Y10T428/24975

Chemistry compatible coating material for advanced device on-wafer particle performance

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

ARTICLES WITH A LOW-ELASTIC MODULUS LAYER AND RETAINED STRENGTH

One or more aspects of the disclosure pertain to an article including a film disposed on a glass substrate, which may be strengthened, where the interface between the film and the glass substrate is modified, such that the article has an improved average flexural strength, and the film retains key functional properties for its application. Some key functional properties of the film include optical, electrical and/or mechanical properties. The bridging of a crack from one of the film or the glass substrate into the other of the film or the glass substrate can be suppressed by inserting a nanoporous crack mitigating layer between the glass substrate and the film.

Silicon coating on hard shields

A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.

Noise suppression sheet

A noise suppression sheet comprises a pair of metal magnetic layers and a non-magnetic metal layer interposed between the pair of metal magnetic layers, and can achieve high magnetic shield characteristics on both surfaces.

PLATED STEEL SHEET HAVING EXCELLENT CORROSION RESISTANCE, GALLING RESISTANCE, WORKABILITY AND SURFACE PROPERTY AND METHOD FOR MANUFACTURING

Provided are a plated steel sheet and a method for manufacturing same, the plated steel sheet comprising: a base steel sheet; a Zn—Mg—Al plating layer provided on at least one surface of the base steel sheet; and an Fe—Al inhibition layer provided between the base steel sheet and the Zn—Mg—Al plating layer. The plating layer comprises, by weight %, 4 to 10% of Mg and 5.1-25% of Al and the remainder being Zn and unavoidable impurities with respect to components not including iron (Fe) diffused from the base steel sheet. The plating layer comprises a 24-50% MgZn.sub.2 phase in phase fraction. In the MgZn.sub.2 phase, an Al single phase is present in the ratio of 1-30% relative to the cross-sectional area of the total MgZn.sub.2 phase.

ZINC ALLOY PLATED STEEL MATERIAL HAVING EXCELLENT WELDABILITY AND PROCESSED-PART CORROSION RESISTANCE AND METHOD OF MANUFACTURING SAME

Zn alloy plated steel material having excellent weldability and processed-part corrosion resistance and a method for production of Zn alloy plated steel material are provided. In the Zn alloy plated steel material comprising base steel material and a Zn alloy plating layer, the Zn alloy plating layer includes, by wt %, Al: 0.1-5.0%, Mg: 0.1-5.0%, as well as a remainder of Zn and inevitable impurities. The Zn alloy plated steel material includes a lower interface layer and an upper interface layer between the base steel material and the Zn alloy plating layer, wherein the lower interface layer is formed on the base steel material and has a dense structure, and the upper interface layer is formed on the lower interface layer and has a network-type or island-type structure.

Syringe with PECVD lubrication

A syringe or other vessel having a substrate surface coated by PECVD is provided. The PECVD coating is made by generating plasma from a gaseous reactant comprising an organosilicon precursor and optionally O.sub.2. The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the O.sub.2 to the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by said method is provided. Vessels coated by said method and the use of such vessels protecting a compound or composition contained or received in said coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel material are also provided.

Plasma erosion resistant rare-earth oxide based thin film coatings

An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y.sub.3Al.sub.5O.sub.12, Y.sub.4Al.sub.2O.sub.9, Er.sub.2O.sub.3, Gd.sub.2O.sub.3, Er.sub.3Al.sub.5O.sub.12, Gd.sub.3Al.sub.5O.sub.12 and a ceramic compound comprising Y.sub.4Al.sub.2O.sub.9 and a solid-solution of Y.sub.2O.sub.3—ZrO.sub.2.

Polylactic acid formed body having a vapor-deposited film and method of producing the same

A polylactic acid formed body including a polylactic acid base material (1) and a hydrocarbon film (3) vapor-deposited on the surface of the base material by a plasma CVD method. The polylactic acid base material (1) exhibits a sharp X-ray diffraction peak in which a half-width of peak appearing in the 10°-25° wide angle X-ray measurement is not more than 1.22°, and the hydrocarbon film (3) is vapor-deposited on the surface of the polylactic acid base material (1), and includes two layers of a high CH.sub.2 layer (3a) having a ratio of CH.sub.2 per the total of CH, CH.sub.2 and CH.sub.3 of not less than 40% and a low CH.sub.2 layer (3b) formed on the high CH.sub.2 layer (3a) and having a ratio of CH.sub.2 per the total of CH, CH.sub.2 and CH.sub.3 of not more than 35%.

Component having a coating and method for the production thereof
09840766 · 2017-12-12 · ·

The invention relates to a component having a coating containing chromium, nitrogen and carbon. According to the invention the coating comprises a sliding layer having a ceramic phase and a carbon phase, the ceramic phase forms a crystalline ceramic phase from Crx(C.sub.1-yN.sub.y) with 0.8=x=1.2 and y>0.7, and the crystalline ceramic phase and the carbon phase form a layer system of alternating individual layers (A, B), wherein the carbon phase has interstices that are filled with the crystalline ceramic phase.