MICROFLUIDIC COMPONENT WITH METAL LAYER STACK AND FLUID CONDUIT ELEMENT MADE OF ANOTHER MATERIAL BONDED WITH IT

Abstract

A microfluidic component for a sample separation device includes a layer body with multiple metal layer structures that are connected with each other, and an element made of a material different from the metal layer structures, which includes at least one microfluidic structure and is bonded with the layer body.

Claims

1. A microfluidic component for a sample separation device, the microfluidic component comprising: a layer body with multiple metal layer structures which are connected to each other; and an element which is made of another material than the metal layer structures, and comprises at least one microfluidic structure, and is bonded with the layer body.

2. The microfluidic component according to claim 1, wherein the microfluidic component is configured as at least one of: a fluid valve; a component of a fluid valve; a stator component of a fluid valve; a rotor component of a fluid valve.

3. The microfluidic component according to claim 1, wherein the microfluidic component is configured as at least one of: a sample separation unit; a part of a sample separation unit; a sample enrichment unit; a part of a sample enrichment unit; a heat exchanger; a mixer.

4. The microfluidic component according to claim 1, wherein the element is embedded in the layer body.

5. The microfluidic component according to claim 4, wherein the element is embedded in the layer body with an undercut.

6. The microfluidic component according to claim 4, wherein the element is embedded in the layer body so that a functional surface of the element is exposed.

7. The microfluidic component according to claim 6, wherein the functional surface of the element is aligned with an exterior surface of the layer body.

8. The microfluidic component according to claim 6, wherein, at the exposed functional surface of the element, the at least one microfluidic structure is accessible from the outside.

9. The microfluidic component according to claim 1, wherein at least one of the metal layer structures of the layer body comprises at least one further microfluidic structure.

10. The microfluidic component according to claim 9, wherein the at least one microfluidic structure of the element is fluidically coupled with the at least one further microfluidic structure of the layer body.

11. The microfluidic component according to claim 1, wherein the element is a disk in particular or a stepped disk.

12. The microfluidic component according to claim 1, wherein an exposed functional surface of the element comprises a lower roughness Ra than another exterior surface of the element.

13. The microfluidic component according to claim 1, wherein the element comprises a collar which is interrupted in the circumferential direction.

14. The microfluidic component according to claim 1, wherein the element comprises a circumferential collar which, at least in portions, comprises a compression ring which is pointing in a direction of an exposed functional surface of the element.

15. The microfluidic component according to claim 1, wherein the element extends over at least two metal layer structures in the layer body.

16. The microfluidic component according to claim 1, comprising at least one of the following features: wherein a metal layer structure which is adjoining the bottom side of the element comprises at least one balancing recess for balancing thermal expansion phenomena during bonding; wherein the metal layer structures are made of stainless steel; wherein the element is a non-metallic element; wherein the element is a ceramic; wherein the element comprises aluminum oxide; wherein the element comprises zirconium oxide; wherein an inner diameter (d) of the at least one microfluidic structure is in a range between 0.05 mm and 1 mm; wherein an inner diameter (d) of the at least one microfluidic structure is in a range between 0.1 mm and 0.5 mm; wherein the at least one microfluidic structure comprises at least one of: a fully circumferentially limited microfluidic channel; a microfluidic groove.

17. A sample separation device for separating a fluidic sample, the sample separation device comprising: a fluid drive for driving a mobile phase and the fluidic sample contained therein; a sample separation unit) for separating the fluidic sample in the mobile phase; and a microfluidic component according to claim 1, wherein the fluidic sample and/or the mobile phase is to be delivered through the at least one microfluidic structure during the separation.

18. The sample separation device according to claim 17, further comprising at least one of the following features: the sample separation unit is configured as a chromatographic separation unit; the sample separation device is configured for analyzing at least one physical, chemical and/or biological parameter of at least one fraction of the fluidic sample; the sample separation device comprises at least one of: a device for a chemical, biological and/or pharmaceutical analysis; a chromatography device; a liquid chromatography device; a gas chromatography device; a device for supercritical liquid chromatography; a HPLC device; a UHPLC device; an electrophoresis device; a gel electrophoresis device; the fluid drive is configured for driving the mobile phase with a pressure of at least 100 bar; the fluid drive is configured for driving the mobile phase with a pressure of at least 500 bar; the fluid drive is configured for driving the mobile phase with a pressure of at least 1000 bar; the sample separation device is configured as a microfluidic device; the sample separation device is configured as a nanofluidic device; the sample separation device comprises a sample insertion unit for inserting the fluidic sample in a fluidic path between the fluid drive and the sample separation unit; the fluid separation device comprises a detector for detecting the separated fluidic sample; the sample separation device comprises a sample fractionator for fractionizing the separated fluidic sample.

