Spin Rinse Dryer with Improved Drying Characteristics

Abstract

A spin rinse dryer for treating a substrate has an enclosure, a rotatable support for supporting the substrate, a rotatable member located within the enclosure above the rotatable support, and a drive for rotating the rotatable member. During cleaning of the wafer, liquid that splashes up from the wafer will strike the rotatable member, rather than the upper wall of the enclosure, and may form droplets on the rotatable member. After the flow of cleaning liquid has stopped, the drive can rotate the rotatable member at high speed, which tends to throw the liquid droplets off the rotatable member through centrifugal force. The liquid then runs down the walls of the enclosure, away from the wafer, so that there is a much reduced chance of contamination of the cleaned wafer. The rotatable member and support may be integrally formed and rotated together or may be separate members.

Claims

1. A spin rinse dryer for treating a substrate, including: an enclosure; a rotatable support for supporting the substrate; a rotatable member located within the enclosure above the rotatable support, the rotatable member having a continuous lower surface; and a drive for rotating the rotatable member.

2. The spin rinse dryer as claimed in claim 1, wherein the lower surface of the rotatable member is arranged to be substantially parallel to an upper surface of a substrate when the substrate is supported by the rotatable support.

3. The spin rinse dryer as claimed in claim 1, wherein the rotatable support is connected to the rotatable member such that the rotatable support and the rotatable member rotate together.

4. The spin rinse dryer as claimed in claim 3, wherein a number of arms extend downwards from the rotatable member, and a prong extends radially inwardly from the lower end of each arm, the prongs acting as the rotatable support.

5. The spin rinse dryer as claimed in claim 4, wherein there are three of the arms that are circumferentially equispaced.

6. The spin rinse dryer as claimed in claim 3, wherein the drive is located alongside the enclosure, and is connected to the rotatable member and the rotatable support so as to drive the rotatable member and the rotatable support to rotate.

7. The spin rinse dryer as claimed in claim 1, wherein the rotatable support and the rotatable member are not connected to each other, and rotate separately.

8. The spin rinse dryer as claimed in claim 7, wherein the rotatable support and the rotatable member are arranged to rotate about a common axis.

9. The spin rinse dryer as claimed in claim 7, wherein a single of the drive is located alongside the enclosure, and is connected to both the rotatable member and the rotatable support so as to drive the rotatable member and the rotatable support to rotate.

10. The spin rinse dryer as claimed in claim 9, wherein the drive is connected to the rotatable member and the rotatable support via a telescopic shaft.

11. The spin rinse dryer as claimed in claim 7, wherein two of the drives are located alongside the enclosure, a first of the drives being connected to the rotatable member so as to drive the rotatable member to rotate, and a second of the drives being connected to the rotatable support so as to drive the rotatable support to rotate.

12. The spin rinse dryer as claimed in claim 1, wherein the enclosure and the rotatable member are both circular in plan view.

13. The spin rinse dryer as claimed in claim 12, wherein a diameter of the rotatable member is less than an internal diameter of the enclosure.

14. The spin rinse dryer as claimed in claim 12, wherein a diameter of the rotatable member is greater than a diameter of the substrate to be treated.

15. The spin rinse dryer as claimed in claim 1, wherein the rotatable member is formed from a hydrophobic material.

16. The spin rinse dryer as claimed in claim 1, wherein the rotatable member is formed as a single part.

17. The spin rinse dryer as claimed in claim 1, wherein the rotatable member is formed with reinforcing features.

18. The spin rinse dryer as claimed in claim 1, further comprising nozzles located above and below the rotatable support for directing liquid toward the substrate located on the rotatable support.

19. The spin rinse dryer as claimed in claim 1, wherein the spin rinse dryer is capable of operating at pressures below atmospheric pressure.

20. The spin rinse dryer as claimed in claim 1, wherein a vertical height of the spin rinse dryer is less than around 300 mm.

21. An apparatus for processing a substrate comprising a stack of substrate processing modules in which at least one of the modules is a spin rinse dryer as claimed in claim 1.

