Board assembly with chemical vapor deposition diamond (CVDD) windows for thermal transport
11189543 · 2021-11-30
Assignee
Inventors
Cpc classification
H01L2224/1329
ELECTRICITY
H01L2924/15151
ELECTRICITY
H01L2224/8185
ELECTRICITY
H01L2224/13294
ELECTRICITY
H01L2224/29294
ELECTRICITY
H01L2224/92225
ELECTRICITY
H01L2224/13023
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/2929
ELECTRICITY
H01L2924/16251
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/2929
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/13294
ELECTRICITY
H01L2224/16013
ELECTRICITY
H01L2224/16237
ELECTRICITY
H01L2224/29393
ELECTRICITY
H01L2224/29294
ELECTRICITY
H01L2224/13393
ELECTRICITY
H01L2924/16235
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/29393
ELECTRICITY
H01L2224/16238
ELECTRICITY
H01L2224/13393
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2224/16258
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2224/92227
ELECTRICITY
H01L2224/1329
ELECTRICITY
H01L2224/16235
ELECTRICITY
H01L2223/54486
ELECTRICITY
H01L2224/81192
ELECTRICITY
H01L24/73
ELECTRICITY
H01L23/544
ELECTRICITY
H01L23/3735
ELECTRICITY
International classification
H01L23/373
ELECTRICITY
Abstract
A method and apparatus for conducting heat away from a semiconductor die are disclosed. A board assembly is disclosed that includes a first circuit board having an opening extending through the first circuit board. A Chemical Vapor Deposition Diamond (CVDD) window extends within the opening. A layer of thermally conductive paste extends over the CVDD window. A semiconductor die extends over the layer of thermally conductive paste such that a hot-spot on the semiconductor die overlies the CVDD window.
Claims
1. A board assembly comprising: a circuit board; a semiconductor die electrically coupled to the circuit board, wherein the semiconductor die has a plurality of hot spots; a plurality of Chemical Vapor Deposition Diamond (CVDD) windows, wherein each CVDD windows of the plurality of CVDD windows extends laterally over or under one hot-spot of the plurality of hot-spots; and a thermally conductive paste extending between a first surface of each CVDD window of the plurality of CVDD windows and a respective one hot-spot of the plurality of hot-spots, wherein each CVDD window of the plurality of CVDD windows has a footprint that is less than twenty percent of a footprint of the semiconductor die.
2. The board assembly of claim 1, further comprising a plurality of openings extending through the circuit board, each CVDD window extending within one of the plurality of openings.
3. The board assembly of claim 2, further comprising leads that extend from the semiconductor die to the circuit board for electrically coupling the semiconductor die to the circuit board.
4. The board assembly of claim 3, further comprising a dam extending around the semiconductor die, and a filler material that extends within the dam.
5. The board assembly of claim 3, further comprising an additional circuit board and a dam extending around the semiconductor die, the additional circuit board attached to the dam so as to couple the circuit board to the additional circuit board and form an enclosure within the dam and between the circuit board and the additional circuit board, the semiconductor die and the leads extending within the enclosure.
6. The board assembly of claim 5, further comprising a filler material that extends within the enclosure.
7. The board assembly of claim 6, wherein the filler material comprises diamond paste.
8. The board assembly of claim 2, wherein each CVDD windows of the plurality of CVDD windows has a thickness that is the same as the thickness of the circuit board.
9. The board assembly of claim 2, wherein each CVDD windows of the plurality of CVDD windows has a thickness that is greater than a thickness of the circuit board, each CVDD windows of the plurality of CVDD windows extending above a top surface of the circuit board.
10. The board assembly of claim 2, wherein each CVDD windows of the plurality of CVDD windows has a thickness that is greater than a thickness of the circuit board, each CVDD windows of the plurality of CVDD windows extending below a bottom surface of the circuit board.
11. The board assembly of claim 2, wherein each CVDD windows of the plurality of the CVDD windows has a thickness that is greater than a thickness of the circuit board, each CVDD windows of the plurality of CVDD windows extending above a top surface of the circuit board and extending below a bottom surface of the circuit board.
12. The board assembly of claim 1, further comprising a thermally conductive plate that is bonded to a second surface of each CVDD windows of the plurality of CVDD windows, the second surface opposite the first surface.
13. The board assembly of claim 12, further comprising a ball grid array that extends between the semiconductor die and the circuit board.
14. The board assembly of claim 1, wherein each CVDD window of the plurality of CVDD windows has a lateral extent that is less than a lateral extent of the thermally conductive paste that extends between a respective CVDD window and the semiconductor die.
15. A board assembly comprising: a circuit board, a plurality of openings extending through the circuit board; a semiconductor die electrically coupled to the circuit board, wherein the semiconductor die has a plurality of hot-spots; a plurality of Chemical Vapor Deposition Diamond (CVDD) windows, each CVDD window of the plurality of CVDD windows extending within a respective one opening of the plurality of openings and extending laterally over or under one hot-spot of the plurality of hotspots; and a thermally conductive paste extending between a first surface of each CVDD window of the plurality of CVDD windows and a respective one hot spot of the plurality of hot-spots, wherein each CVDD window of the plurality of CVDD windows has a footprint that is less than twenty percent of a footprint of the semiconductor die.