19. A method for manufacturing a microfluidic component for a sample separation device, wherein the method comprising: connecting multiple metal layer structures for forming a layer body; and bonding an element which is made of another material than the metal layer structures and which is formed with at least one microfluidic structure with the layer body.

20. The method according to claim 19, comprising at least one of the following features: wherein the method comprises connecting the multiple metal layer structures by supplying heat and/or pressurizing; wherein the method, prior to bonding, comprises selectively polishing a functional surface of the element which is exposed after bonding; wherein bonding and connecting are performed simultaneously.

Description

BRIEF DESCRIPTION OF THE FIGURES

[0056] Other objects and many of the accompanying advantages of embodiments of the present invention will be easily perceptible and better understandable under reference to the following detailed description of embodiments in connection with the enclosed drawings. Features which are substantially or functionally equal or similar are provided with the same reference signs.

[0057] FIG. 1 shows a HPLC system as sample separation device with multiple microfluidic components according to an exemplary embodiment of the invention.

[0058] FIG. 2 shows a cross-sectional view of a stator component as microfluidic component according to an exemplary embodiment of the invention of a rotary fluid valve.

[0059] FIG. 3 shows a spatial view of a ceramic inlay element of the stator component of the microfluidic component according to FIG. 2.

[0060] FIG. 4 shows a plan view of the ceramic inlay element of the stator component of the microfluidic component according to FIG. 3.

[0061] FIG. 5 shows a plan view of an actually manufactured stator component as microfluidic component according to an exemplary embodiment of the invention.

[0062] FIG. 6 shows a fluid processing device with a fluid valve as microfluidic component according to an exemplary embodiment of the invention.

[0063] FIG. 7 shows a cross-sectional view of a sample separation unit as microfluidic component according to another exemplary embodiment of the invention.

[0064] The illustration in the drawings is schematic.

[0065] Before, referring to the figures, exemplary embodiments are described, some basic considerations shall be summarized, based on which exemplary embodiments of the invention have been derived.

[0066] According to an exemplary embodiment, a fluidic hybrid component made of connected metal layer structures (for example a stainless steel laminate) and an (preferably ceramic) element with a microfluidic structure (for example a fluid channel) which is bonded with it may be provided. With advantage, the at least one microfluidic structure may extend up to an exterior side of the component and may thus be fluidically coupled with another microfluidic structure for forming a, preferably high pressure tight, fluid connection.

[0067] According to a preferred embodiment, an element as ceramic inlay with a microfluidic structure may be glued or otherwise bonded at or in a layer body (which is preferably formed as a metal laminate), to thereby form a component of a microfluidic shear valve, for example. The component may be configured as a metal-micro-fluidic-component. The microfluidics concerns the behavior of liquids and gases in smallest space which may substantially differ from the behavior of macroscopic fluids, since in this order of magnitude, effects may dominate, which can be neglected in macroscopic dimensions. Such a microfluidic component may be manufactured on the basis of metal structures which may be manufactured of stainless steel foils by thermal bonding at a high pressure and a high temperature. Caused by such a manufacturing process, the material properties of a microfluidic component may correspond to a soft annealed condition. Such metallic surfaces taken alone are unsuitable as functional surface for a rotary shear valve. In an advantageous manner, according to an exemplary embodiment of the invention, a functional surface of a microfluidic component with hard, polished, and low wear properties may thus be formed by using a co-bonded element, preferably a ceramic part. Such hybrid-type microfluidic components according to exemplary embodiments of the invention may be used in an advantageous manner as a rotary shear valve stator, for example. Conventional valves of this type are usually milled from a solid and enable—due to this manufacturing process—only a limited complexity.

