A device (1) for controlling operation of a chuck (2), the device (1) comprising a chuck (2) for centering a workpiece (3) to be machined; at least one electric motor (6) connected to at least one moveable clamping jaw (4), the at least one movable clamping jaw (4) being configured to be selectively moved by the at least one electric motor (6); a first inductive transmission device; a second inductive transmission device (8) disposed in alignment with the first inductive transmission device (7) such that measurement signals and/or electric power are inductively transmitted between the first transmission device (7) and the second transmission device (8); and an external control device (11) by means of which command and monitoring data required for the operation of the at least one clamping jaw (4), and for the operation and locking of the electric motors (6) can be entered and/or read.

A clamping unit, in particular for use in a machining center, or a turning or milling center, wherein the clamping unit comprises an external housing (12), preferably having a cylindrical basic design, an internal housing (15) accommodated in the external housing (12), and an internal cylinder (11) that is retained in the internal housing (15) such that it can be displaced in a vertical adjustment direction A when in the operating state, which is designed for transferring a pressure or tensile force for clamping purposes, wherein the internal housing (15) is supported in the external housing (12) by means of springs (13, 14), and is supported with respect to the external housing (12) such that it can be displaced in the adjustment direction A, and thus forms a spring force storage unit (21), and wherein an electric motor (16) is disposed inside the clamping unit, integrated therein, preferably encompassed by the external housing (12), furthermore, preferably accommodated inside the internal housing (15), in order to apply a force in the adjustment direction A to the internal cylinder (11) via drive means (17-20) disposed therein.

In a coupling device (1), in particular for a man-machine interface (21) for operating inductively operated chucks (2), the coupling device comprising: an inductively operated chuck (2) for centering a workpiece (3) to be machined in space with at least one movable clamping jaw (4), an electric motor (6) drivingly connected to each of the said jaws (4), the said electric motor (6) being incorporated in the said chuck (2) and each jaw (4) being driven or fixed by the said electric motor (6), a first inductive transmission device (7) assigned to the chuck (2), a carrier or machine frame (10) spatially separated from the chuck (2), a second inductive transmission device (8) assigned to the frame (10), which is arranged in the region of the first inductive transmission device (7) of the chuck and exchanges measuring signals and voltages inductively therewith, and an external control device (11), by means of which command and monitoring data required for the operation and setting of the clamping jaws (4) and for the operation and locking of the electric motors (6) can be entered and/or read,
the intention is to ensure that, independently of the customer-specific electrical devices, complete operation of the chuck (2) and its monitoring during a machining operation is achieved immediately after coupling of the control devices (11) provided by the customer with the chuck.

This is achieved in that at least one programmable interface (21), which is electrically connected to the second inductive transmission device (8) and the control device (11), is provided between the second inductive transmission device (8) and the control device (11), each interface (21) has one or more command and control programs by means of which the chuck (2) can be set or selected by the control device (11), a plurality of measuring sensors (22) are provided which are assigned to the clamping jaws (4), electric motors (6) and/or the chuck (2) and by means of which their operating states are detected and transmitted to the respective interface (21), in that the respective interface (21) compares the actual data stored in the command programs with the measurement data determined by the measuring sensors (22), and in that this comparison of the selected operating state of the chuck (2) with an actual operating state generates data records which are evaluated by the respective interface (21) and forward

A transmission arrangement such as for energy and/or signal transmission, optionally for use in a machining center, respectively a turning and/or milling center, comprising a clamping unit comprising an outer housing of a preferably cylindrical basic shape, an inner housing received within the outer housing, as well as an inner cylinder held within the inner housing to be adjustable in an actuating direction A, said inner cylinder being configured to transmit a compressive or tensile force for clamping purposes, wherein the inner housing is supported against the outer housing via springs, and is displaceably mounted in the actuating direction A with respect to the outer housing and thus forms a spring force storage, wherein an electric motor is arranged integrated within the clamping unit to apply force in the actuating direction A to the inner cylinder via intermediate gear means, a console having a rotary table mounted therein to be rotatable, at least one first transmission device connected to the console and at least one second transmission device connected to the clamping unit, wherein the clamping unit is releasably fastened on the rotary table, and first and second transmission devices are configured to transmit electrical energy for driving the electric motor in a non-contact, preferably inductive manner between a first transmission device and a second transmission device.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

A drilling apparatus has a housing, a motor in the housing, a drive spindle rotatable about an axis on the housing, a chuck body, and a plurality of jaws shiftable in the chuck body. First and second elements interconnected by a screw thread and engaged between the body and the jaws for shifting the jaws on the housing. A drive sleeve rotationally fixed to the first element is drivable by the motor.

A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.