22. A method of treating a substrate, comprising: supporting a substrate on a rotatable support in an enclosure below a rotatable member; directing liquid at the substrate from nozzles above and below the rotatable support to wash the substrate; rotating the rotatable support to remove liquid from the substrate; rotating the rotatable member to remove liquid from the rotatable member; and removing the substrate from the enclosure.

Description

DESCRIPTION OF THE DRAWINGS

[0034] Preferred embodiments of the invention will now be described by way of example only and with reference to the accompanying drawings, in which:

[0035] FIGS. 1a and 1b are schematic views of prior art spin rinse dryers;

[0036] FIGS. 2a and 2b are schematic views of prior art spin rinse dryers which includes means aimed at reducing contamination of a cleaned wafer;

[0037] FIG. 3 is a schematic cross-sectional view of a first embodiment of a spin rinse dryer according to the invention;

[0038] FIG. 4 is a side view of a spin rinse dryer according to the invention; and

[0039] FIGS. 5a and 5b are schematic cross-sectional views similar to FIG. 3, showing alternative drive means.

DETAILED DESCRIPTION OF THE DISCLOSURE

[0040] FIG. 3 shows a first embodiment of the invention. The spin rinse dryer of FIG. 3 includes an enclosure formed by a main body 21 and a lid 22, with a rotatable support 23 for the wafer 29. Located above the wafer 29 and below the lid 22 of the enclosure is a rotatable member 27, in the form of a disc with a continuous lower surface. Any liquid that splashes up from the wafer 29 during cleaning will strike the lower surface of the rotatable member 27, rather than the lid 22 of the enclosure, so droplets will form on the rotatable member 27 instead of the lid 22. The rotatable member 27 can then be rotated to remove the droplets from the lower surface via centrifugal force.

[0041] In the specific version shown in FIG. 3, the rotatable support 23 for the wafer 29 and the rotatable member 27 are formed integrally. Three circumferentially equispaced arms extend downwards from the rotatable member 27, and the wafer 29 is supported on three prongs which extend radially inwardly from the lower ends of the arms. The rotatable member 27, and thus the arms and prongs, are rotated by a central shaft 25 which extends vertically through the lid 22 of the enclosure. The central shaft 25 is powered to rotate by means of a motor 28 located to one side of the chamber, with the shaft of the motor 28 extending vertically and being connected to the central shaft 25 by a belt drive 26. Arranging the drive means alongside the enclosure reduces the overall height of the spin rinse dryer.

[0042] During wafer cleaning, the rotatable member 27 and the rotatable support 23 for the wafer 29 are rotated (typically at 50 to 200 rpm) while cleaning fluid is sprayed from nozzles 24a and 24b. All of the internal surfaces of the chamber will be wetted with scattered spray, and this has the potential to form hanging liquid droplets (similar to those shown in FIG. 1b), which could fall on to the wafer 29.

[0043] Once the wafer 29 has been washed, the fluid supply is turned off and the wafer 29 is dried by rotation at high speed (typically 2000 to 2500 rpm). An inert drying purge gas such as nitrogen can also be used. During this high speed rotation, not only is the wafer 29 dried (by centrifugal forces moving water radially away from the wafer 29), but so is the rotatable member 27 which is located directly above the wafer 29. The droplets formed on the rotatable member 27 will be thrown off by centrifugal force. When the rotation ends, there should be no drops of liquid above the wafer 29, and so there should be no risk of liquid dripping onto the wafer 29. Furthermore, this is achieved in a low profile package (that is, with minimal vertical height).

[0044] Typically, the rotatable member 27 has a larger diameter than the wafer 29; for example, if the wafer 29 has a diameter of 300 mm, the rotatable member 27 would have a diameter of 320 mm. Further, the rotatable member 27 should extend as close as possible to the chamber walls, and preferably to within at most 10 mm of the chamber walls. This further reduces the risk of liquid dripping from the lower surface of the lid 22 of the chamber onto the wafer 29. Drainage channels for fluid can be located near the chamber walls. In addition, the top of the rotatable member 27 should be positioned close to the lower surface of the lid 22 of the chamber (to reduce the risk of spray from the nozzles hitting the lower surface of the lid 22 of the chamber), and is preferably positioned within 3 mm of the lower surface of the lid 22 of the chamber.