[0068] Rotary valves may comprise a stationary, disk-type part (also denoted as stator). This static and frequently disk-shaped part may comprise fluidic ports to other components (for example a fluid drive, a sample separation unit, an injector, a detector, etc.) on one side of the disk. On the opposite side, for example circularly arranged channel openings may be located, on which another disk-type part (also denoted as rotor) is pushed and selectively closes, connects, or opens these openings. For applications in the high pressure field (in particular in HPLC), the rotor is to be pushed on the stator with a high force, for this reason, this shall comprise a high resistance to wear by friction. This can be achieved by a component according to an exemplary embodiment of the invention, which connects metal layer structures, which are connected to each other, with an integrally connected element, preferably made of ceramic, with microstructures.

[0069] FIG. 1 shows the basic structure of a HPLC system as example for a liquid chromatography sample separation device 10 according to an exemplary embodiment of the invention, as it may be used for a liquid chromatography, for example.

[0070] In the illustrated sample separation device 10, a fluid drive 20, which is supplied with solvents from a supply unit 25, drives a mobile phase through a sample separation unit 30 (such as a chromatographic column) which includes a stationary phase. The supply unit 25 encompasses a first fluid component source 113 for providing a first fluid and/or a first solvent component A (for example water), and a second fluid component source 115 for providing another second fluid and/or a second solvent component B (for example an organic solvent). An optional degasser 27 may degas the solvents which are provided by the first fluid component source 113 and by the second fluid component source 115, before these are supplied to the fluid drive 20. A sample insertion unit 40 which may also be denoted as injector, is arranged between the fluid drive 20 and the sample separation unit 30, to introduce a sample liquid or fluidic sample in the fluidic separation path. For this purpose, an injector valve 110 may be correspondingly switched. The injector valve 110 may be configured as rotary shear valve which comprises a stationary stator component 112 and a rotatable rotor component 114 which is controlled by a control unit 70. For example, the stator component 112 may comprise microfluidic structures in form of ports which may be fluidically connected to the diverse components 20, 40 and/or 30, etc., and which may extend up to a contact surface with the rotor component 114. For example, the rotor component 114 has one or more grooves at the contact surface, i.e. trench-shaped indentations which, depending on a current relative orientation between the stator component 112 and the rotor component 114, may selectively form or not form fluidic connections between respective ones of the ports.

[0071] The stationary phase of the sample separation unit 30 is provided for separating the components of the sample. A detector 50 which may comprise a flow cell detects separated components of the sample, and a fractionizing device 60 may be provided for eluting separated components of the sample in containers which are provided for this purpose. Liquids which are not required anymore may be eluted in a drain container and a waste (not shown), respectively.

[0072] While a liquid path between the fluid drive 20 and the sample separation unit 30 is typically under pressure, the sample liquid is at first introduced under standard pressure in a region which is separated from the liquid path, a so-called sample loop, of the sample insertion unit 40 and/or of the injector, which then in turn introduces the sample liquid in the liquid path which is under high pressure. During connecting the sample liquid which is at first under standard pressure in the sample loop with the liquid path which is under high pressure, the content of the sample loop is brought to the system pressure of the sample separation device 10 which is configured as HPLC. A control unit 70 controls the single components 20, 27, 30, 40, 50, 60, 110, and a proportioning unit 101 of the sample separation device 10.

[0073] Other components of the sample separation device 10 upstream the sample insertion unit 40 in FIG. 1 serve for providing a mixture of multiple different fluids as solvent composition and mobile phase, respectively, for the liquid chromatography sample separation device 10. Two supply conduits 109, 111 are fluidically coupled with a respective one of the two solvent containers which are denoted as fluid component sources 113, 115, for providing a respective one of the fluids and/or solvent components A and B. The respective fluid and/or the respective solvent component A and/or B is delivered through the respective supply conduit 109 and 111, respectively, through the degasser 27, to a fluid valve as proportioning unit 101, at which the fluids and/or solvent components A and/or B from the supply conduits 109, 111 are combined with each other. Thus, at the proportioning unit 101, the fluid packages from the supply conduits 109, 111 flow together under formation of a solvent composition. The latter is supplied to the fluid drive 20 after passing through a mixer 103 for mixing the single solvent components.

