet having a first end, a second end located opposite the first end, a second sealing surface that defines a portion of the first fluid passageway, and a bore that defines a second fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The first end of the stem is rigidly coupled to the poppet. The poppet is slidable in an axial direction within the housing between an open position and a closed position. The second sealing surface contacts the first sealing surface when the poppet is in the closed position to close off the first fluid passageway.

An inlet valve for regulating the pressure at the inlet channel of a vacuum pump comprising: a first chamber defined by a housing having at least one inlet channel connected to a first supply of a fluid, comprising a movable element defining two cavities fluidly sealed from each-other and means for exerting a force on the movable element; a second chamber separated from the first chamber by a wall and defined by a housing, being in direct communication with a process channel of a second supply of a fluid; a valve body slidably mounted in the wall to prevent a fluid flow between the second chamber and the second cavity of the first chamber, the valve body having a distal end and a proximal end, wherein the valve body comprises a fluid channel extending through the valve body allowing a fluid flow between the first cavity and the inlet channel.

Multidirectional vent limiting devices for use with fluid regulators are described. An example vent limiting device includes a housing having an interior surface, a fluid inlet, a fluid outlet, and a first fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The interior surface includes a first sealing surface that defines a portion of the first fluid passageway. The vent limiting device further includes a stem having a first end, a second end located opposite the first end, and an axial portion located between the first end and the second end. The vent limiting device further includes a poppet having a first end, a second end located opposite the first end, a second sealing surface that defines a portion of the first fluid passageway, and a bore that defines a second fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The first end of the stem is rigidly coupled to the poppet. The poppet is slidable in an axial direction within the housing between an open position and a closed position. The second sealing surface contacts the first sealing surface when the poppet is in the closed position to close off the first fluid passageway.

Multidirectional vent limiting devices for use with fluid regulators are described. In some examples, a vent limiting device includes a housing having an interior surface, a fluid inlet, a fluid outlet, and a first fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The interior surface includes a first sealing surface that defines a portion of the first fluid passageway. In some examples, the vent limiting device further includes a stem and a poppet. In some examples, the stem is rigidly coupled to the interior surface of the housing. In some examples, the poppet includes a second sealing surface that defines a portion of the first fluid passageway, and a radial bore that defines a second fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. In some examples, the poppet is slidable along the stem between an open position and a closed position. In some examples, the second sealing surface contacts the first sealing surface when the poppet is in the closed position to close off the first fluid passageway.

Multidirectional vent limiting devices for use with fluid regulators are described. In some examples, a vent limiting device includes a housing having an interior surface, a fluid inlet, a fluid outlet, and a first fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. The interior surface includes a first sealing surface that defines a portion of the first fluid passageway. In some examples, the vent limiting device further includes a stem and a poppet. In some examples, the stem is rigidly coupled to the interior surface of the housing. In some examples, the poppet includes a second sealing surface that defines a portion of the first fluid passageway, and a radial bore that defines a second fluid passageway in fluid communication with and located between the fluid inlet and the fluid outlet. In some examples, the poppet is slidable along the stem between an open position and a closed position. In some examples, the second sealing surface contacts the first sealing surface when the poppet is in the closed position to close off the first fluid passageway.