GAS SENSOR

Abstract

A gas sensor comprises a gas separation membrane comprising substituted polyacetylene where a substituent group is combined to a double-bonded carbon atom in the backbone chain of the substituted polyacetylene and a sensing element configured to detect gas permeated through the gas separation membrane.

Claims

1-7 (canceled)

8. A gas detector comprising: a gas separation membrane comprising substituted polyacetylene where a substituent group is combined to a double-bonded carbon atom in backbone chain of the substituted polyacetylene; and a sensing element configured to detect gas permeated through the gas separation membrane, wherein the sensing element is a metal oxide semiconductor type or a contact combustion type, and wherein the gas separation membrane is configured to block cyclo-siloxanes and to permeate gas to be detected.

9. The gas detector according to claim 8, wherein the gas separation membrane is a monolayer membrane without a support layer.

10. The gas detector according to claim 8, wherein the sensing element comprises a MEMS chip supporting a metal oxide semiconductor membrane whose resistance changes according to gases.

11. The gas detector according to claim 8, wherein the gas separation membrane is configured to block water vapor in human's exhaled air.

12. The gas detector according to claim 8, wherein the gas separation membrane is configured to detect VOC (volatile organic compounds) in environmental atmosphere.

13. The gas detector according to claim 8, wherein the gas detector further comprises an adsorption filter configured to adsorb gases different from one to be detected and having permeated the gas separation membrane.

14. The gas detector according to claim 13, wherein the gas separation membrane covers the outside of the adsorption filter.

15. The gas detector according to claim 13, wherein the gas to be detected is methane and wherein said adsorption filter is configured to adsorb ethanol, stylene, and pinene.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG. 1 A sectional view of the gas sensor according to a first embodiment

[0020] FIG. 2 A partially sectional view of the gas sensor according to a second embodiment

[0021] FIG. 3 A schematic plan view of a gas detector provided with a gas separation membrane in the gas flow path

[0022] FIG. 4 A characteristic view of response to CH.sub.4 before and after siloxane exposure

[0023] FIG. 5 A characteristic view of response to H.sub.2 before and after siloxane exposure

FEATURES FOR CARRYING OUT THE INVENTION

[0024] The best embodiment and other embodiment for carrying out the invention will be described.

[0025] FIG. 1 indicates an embodiment of a MEMS gas sensor. Indicated by 2 is the gas sensor. A Si chip 4 (sensing element) is provided with a cavity 5 that is covered by a support membrane 6. A metal oxide semiconductor membrane 8 of SnO.sub.2, WO.sub.3, and so on, is provided on the support membrane 6, and its resistivity changes when in contact with gases. The support membrane 6 further has a heater and electrodes not shown in the figure. The gas sensor 2 is further provided with a base 10, a cover 12 comprising ceramics, plastic, metal, or the like. The Si chip 4 is electrically connected to the outside through lead wires and metalized portions 11.

[0026] The cover 12 is air-permeable, is provided with a vent hole 13, for example, at the top position, and is provided with a gas separation membrane 14 comprising a substituted polyacetylene (substituted polyacetylene membrane) on the vent hole 13, namely on the side facing the Si chip 4. Preferably, the substituted polyacetylene membrane 14 comprises PMP, PDPA, or the like, which does not include hetero-atom such as Si, or Ge, since there is no possibility of contamination by the hetero-atom. Since substituted polyacetylene membranes 14 have generally high air-permeability, a thick membrane 14 of them, 10 to 50 micrometer in thickness and as a monolayer membrane without a support layer, is fixed on the inner top portion of the cover 12.

[0027] Among gas components in the periphery, poisoning substances such as cyclo-siloxanes have too large molecular sizes to permeate the substituted polyacetylene membrane 14. On the contrary, molecules having a molecular size from hydrogen to toluene permeate the substituted polyacetylene membrane 14 and are detected by the Si chip 4. Therefore, the gas sensor 2 can detect VOC.

[0028] The metal oxide semiconductor membrane 8 is sometimes affected by highly humid atmospheres when placed therein for a long period. However, the substituted polyacetylene membrane 14 is oleophilic, allows only slow permeation of water vapor, and thus relaxes the influence of humid atmospheres. Detection of acetone, acetaldehyde, methyl-mercaptan, and so on, in exhaled air enables a rapid test for metabolism and health conditions. Since the substituted polyacetylene membrane 14 has a low water vapor permeation rate, the detection of these substances in exhaled air becomes easier. Further, the substituted polyacetylene membrane 14 has a higher permeability for acetone than for ethanol, and therefore, the detection of acetone becomes easier.