[0074] One or more of the components of the sample separation device 10 according to FIG. 1 may be constructed as a microfluidic component 100 according to an exemplary embodiment of the invention. According to FIG. 1, as illustrated with the respective reference sign 100, these are a stator component 112 (see FIG. 2 to FIG. 5) and/or a rotor component 114 of the fluid valve 110, such as a column entry of the sample separation device 30 (see FIG. 6) and the mixer 103. Each of these microfluidic components 100 comprises a layer body with multiple metal layer structures which are connected with each other, and an element which is made of another material, which comprises microfluidic structures and is bonded with the layer body.

[0075] Exemplary embodiments of microfluidic components 100 are described in the following:

[0076] FIG. 2 shows a cross-sectional view of a stator component 112 of a fluid valve 110 as microfluidic component 100 according to an exemplary embodiment of the invention. FIG. 3 shows a spatial view of a ceramic element 106 of the stator component 112 of the microfluidic component 100 according to FIG. 2. FIG. 4 shows a plan view of the element 106 of the stator component 112 according to FIG. 2 and FIG. 3.

[0077] Thus, FIG. 2 to FIG. 4 show components of a stator component 112 of a fluid valve 110 as example for a microfluidic component 100 for a sample separation device 10, such as that one which is shown in FIG. 1. In other words, the component 100 according to FIG. 2 to FIG. 4 is configured as a stator component 112 of a rotary shear valve or fluid valve 110. The shown microfluidic component comprises a layer body 102 made of multiple metal layer structures 104 which are connected with each other and arranged in parallel to each other. The metal layer structures 104 may be made of an inert stainless steel or of other metal foils or metal layers, for example. The metal layer structures 104 may comprise void spaces or hollow spaces (see the uppermost four metal layer structures 104 according to FIG. 2) and/or may be continuous or uninterrupted metal layers (see the lowermost metal layer structure 104 according to FIG. 2). In the illustrated embodiment, five metal layer structures 104, which are planar and arranged in parallel to each other, are connected with each other, wherein also each other number of metal layer structures 104 is possible. In the both uppermost metal layer structures 104, a cavity or receiving opening for receiving an embedded element 106 as inlay is recessed. This element 104 may be made of another material than the metal layer structures 104. In particular, the element 106 may be non-metallic, i.e. may not consist of elementary metal. According to FIG. 2, the embedded non-metallic element 106 extends over both uppermost metal layer structures 104 of the layer body 102 and lies with its bottom surface on the third lowest metal layer structure 104. The non-metallic element 106 is preferably made of a ceramic material, for example aluminum oxide or zirconium oxide. Furthermore, the non-metallic or unmetallic element 106 comprises fluid channels as microfluidic structures 108, which extend vertically according to FIG. 2. The ceramic element 106 is bonded, for example glued and/or thermally bonded, with the metallic layer body 102 to an integral component 100. By bonding, for example by supplying thermal energy and/or by pressurizing with mechanical pressure, a firm and permanent connection between the non-metallic element 106 and the layer body 102 is formed. Alternatively or additionally, such a connection may be accomplished by an adhesive. Hence, for manufacturing the microfluidic component 100, the multiple metal layer structures 104 may be connected with each other for forming the layer body 102, and the non-metallic element 106 with its microfluidic structures 108 may be bonded with the layer body 102.

[0078] As can be seen in FIG. 2, the non-metallic element 106 is embedded in the layer body 102, so that a functional surface 120 of the non-metallic element 106 is aligned with, or is oriented with it, or is in flush with an outer surface 122 of the outermost metal layer structure 104. Thus, as can be seen in FIG. 2, the functional surface 120 of the non-metallic element 106 is aligned with the outer surface 122 of the layer body 102 under formation of a planar exterior surface of the component 100. The exposed functional surface 120 of the non-metallic element 106 may be polished, to be rotated with respect to the rotor component 114 with low friction and with low wear, despite a high pressure tight and fluid tight mechanical contact with a corresponding functional surface of a rotor component 114. With advantage, polishing the functional surface 120 prior to embedding the element 106 in the layer body 102 may be performed, to avoid an indeed possible, but elaborate polishing after bonding. Moreover, the non-metallic element 106 is embedded in the both outermost metal layer structures 104 of the layer body 102 with an undercut 118, so that a form lock with the layer body 102 is formed, which makes it impossible to pull the element 106 out of the layer body 102. Even when larger forces are acting, due to this form lock or undercut 118, an undesired release of the non-metallic element 106 out of the layer body 102 may be reliably prevented. For manufacturing the component 100, the for example pre-pressed, pre-fired, and/or pre-processed, ceramic part in form of the element 106 may be laid on the three lowermost metal layer structures 104. In more detail, the element 106 with its widened bottom side may be inserted in a recess of the, according to FIG. 2 second, metal layer structure 104 from above. According to FIG. 2, a narrower upper side of the element 106 may be inserted in a smaller recess of the uppermost metal layer structure 104, so that the exterior side 122 of the outermost metal layer structure 104 is in flush with the functional surface 120 at the top side of the element 106. Afterwards, a connection of the mentioned constituents with each other may be performed. In this way, the non-metallic element 106 may be embedded in the layer body 102, so that the functional surface 120 of the non-metallic element 106 is exposed, and so that at the same time the hybrid component 100, even when higher forces are acting in the operation of the fluid valve 110, is protected from an undesired separation of its parts.