[0045] FIG. 4 shows a low profile spin rinse dryer with the chamber open to allowing loading or unloading of a wafer. In this case, the lower part 31 of the chamber moves away from the upper part 32, which is fixed, but it would also be possible for the lower part 31 of the chamber to be fixed and for the upper part of the chamber to be moved 32. This opening and closing movement can be achieved using electric motors or pneumatic or hydraulic pistons.

[0046] When the chamber is open, the wafer 39 can be inserted into or removed from the rotatable support 33. The inner diameter between the holding arms must be greater than the diameter of the wafer 39 to allow the wafer 39 to be placed into the chamber and onto the rotatable support 33. Furthermore, if notch alignment is required, then the position of the wafer 39 in the rotatable support 33 needs to be rotationally aligned before wafer loading or unloading can occur. This is achieved by a central lift pillar 40 which lifts the wafer 39 from the rotatable support 33 and enables the alignment of a notch or flat on the wafer 39 to a defined orientation on the rotatable support prior to the unloading step.

[0047] The particular version of the chamber in FIG. 4 has a maximum height when opened of around 215 mm; this allows the chambers to be stacked with a pitch of around 225 mm, leading to an efficient use of space.

[0048] The invention is not limited to the specific drive arrangement shown in FIG. 3. FIG. 5a shows a variant in which the rotatable support 53 and the rotatable member 54 are separate bodies arranged to rotate about a common axis. The rotatable support 53 for the wafer supports the wafer from below, which may simplify the procedure of loading and unloading the wafer. The rotatable support 53 and rotatable member 54 are driven by a single motor 51, and are connected thereto via a telescopic shaft coupling 52 (the telescopic aspect is necessary to allow the upper and lower parts of the chamber to move away from each other to open the chamber). FIG. 5b shows an alternative version in which separate motors 61, 62 are provided for the rotatable support 63 and the rotatable member 64, which again are arranged to rotate about a common axis. As with the embodiment shown in FIG. 3, the motor or motors 61, 62 are arranged to the side of the chamber, to keep the overall height as low as possible.

[0049] By forming the rotatable support and the rotatable member as two distinct entities, it is possible to reduce the overall size of the rotor assembly, which in turn can result in a chamber with a smaller diameter. The arrangements shown in FIGS. 5a and 5b can also allow more process flexibility for cleaning and drying the wafer, as they both allow the rotatable support and the rotatable member to be rotated at different speeds. Further, the arrangement shown in FIG. 5b allows the rotatable support and the rotatable member to be spun independently of each other.

[0050] When operating with two drive assemblies, the rotatable member will typically have a maximum speed less than that of the wafer (less than or equal to around 1000 rpm), as it contains no surface morphology which needs to be dried, and only requires the removal of larger droplets of liquid. If the process uses a deionized water clean, then the rotatable member can be made from a hydrophobic plastic material, such as polycarbonate, although the choice of material will of course be dependent on compatibility with the process chemistry.

[0051] The rotatable member will typically be machined or moulded as a single part, to ensure mechanical robustness. Further, the rotatable member may be formed with ribs or similar reinforcing features radiating out from the centre to increase its rigidity.

[0052] FIGS. 3, 5a and 5b only show a limited number of wetting nozzles. In reality, a spin rinse dryer will feature several wetting nozzles able to access both the upper and lower surfaces (front and back) of the wafer. Different flow rates, drive pressures and spray shapes of the nozzles can be used, depending on the process requirements. Common options for spray shape are fans and solid cones. Typical nozzle flow rates are 1 litre per minute at 35 psi (around 240 kPa), and so a spin rinse dryer using four fluid nozzles would run at 4 litres per minute.

[0053] The chamber may be sealed during water delivery, which can allow wafers to be processed at pressures below atmospheric, typically 10 to 100 Torr (around 133 to 1330 Pa).

[0054] Although only specific embodiments of the invention have been described, the skilled person will appreciate that the invention is not limited to these embodiments, and that variations can be made within the scope of the appended claims.