16. The board assembly of claim 15, further comprising a dam extending around the semiconductor die, and a filler material extending within the dam.
17. The board assembly of claim 16, further comprising an additional circuit board, the additional circuit board attached to the dam so as to couple the circuit board to the additional circuit board and form an enclosure within the dam and between the circuit board and the additional circuit board, the semiconductor die extending within the enclosure.
18. The board assembly of claim 15, wherein each CVDD windows of the plurality of CVDD windows has a lateral extent that is less than a lateral extent of the thermally conductive paste that extends between each respective CVDD window and the semiconductor die.
19. A board assembly comprising: a circuit board; a semiconductor die electrically coupled to the circuit board, wherein the semiconductor die has a plurality of hot-spots; a plurality of Chemical Vapor Deposition Diamond (CVDD) windows, each CVDD windows extending laterally over or under one hot-spot of the plurality of hotspots; a thermally conductive paste extending between a first surface of each CVDD window of the plurality of CVDD windows and a respective one hot-spot of the plurality of hot-spots, wherein each CVDD window of the plurality of CVDD windows has a footprint that is less than twenty percent of a footprint of the semiconductor die; and a thermally conductive plate that is bonded to a second surface of each CVDD window, the second surface opposite the first surface.
20. The board assembly of claim 19, wherein each CVDD windows of the plurality of CVDD windows has a lateral extent that is less than a lateral extent of the thermally conductive paste that extends between each respective CVDD window and the semiconductor die.
Description
BRIEF DESCRIPTION OF THE DRAWING FIGURES
(1) The invention will be explained in more detail in the following with reference to embodiments and to the drawing in which are shown. It is appreciated that the drawings are not drawn to scale.
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DETAILED DESCRIPTION
(23) Persons of ordinary skill in the art will realize that the following description is illustrative only and not in any way limiting. Other embodiments will readily suggest themselves to such skilled persons.
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(25) In the embodiment shown in
(26) An opening is cut 102 in a circuit board that correspond with the position of each hot spot identified in step 101. In one embodiment the openings are cut using a laser. In the embodiment shown in
(27) A CVDD window 2 is inserted 103 into each opening 10, 11 cut in step 102, as shown in
(28) In the embodiment of method 100, all of the CVDD windows 2, taken together, have a footprint that is less than twenty percent of the footprint of the semiconductor die. However, it has been found that in many instances hot-spots cover less than two percent of the die area. In these embodiments, the amount of CVDD window material of all of the CVDD windows 20, taken together, will be from two to four percent of the die area.
(29) As shown in
(30) In the present embodiment a layer of thermally conducting paste less than 40 μm thick is applied over each CVDD window 2. The application of this layer of thermally conductive paste 3 only over each CVDD window 2 conserves the relatively-expensive diamond paste while providing sufficient thermal conductivity to effectively conduct heat from die 4 to the underlying CVDD window 2. However, alternatively the thermally conductive paste 3 could be deposited over a wider area around each CVDD window 2 or extend laterally beneath the entire semiconductor die 4.
(31) As shown in
(32) In the embodiment shown in
(33) Similarly, the lateral extent of hot-spot 15 along the bottom surface of semiconductor die 4 is less than the lateral extent of the thermally conductive paste 3 such that the entire area of the bottom surface of semiconductor die 4 that lies within hot-spot 15 is in direct contact with thermally conductive paste 3. Also, the lateral extent of CVDD window 2 that underlies hot-spot 15 is less than the lateral extent of the overlying thermally conductive paste 3 such that the entire area of the top surface of the CVDD window 2 is in direct contact with thermally conductive paste 3. Thereby, a thermally conductive path for expelling heat is provided across the entire area of hot-spot 15.
(34) In other embodiments the CVDD windows 2 may be smaller than the size of the overlying hot-spot 14, 15 and thus will not extend laterally beyond the lateral extent of the overlying hotspot (e.g., the footprint of the CVDD window is smaller than the footprint of the corresponding hot-spot on the semiconductor die 4). In this embodiment the thermally conductive path for expelling heat will not have the same lateral extent as the overlying hot-spot, but will still effectively convey heat from the overlying hot-spot as long as the lateral extent of the thermally conductive paste covers the entire hot-spot (e.g., extends laterally beneath all of the overlying hot-spot). In other embodiments the alignment may not be perfect and portions of the overlying hot-spot may not be fully within the footprint of the CVDD window or the diamond paste.
(35) Leads are soldered 106 to the semiconductor die, and to the circuit board. In
(36) The filler material may be thermally conductive to further facilitate cooling of die 4. In one embodiment the filler material 19 is CVDD paste. The CVDD paste may be the same material as CVDD paste 3, or may have a lower CVDD content than CVDD paste 3 to reduce cost.
(37) The completed board assembly of
(38) After completion of the assembly, in operation cooling is applied to the bottom of the board to remove heat transferred from the hot spots 14, 15 through the thermal path comprising layer of thermally conductive paste 3 and CVDD windows 2. The cooling may be an air-cooled system or a liquid (e.g., water) cooled system.