[0079] As also shown in FIG. 2, at the exposed functional surface 120 of the non-metallic element 106, the microfluidic structures 108 of the element 106, which extend vertically here, are accessible from the outside. In the illustrated embodiment, the microfluidic structures 108 are formed as fluid channels which extend along a stack direction 160 of the planar stacked metal layer structures 104, and vertically according to FIG. 2. These vertically extending ports, at an exterior surface of the component 100 which is not shown in FIG. 2, may be fluidically coupled with other fluidic components of the sample separation device 10, for example with a fluid drive 20, a sample separation unit 30, or a sample insertion unit 40 (see FIG. 1). As schematically illustrated in FIG. 2 with the reference sign 162, it is also possible to form microfluidic structures in form of grooves in the functional surface 120. However, such (for example curved) grooves are preferably formed in a functional surface of a rotor component 114 of the fluid valves 110 which is in direct contact with the functional surface 120 of the stator component 112 in operation, to form fluidic connections with the ports or not in a selective manner, depending on a rotational state of the rotor component 114 relatively to the stator component 112. In this way, the parts of the sample separation device 10, which are connected to the ports, may be fluidically coupled with each other or decoupled from each other in a selective manner.

[0080] FIG. 2 further shows that the metal layer structure 104 of the layer body 102, which is directly adjoining the element 106 at the bottom side, comprises further microfluidic structures 164 which are fluidically coupled with the microfluidic structures 108 of the element 106 and which also extend in the vertical direction according to FIG. 2. According to FIG. 2, the further microfluidic structures 164 and the microfluidic structures 108 are coaxially arranged to each other and are directly connected to each other. For example, an inner diameter d of the microfluidic structures 108 and 164 may be in a range between 0.1 mm and 0.5 mm. Moreover, the metal layer structure 104 which is the second lowest according to FIG. 2, comprises additional microfluidic structures 166 in form of horizontal fluid channels, each of which is brought in fluid connection with a respective one of the further microfluidic structures 164. The microfluidic structures 166 may comprise a vertical thickness D which corresponds to the thickness D of the associated metal layer structure 104. For example, the thickness D may be in a range between 0.3 mm and 3 mm, in particular in a range between 0.5 mm and 2 mm. The microfluidic structures 166 may be laterally limited by material of the corresponding metal layer structure 104, on the top side and at the bottom side by material of the metal layer structures 104 which are arranged above and below.

[0081] Hence, by the microfluidic structures 108 of the non-metallic element 106 being fluidically coupled with the further microfluidic structures 164, 166 of the layer body 102, a continuous fluidic connection between multiple different parts of a sample separation device 10 at an outer side of the component via one of the microfluidic structures 166, one of the microfluidic structures 164, one of the microfluidic structures 108 of a fluidic connection conduit (for example a groove) in the rotor component 114, another one of the microfluidic structures 108, another one of the microfluidic structures 164, and another one of the microfluidic structures 166 can be formed.