[0029] FIG. 2 indicates another embodiment where the substituted polyacetylene membrane 14, similar to that in the previous embodiment, is provided as a pre-filter of an adsorption filter 30 in a conventional gas sensor. A substrate 26 is provided over a base 24 comprising ceramic, plastic, or the like and is supported by pins 25. The substrate 26 is provided with a heater and electrodes, which are not shown in the figure, and supports the metal oxide semiconductor membrane 8, similar to that in the previous embodiment.

[0030] The gas sensor is provided with a cover 28 comprising plastic, ceramic, metal, or the like, and on the top inner face of the cover 28, the substituted polyacetylene membrane 14, the adsorption filter 30, and a porous film 32 are laminated. Indicated by 34 is vent holes, which are not needed when the material of the cover 28 is air-permeable. The substituted polyacetylene membrane 14 blocks cyclo-siloxanes and so on, and works as the outside cover of the adsorption filter 30. The adsorption filter 30 comprises activated charcoal, silica gel, zeolite, and so on, and has a seat-like form, for example, but can be granular. The adsorption filter 30 adsorbs gases such as ethanol and adsorbs and eliminates poisonous substances when poisonous substances are not fully blocked by the substituted polyacetylene membrane 14. The porous film 32 is an inner cover of the adsorption filter 30, supports the filter 30, and blocks fine powders from the filter 30.

[0031] In FIGS. 1 and 2, the substituted polyacetylene membrane 14 is provided in metal oxide semiconductor gas sensors. However, the substituted polyacetylene membrane 14 is also usable as a filter in an electrochemical gas sensor or a contact combustion gas sensor.

[0032] FIG. 3 indicates a gas detector comprising a smartphone implemented with a gas sensor 48. The gas inlet 45 and gas outlet 46 of the smartphone 42 are covered by the substituted polyacetylene membranes 14, similar to that of the embodiment in FIG. 1 so that the gas sensor 48 is protected from poisonous substances. When the gas sensor 48 is used for the analysis of exhaled air, the substituted polyacetylene membranes 14 restrict the permeation of water vapor and make the detection of acetone, acetaldehyde, methyl mercaptan, or the like, easier.

Durability Test against Siloxanes

[0033] The responses of gas sensor 2 to CH.sub.4 and H.sub.2 were observed before and after exposure to one ppm of a cyclo-siloxane (D4). The metal oxide semiconductor membrane 8 in the gas sensor 2 was a SnO.sub.2 membrane having a thickness of 40 micrometer, and the operating condition was intermittent heating to heating for 0.1 second to the maximum heating temperature of 430 degree Celsius once every 30 seconds. A load resistor was connected to the gas sensor 2, and the resistance of the metal oxide semiconductor membrane 8 was measured at the end of heating. The gas separation membrane 14 comprised a PTMSDPA membrane having a thickness of about 10 micrometer laminated on a porous PTFE membrane. The gas sensors of embodiment had the gas separation membrane 14, and comparative gas sensors had a simple porous PTFE membrane instead of the gas separation membrane 14. The number of the gas sensors was three for the embodiment and 2 for the comparative example. The detected gases were CH.sub.4 (FIG. 4) and H.sub.2 (FIG. 5), and their concentration was from 1000 to 9000 ppm. The upper portions in FIGS. 4 and 5 indicate the result in the embodiment and the lower portions indicate those in the comparative example. FIGS. 4 and 5 indicate the gas separation membrane 14 reduces the influence of siloxanes.

Supplements

[0034] Polyacetylene membranes have large free volumes and are oleophilic among gas selective permeable membranes. Regarding the gas selectivity of the polyacetylene membranes, the following two mechanisms are reasonable:

[0035] selectivity according to the relative sizes of gases to the pore size, and

[0036] selectivity according to the solubility of gas molecules in the membrane and diffusion velocities of dissolved gas molecules. The mechanism due to the pore size utilizes that molecules larger than the pore size can not enter into the pores. The mechanism due to the solubility and so on utilizes that large size molecules are trapped within relatively large pores after resolving in the membrane and are difficult to permeate outside of the membrane. The inventors speculate, in substituted polyacetylene membranes, both factors of the selectivity according to the size differences between the pores and siloxane molecules and the slow diffusion of siloxane molecules dissolved in the membrane. In substituted polyacetylene membranes, small gas molecules are not trapped in the pores, permeate promptly through the membrane, and are detected promptly.

LIST OF SYMBOLS

[0037] 2, 22 gas sensor [0038] 4 Si chip [0039] 5 cavity [0040] 6 support membrane [0041] 8 metal oxide semiconductor membrane [0042] 10, 24 base [0043] 11 metalized portion [0044] 12, 28 cover [0045] 13, 34 vent hole [0046] 14 gas separation membrane [0047] 25 pin [0048] 26 substrate [0049] 30 adsorption filter [0050] 32 porous film [0051] 42 smartphone [0052] 45 gas inlet [0053] 46 gas outlet [0054] 48 gas sensor