A vacuum insulated panel is disclosed herein. According to an embodiment, the vacuum insulated panel may include a frame having a first side and a second side. The vacuum insulated panel also may include a first convex sheet positioned about the first side of the frame and a second convex sheet positioned about the second side of the frame. Moreover, the vacuum insulated panel may include a cavity formed between the first convex sheet and the second convex sheet. Further, the vacuum insulated panel may include a vacuum formed within the cavity. The vacuum may be configured to at least partially flatten the first convex sheet and the second convex sheet into a substantially parallel planar configuration.

A vacuum breaking device for a vacuum generator, includes a main housing, wherein the main body is provided with an air supply port, a vacuum interface chamber and a vacuum generating chamber. An intake passage is arranged inside the main housing, a pilot valve controlled by an electromagnetic pilot valve assembly is arranged between the intake passage and the air supply port. The pilot valve includes a pilot valve body, a pilot valve core and a pilot valve spring. A throttle pipe is arranged axially inside the main housing. A pneumatic on-off valve is arranged between the vacuum interface chamber and the vacuum generating chamber and outside the throttle pipe. The pneumatic on-off valve includes a slide core and a slide core spring, and a control chamber mated with an end surface of the slide core is arranged inside the main housing.

A negative pressure massage apparatus includes a vacuum pump, two solenoid valves and a control board. The vacuum pump is used to generate a negative pressure outside the negative pressure massage apparatus. Two solenoid valves are used to control a gas flow input into the negative pressure massage apparatus. The control board is used to activate or stop at least one of the vacuum pumps, and the two solenoid valves. The present disclosure further includes a method of using the negative pressure massage apparatus.

A system for providing vacuum to a moving element of a transport system, the system includes: a vacuum chamber on the moving element for storing vacuum; a vacuum source; a vacuum inlet provided on the vacuum chamber and for connection to the vacuum source; and a vacuum outlet in communication with the vacuum chamber and positioned on the moving element. The vacuum source may be provided on and travel with the moving element or on the transport system and periodically engage with the vacuum chamber. Where the vacuum source is provided on the moving element, a vacuum chamber may not be required. Further, the vacuum source may be driven by electrical energy and/or mechanical energy in various configurations.

A method for replacing a volume of coolant fluid in a circulating system in diesel engine system that includes the steps of establishing pneumatic connection with at least one location in the diesel engine coolant fluid circulating system; establishing fluid connection with at least one point in the diesel engine coolant fluid circulating system, the fluid connection location being different from the pneumatic connection; and after pneumatic and fluid connection is established, drawing a vacuum pressure through said pneumatic connection and introducing the volume of coolant fluid into the through said fluid connection as well as a device for accomplishing the same.

A vacuum insulated panel is disclosed herein. According to an embodiment, the vacuum insulated panel may include a frame having a first side and a second side. The vacuum insulated panel also may include a first convex sheet positioned about the first side of the frame and a second convex sheet positioned about the second side of the frame. Moreover, the vacuum insulated panel may include a cavity formed between the first convex sheet and the second convex sheet. Further, the vacuum insulated panel may include a vacuum formed within the cavity. The vacuum may be configured to at least partially flatten the first convex sheet and the second convex sheet into a substantially parallel planar configuration.

A negative pressure massage apparatus includes a vacuum pump, two solenoid valves and a control board. The vacuum pump is used to generate a negative pressure outside the negative pressure massage apparatus. Two solenoid valves are used to control a gas flow input into the negative pressure massage apparatus. The control board is used to activate or stop at least one of the vacuum pumps, and the two solenoid valves. The present disclosure further includes a method of using the negative pressure massage apparatus.

A vacuum pump system for evacuating at least five volumes comprising a turbomolecular pump and a forevacuum pump arranged to pump an output of the turbomolecular pump arrangement to atmosphere. The turbomolecular pump has at least five pumping stages separated by rotor blades. Not more than three pumping stages have pumping speeds in excess of ⅓ of the highest pumping speed when under vacuum and/or a pumping port cross section in excess of ⅓ of the highest pumping port cross section, and at least two pumping stages have pumping speeds less than ¼ of the highest pumping speed when under vacuum and/or a pumping port cross section of less than ¼ of the biggest pumping port cross section. The ratio of pressures between the pumping stage with the highest pressure and the pumping stage with the lowest pressure is at least 100000:1 when under vacuum.

Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.

A vacuum-keeping multistage vacuum-generating and vacuum-destructing valve includes a main body, which includes an introduction port, a vacuum port, a discharge port, and a vacuum-generating valve, in combination with a vacuum-destructing valve. The vacuum-destructing valve is arranged in combination with a flow conducting passage formed in the main body and connected to the vacuum port to allow a pressure fluid received through the introduction port to partly flow through the vacuum-destructing valve, and a vacuum-destructing two-port two-position valve is arranged in the flow conducting passage to increase flow rate of the pressure fluid passing therethrough to make a response of the vacuum port more sensitive in switching to a vacuum-destructing state. The ports of the main body are arranged in a detachable manner to increase service efficiency and ease part replacement. Two side seats are arranged to couple multiple such main bodies together to cope with complicated automatic processing operations.