[0082] As shown in FIG. 2, FIG. 3, and FIG. 4, the ceramic element 106 may be configured as a stepped disk with a radially extended lower disk portion and a radially reduced or constricted upper disk portion which is arranged above it. In more detail, as can be seen best in FIG. 3 and FIG. 4, the non-metallic element 106 may comprise a collar 124 which is interrupted in the circumferential direction four times (or at more or less positions). Between respectively neighboring portions of the collar 124, a respective slit 168 is located. Different slits 168 may have different sizes, to ensure a correct mounting of the element 106 to the metal layer structures 104. By the tangentially alternating arrangement of the collar portions and the slits 168 arranged in between, a correct positioning between the element 106 and the metal layer structures 104 may be ensured. The slit 168 also serves for a compensation of thermally induced shrinking when connecting or bonding the element 106 and/or the metal layer structures 104 with each other. The reference sign 188 denotes a heat shrinking compensation region and the reference sign 190 denotes a constant slit during a bonding run.

[0083] The collar 124 which extends radially and is interrupted multiple times has a compression ring 126 at four (or more or less) portions which is pointing in the direction of the functional surface 120 of the element 106 which is exposed in the mounted state, and which compression ring 126 is interrupted multiple times in the illustrated embodiment, which is formed in form of four (or more or less) bar-type (German: stegartig) protrusions according to FIG. 3 and FIG. 4. The compression ring 126 serves for reliably enclosing the element 106 in the layer body 102 during bonding. Descriptively, the protrusions of the compression ring 126 which are pointing upwardly may penetrate in the metal layer structure 104 which is arranged above it in a spine-like manner, when the constituents of the component 100 are connected (in particular pressed) with each other.

[0084] The, according to FIG. 2 third uppermost, metal layer structure 104 which is adjoining the element 106 at the bottom side, comprises balancing recesses 128 at its top side for balancing thermal expansion phenomena during bonding. The ceramic material of the element 106 on the one hand and the metallic material of the metal layer structures 104 on the other hand have different coefficients of thermal expansion. Therefore, during the thermal bonding, thermal tensions may occur in the interior of the component 100, in particular in the boundary region between the element 106 and the layer body 102, which may also lead to a damage and positioning problems between the microfluidic structures 108, 164, 166. In order to avoid such undesired phenomena, the balancing recesses 128 may be formed at a material interface between the element 106 and the layer body 102 for receiving excessive material during the thermal expansion when manufacturing the component 100. It is especially advantageous to provide the balancing recesses 128 adjoining a fluid interface between the microfluidic structures 108 and 164, to ensure the fluidic coupling there, despite the thermal expansion.

[0085] Thus, FIG. 2 to FIG. 4 show a component 100 which can be used in a fluid valve 110 as a stator component 112 and which is configured as metal microfluidic (MMF) structure. The layer body 102 which is formed of laminated metal foils may be realized with an improved wear resistance by configuring a mechanically especially loaded region (see functional surface 120) with the microfluidic structures 108, which are formed as channels, as ceramic inlay. The hybrid component 100 made of laminated metal layers and the ceramic inlay comprises in particular the following advantageous characteristics:

[0086] As material for the non-metallic element 106, a ceramic with a composition may be used which does not lose its properties by the bonding process for connecting with the layer structure 102 made of metal. Suitable ceramic materials are aluminum oxide or zirconium oxide, for example.

[0087] According to FIG. 2 to FIG. 4, the ceramic inlay in form of the non-metallic element 106 is configured as a round disk with a readily polished functional surface 120, from which the channels in form of the microfluidic structures 108 exit and are therefore accessible for a fluidic connection. A polishing process after a performed bonding is thereby advantageously avoided, whereby an undesired ingress of dirt in the MMF structure of the layer body 102 is dispensable. In particular, in this case also the microfluidic channels 108 are effectively protected against such an ingress of dirt after bonding.

[0088] The ceramic material of the element 106 on the one hand and the metallic material of the layer body 102 on the other hand have different thermal expansions which may be moderated in an advantageous manner by constructive measures, to keep the ceramic inlay in form of the element 106 precisely placed during the bonding process. The element 106 comprises four wedge-type grooves for this purpose. Via the flank of the associated wedges, a positioning between the element 106 and the metal layer structures 104 is performed. Advantageously, the wedge angle may be configured so that the slit dimensions do not change or change only as low as possible in the case of a different heat expansion.

[0089] A bonding connection between the ceramic of the element 106 on the one hand and the metal of the layer body 102 on the other hand is sensitive to pulsed loads due to different elasticities and stiffnesses. To prevent a damage or even a destruction of the connection between the element 106 and the layer body 102 in case of strong impacts or other mechanical influences in operation, the element 106 may be advantageously enclosed by a surrounding collar 124 in the bonding structure of the surrounding metal layer structures 104. To form this connection in a form-locking manner, this surrounding collar 124 may preferably comprise a compression ring 126 which may be reliably enclosed during bonding by the, according to FIG. 2 uppermost or outermost, metal structure 104.

[0090] Moreover, the ceramic part in form of the element 106 may be tolerated thicker than the metal foils which correspond to both uppermost metal layer structures 104 according to FIG. 2. Thereby, a secure pressing can be ensured in an advantageous manner. To absorb tolerances, in a central metal layer structure 104 which is to be denoted as a cover layer, according to FIG. 2 directly underneath the ceramic inlay, reservoir hollow spaces in form of the balancing recesses 128 may be formed. During the bonding process, material from this metal layer structure 104 can be displaced into these, to avoid thermal tensions and positioning errors.

[0091] Corresponding to their functions, the metal layer structures 104 according to FIG. 2, from the top to the bottom, may be denoted as uppermost layer, spacer layer, sealing layer, channel layer, and lowermost layer.

[0092] FIG. 5 shows a plan view of an actually manufactured stator component 112 for a fluid valve 110 as microfluidic component 100 according to an exemplary embodiment of the invention. FIG. 5 shows the result of bonding a ceramic inlay as non-metallic element 106 in a MMF structure which forms a metallic layer body 102.

[0093] FIG. 6 shows a fluid processing device 161 with a fluid valve 110 as component 100 according to an exemplary embodiment of the invention.

[0094] A needle 142 is arranged in a seat 144 and may be extended out of it (not shown), to draw-in the fluidic sample from a sample container (not shown) and, after retracting in the seat 144, to inject it via the fluid valve 110 in a fluidic path between a fluid drive 20 and a sample separation unit 30. When drawing-in the sample through the needle 142, the sample may be temporarily stored in a buffer volume 147, a so-called sample loop. Drawing-in the sample may be accomplished by a dosing pump 149. A piston of the same may be retracted in a piston chamber for drawing-in, and may be displaced forwardly for injecting. Furthermore, a waste 165, a fluidic conduit 167, non-return valves 169, and a liquid container 171 are shown in FIG. 5. To operate the fluid processing device 161, the fluid valve 110 is provided with grooves 162 and ports 141 as fluid ports, which may be arranged in the rotor unit 114 and/or the stator unit 112 on different levels.

[0095] A stator component 112 of the fluid valves 110 according to FIG. 6 may be configured in correspondence with FIG. 2 to FIG. 5, for example.

[0096] FIG. 7 shows a cross-sectional view of a sample separation unit 30 as microfluidic component 100 according to another exemplary embodiment of the invention.

[0097] The component 100 according to FIG. 7 differs from the component 100 according to FIG. 2 substantially by the fact that, according to FIG. 7, all microfluidic structures 108 of the element 106 are permanently coupled with the microfluidic structures 164 and 166. Furthermore, according to FIG. 7, the microfluidic structures 164, 166 are filled with a stationary phase 195 of the sample separation unit 30, for example beads of a packaging material of the separation column, at which the actual separation of the fluidic sample is performed. Thus, the element 106 according to FIG. 7 is configured as a liquid permeable plug or sieve and/or as an end piece which allows fluid to flow through the microfluidic structures 108, but is impermeable for the particles of the stationary phase 195. Thus, the ceramic element 104 prevents the stationary phase 195 against undesirably leaving the sample separation unit 30, for example when pressure impacts during switching occur or by a mechanical stress or the like.

[0098] Alternatively to the configuration of the component 100 according to FIG. 7 as sample separation unit 30, i.e. as chromatography separation column, the component according to FIG. 7 may also be used as Trap-column, for example, which does not serve for sample separation, but for enriching a fluidic sample.

[0099] It should be noted that the term “comprising” does not exclude other elements, and “a” does not exclude a multiplicity. Also, elements which are described in connection with different embodiments, may be combined. It should also be noted that reference signs in the claims are not to be construed as limiting the scope of protection of the claims.