(39) In the embodiment shown in
(40) In an embodiment that is illustrated in
(41) In one embodiment that is illustrated in
(42) A method 200 for forming a board assembly is shown in
(43) One or more CVDD windows are attached 202 to a thermally conductive plate in positions corresponding to the locations of the identified hot-spots.
(44) In one embodiment that is illustrated in
(45) In the embodiment of
(46) Alternatively, step 202 may be performed by applying thermally conductive adhesive (either to surface 61 of thermally conductive plate 60 or to a first surface of CVDD window 20), placing CVDD window 20 against thermally conductive plate 60 and curing the adhesive.
(47) In the embodiment of method 200, all of the CVDD windows 20, taken together, have a footprint that is less than twenty percent of the footprint of the semiconductor die. However, it has been found that in many instances hot-spots cover less than two percent of the die area. In these embodiments, the amount of CVDD window material of all of the CVDD windows 20, taken together, will be from two to four percent of the die area.
(48) A layer of thermally conductive paste is applied 203. The thermally conductive paste 30 may be the same material as the thermally conductive paste applied in step 104. In the present embodiment a layer of thermally conducting paste less than 40 μm thick is applied over each CVDD window 20, i.e. over a second surface of each CVDD window 20, the second surface of each CVDD window 20 opposing the first surface thereof.
(49) In the embodiment shown in
(50) The semiconductor die is attached to the circuit board 204. The embodiment shown in
(51) Optionally, a dam is formed 205 around the semiconductor die. In the embodiment of
(52) The thermally conductive plate is placed 206 over the semiconductor die. Step 206 may be performed by flipping over the thermally conductive plate, precisely aligning the thermally conductive plate relative to the die and pressing the thermally conductive plate against the die such that each CVDD window overlies a corresponding hot-spot.
(53) Optionally, filler material is injected 207 into the dam and a curing process is performed 208 to cure the filler material and the dam material. Step 205, 207 and 208 may utilize the same materials as are used in steps 107-108 and the encapsulation process may be performed in the same manner as steps 107-109 of
(54) In the embodiment shown in
(55) In the embodiment shown in
(56) Void, 26 is either left filled with air as shown in
(57) In the embodiment shown in
(58) Similarly, the lateral extent of hot-spot 24 along the top surface of semiconductor die 40 is less than the lateral extent of the underlying thermally conductive paste 30 such that the entire area of the top surface of semiconductor die 40 that lies within hot-spot 24 is in direct contact with thermally conductive paste 30. Also, the lateral extent of CVDD window 20 that overlies hot-spot 24 is less than the lateral extent of the underlying thermally conductive paste 30 such that the entire area of the second surface 33 of the CVDD window 20 is in direct contact with thermally conductive paste 30. Thereby, a thermally conductive path for expelling heat is provided across the entire area of hot-spot 24, the thermally conductive path comprising thermally conductive paste 30 and CVDD window 20 to thermally conductive plate 60.
(59) In the present embodiment, all of the CVDD windows 2, taken together have a footprint that is less than twenty percent of the footprint of the semiconductor die. It has been found that in many instances hot-spots cover less than two percent of the die area. In these embodiments, the amount of CVDD window material purchased, which is generally sold based on the lateral area of the cut material, may be from two to four percent of the die area. Thus, only a small amount of CVDD material is being used, saving on material cost. The positioning of the CVDD windows directly over or under the hot-spots provides the thermal conductivity necessary to cool the hot-spots.
(60) In one embodiment the footprint of each CVDD window 2 is between one and five percent of the footprint of the die.
(61) After completion of the assembly, in operation cooling is applied to the top of the metal plate 60 to remove heat from the hot spots 23, 24 transferred via the now provided thermally conductive path. The cooling may be an air-cooled system or a liquid (e.g., water) cooled system.
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(63) Methods 100 and 200 are illustrated in
(64) Also, though the examples show two CVDD windows 2, 20 it is appreciated that a single hot-spot may be identified in which case a single CVDD window 2 is used.
(65) An embodiment of the present invention includes a board assembly comprising: a circuit board, an opening extending through the first circuit board; a CVDD window extending within the opening; a layer of thermally conductive paste extending over the CVDD window; a semiconductor die extending over the layer of thermally conductive paste such that a hot-spot on the semiconductor die overlies the CVDD window; and leads that extend from the semiconductor die to the circuit board for electrically coupling the semiconductor die to the circuit board.
(66) An embodiment of the present invention shows a board assembly comprising: a circuit board; a semiconductor die electrically coupled to the circuit board; a CVDD window; a layer of thermally conductive paste in direct contact with a first surface of the CVDD window along the full extent of the first surface of the CVDD window, and in direct contact with the semiconductor die, the layer of thermally conductive paste positioned so that it covers a hot-spot on the semiconductor die, the CVDD window having a footprint that is less than twenty percent of the footprint of the semiconductor die; a thermally conductive plate that is bonded to a second surface of the CVDD window, the second surface opposite the first surface; and a ball grid array that extends between the semiconductor die and the circuit board.
(67) While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims.