PACKAGE STRUCTURE AND METHOD OF MANUFACTURING THE SAME
20220020699 · 2022-01-20
Assignee
Inventors
Cpc classification
H01L2225/06517
ELECTRICITY
H01L25/18
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L21/4853
ELECTRICITY
H01L25/0652
ELECTRICITY
H01L23/49816
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L23/552
ELECTRICITY
H01L25/50
ELECTRICITY
H01L23/3128
ELECTRICITY
H01L2224/16227
ELECTRICITY
H01L2924/00014
ELECTRICITY
International classification
H01L23/552
ELECTRICITY
H01L21/48
ELECTRICITY
H01L23/538
ELECTRICITY
H01L25/00
ELECTRICITY
Abstract
The invention provides a package structure, comprising: a substrate disposed with a solid grounded copper layer; at least two radio frequency chip modules disposed on the substrate; a plastic encapsulation disposed on the substrate, covered on a surface of the substrate, and coating the at least two radio frequency chip modules therein; a groove located between the adjacent two radio frequency chip modules, and penetrating an upper surface and a lower surface of the plastic encapsulation; a solder filling body filled in the groove, wherein an upper surface of the solder filling body is flushed with the upper surface of the plastic encapsulation; and a shielding layer covered on the upper surface and lateral surfaces of the plastic encapsulation, an upper surface of the solder filling body and lateral surfaces of the substrate; wherein a position of the solid grounded copper layer corresponds to a position of the groove, and makes contact with the solder filling body in the groove.
Claims
1. A package structure, comprising: a substrate disposed with a solid grounded copper layer on a surface layer; at least two radio frequency chip modules disposed on the substrate; a plastic encapsulation disposed on the substrate and coating the at least two radio frequency chip modules; a groove penetrating an upper surface and a lower surface of the plastic encapsulation and located between the adjacent two radio frequency chip modules; a solder filling body filled in the groove; and a shielding layer covered on the upper surface and lateral surfaces of the plastic encapsulation, an upper surface of the solder filling body and lateral surfaces of the substrate; wherein the solid grounded copper layer corresponds to a bottom surface of the groove, and makes contact with the solder filling body.
2. The package structure according to claim 1, wherein the substrate is made of a rigid organic laminated multilayer sheet material, and has multiple metal circuit layers and a complete ground plane layer.
3. The package structure according to claim 2, wherein the metal circuit layers of the substrate are laminated ten to twelve layers.
4. The package structure according to claim 1, wherein the plastic encapsulation is made of an insulated thermosetting material with a relatively low viscosity.
5. The package structure according to claim 1, wherein the solid grounded copper layer is made of copper, the solder filling body is made of a silver-based material, and a contact portion therebetween forms a metal separating wall.
6. The package structure according to claim 1, wherein the groove comprises a groove top surface, a groove wall surface and a groove bottom surface.
7. The package structure according to claim 6, wherein a width of the solid grounded copper layer is greater than or equal to 100 μm, a width of the groove bottom surface is greater than or equal to 50 μm, a width of the groove top surface is three to six times of the width of the groove bottom surface, and a ratio of a depth of the groove wall surface to a depth of the groove is greater than or equal to 50%.
8. The package structure according to claim 1, wherein the upper surface of the plastic encapsulation is flushed with the upper surface of the solder filling body.
9. The package structure according to claim 1, wherein a thickness of the shielding layer is 2 to 10 μm.
10. The package structure according to claim 1, further comprising: a communication chip module disposed on the substrate.
11. The package structure according to claim 10, wherein a height of the communication chip module is less than or equal to 200 μm.
12. The package structure according to claim 10, wherein the communication chip module is located on a different side of the substrate opposite to the at least two radio frequency chip modules, and attached to the substrate through a plurality of micro-solder balls.
13. The package structure according to claim 10, wherein the communication chip module and the at least two radio frequency chip modules are located on the same side of the substrate, and directly attached to the substrate, and the communication chip module is not coated by the plastic encapsulation.
14. The package structure according to claim 1, further comprising: a plurality of solder balls disposed on the substrate, and located on a different side of the substrate opposite to the at least two radio frequency chip modules.
15. A method of manufacturing a package structure, comprising: providing a substrate where at least two radio frequency chip modules are disposed on a surface and a solid grounded copper layer is disposed on a surface layer; forming a plastic encapsulation on the substrate to coat the at least two radio frequency chip modules therein; cutting the plastic encapsulation between the adjacent two radio frequency chip modules and forming a groove, the groove penetrating an upper surface and a lower surface of the plastic encapsulation, and a bottom surface of the groove corresponding to the solid grounded copper layer; filling a solder filling body in the groove, and making contact with the solid grounded copper layer; and forming a shielding layer on the upper surface and lateral surfaces of the plastic encapsulation, an upper surface of the solder filling body and lateral surfaces of the substrate.
16. The method of manufacturing a package structure according to claim 15, wherein the substrate is made of a rigid organic laminated multilayer sheet material, and has multiple metal circuit layers and a complete ground plane layer.
17. The method of manufacturing a package structure according to claim 16, wherein the metal circuit layers of the substrate are laminated ten to twelve layers.
18. The method of manufacturing a package structure according to claim 15, wherein the plastic encapsulation is made of an insulated thermosetting material with a relatively low viscosity.
19. The method of manufacturing a package structure according to claim 15, wherein the solid grounded copper layer is made of copper, the solder filling body is made of a silver-based material, and a contact portion therebetween forms a metal separating wall.
20. The method of manufacturing a package structure according to claim 15, wherein the groove comprises a groove top surface, a groove wall surface and a groove bottom surface.
21. The method of manufacturing a package structure according to claim 20, wherein a width of the solid grounded copper layer is greater than or equal to 100 μm, a width of the groove bottom surface is greater than or equal to 50 μm, a width of the groove top surface is three to six times of the width of the groove bottom surface, and a ratio of a depth of the groove wall surface to a depth of the groove is greater than or equal to 50%.
22. The method of manufacturing a package structure according to claim 15, wherein the upper surface of the plastic encapsulation is flushed with the upper surface of the solder filling body.
23. The method of manufacturing a package structure according to claim 15, wherein a thickness of the shielding layer is 2 to 10 μm.
24. The method of manufacturing a package structure according to claim 15, further comprising: disposing a communication chip module on the substrate.
25. The method of manufacturing a package structure according to claim 24, wherein a height of the communication chip module is less than or equal to 200 μm.
26. The method of manufacturing a package structure according to claim 24, wherein the communication chip module is located on a different side of the substrate opposite to the at least two radio frequency chip modules, and attached to the substrate through a plurality of micro-solder balls.
27. The method of manufacturing a package structure according to claim 24, wherein the communication chip module and the at least two radio frequency chip modules are located on the same side of the substrate, and directly attached to the substrate, and the communication chip module is not coated by the plastic encapsulation.
28. The method of manufacturing a package structure according to claim 15, further comprising: disposing a plurality of solder balls on another surface of the substrate, the plurality of solder balls located on a different side of the substrate opposite to the at least two radio frequency chip modules.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED EMBODIMENTS OF THE INVENTION
[0038] Hereinafter structural principle and working principle of the invention are described in detail with reference to the accompanying drawings:
[0039]
[0040] As shown in
[0041] The substrate 101 is designed to have multiple metal circuit layers and a complete ground plane layer to facilitate separating signal interference of a vertical plane. The solid grounded copper layer 1011 is disposed on a surface layer of the substrate 101, and is made of copper, for the purpose of making contact with the solder filling body 106 to form a metal separating wall. Alternatively, an upper surface of the solid grounded copper layer 1011 can be covered with a solder mask for insulation protection, or is directly electroplated for protection, or protected by an anti-oxidation film to prevent the copper layer from being exposed and oxidized when the substrate is processed. The substrate 101 is selected from a rigid organic laminated multilayer sheet material, and the metal layers of the substrate 101 are laminated ten to twelve layers.
[0042] The radio frequency chip module 102 and the radio frequency chip module 103 are gold wire bonded and welded to the substrate 101 through a flip-chip welding technology or a surface mounted technology.
[0043] The plastic encapsulation 104 is formed after thermoplastic curing a plastic encapsulation material on an entire surface of the substrate 101 through a plastic encapsulation technology. Alternatively, the plastic encapsulation material forming the plastic encapsulation 104 is selected from an insulated thermosetting material with a relatively low viscosity.
[0044] The groove 105 is formed on the plastic encapsulation 104 between the radio frequency chip module 102 and the radio frequency chip module 103 through a laser technology, and penetrates the upper surface and the lower surface of the plastic encapsulation 104.
[0045] A solder filling material is filled in the groove 105 to form the solder filling body 106. Specifically, an upper surface of the solder filling body 106 is flushed with the upper surface of the plastic encapsulation 104, so as to facilitate flatness of the shielding layer 107 formed subsequently. Alternatively, the main component of the solder filling body 106 is a silver powder shielding material, such that a contact portion of the solder filling body 106 and the solid grounded copper layer 1011 can form an alloy, i.e., the silver powder shielding material is bonded with the copper material to form an alloy, so a position of the solder filling body 106 corresponding to a position of the solid grounded copper layer 1011 shall be satisfied.
[0046] A shielding layer 107 is formed on the upper surface and lateral surfaces of the plastic encapsulation 104, an upper surface of the solder filling body 106 and lateral surfaces of the substrate 101 through a sputtering technology. Alternatively, the shielding layer 107 is made of a metal material, and has a thickness of 2 to 10 μm.
[0047] In the package structure 100 provided in this embodiment, the solid grounded copper layer 1011 on the surface layer of the substrate 101 is electrically connected to the shielding layer 107 through the solder filling body 106, thereby packaging the substrate 101, and the solid grounded copper layer 1011, the solder filling body 106 and the shielding layer 107 are bonded together to form a relatively enclosed shielding cavity as a whole, which functions to shield electromagnetic interference between the radio frequency chip module 102, the radio frequency chip module 103 and external electronic elements. Meanwhile, the groove 105 is located between the radio frequency chip module 102 and the radio frequency chip module 103, and filled with the solder filling body 106 for shielding electromagnetic interference between the radio frequency chip module 102 and the radio frequency chip module 103.
[0048] Preferably, the package structure 100 further comprises a communication chip module 109. In this embodiment, the communication chip module 109 is attached to the substrate 101. Specifically, the communication chip module 109 is located on another surface of the substrate 101, i.e., a different surface of the substrate 101 opposite to the radio frequency chip module 102 and the radio frequency chip module 103, and the communication chip module 109 is disposed on the substrate 101 through micro-solder balls 1091 using interconnection of flip-chip welding or surface mounted welding. Meanwhile, a height of the communication chip module 109 is less than or equal to 200 μm.
[0049] Preferably, the package structure 100 further comprises a plurality of solder balls 108. In this embodiment, the plurality of solder balls 108 are disposed on the surface of the substrate 101 through a bumping technology to form an interconnected interface, and also on another surface of the substrate 101, i.e., the different surface of the substrate 101 opposite to the radio frequency chip module 102 and the radio frequency chip module 103. Please refer to
[0050]
[0051] As shown in
[0052] As shown in
[0053] As shown in
[0054]
[0055] As shown in ” shape, and a shape of the solder filling body 106 is defined by the groove 105, and also in a “
” shape.
[0056]
[0057] Difference between a package structure 100′ shown in
[0058]
[0059] Difference between a package structure 100″ shown in
[0060]
[0061] As shown in
[0062] S101: providing a substrate 101 where at least two radio frequency chip modules 102, 103 are disposed on a surface and a solid grounded copper layer 1011 is disposed on a surface layer.
[0063] Please also refer to
[0064] The substrate 101 is designed to have multiple metal circuit layers and a complete ground plane layer to facilitate separating signal interference of a vertical plane. The solid grounded copper layer 1011 is disposed on the surface layer of the substrate 101, and is made of copper, for the purpose of making contact with the solder filling body 106 in subsequent manufacturing process to form a metal separating wall. Alternatively, an upper surface of the solid grounded copper layer 1011 can be covered with a solder mask for insulation protection, or is directly electroplated for protection, or protected by an anti-oxidation film to prevent the copper layer from being exposed and oxidized when the substrate is processed. The substrate 101 is selected from a rigid organic laminated multilayer sheet material, and the metal layers of the substrate 101 are laminated ten to twelve layers.
[0065] S102: forming a plastic encapsulation 104 on the substrate 101 to coat the at least two radio frequency chip modules 102, 103 therein.
[0066] Please also refer to
[0067] S103: cutting the plastic encapsulation 104 between the adjacent two radio frequency chip modules 102, 103 and forming a groove 105, the groove 105 penetrating an upper surface and a lower surface of the plastic encapsulation 104, and a bottom surface of the groove 105 corresponding to the solid grounded copper layer 1011.
[0068] Please also refer to
[0069] Specifically, a width of the groove bottom surface 1053 is designed to be greater than or equal to 50 μm, and a width of the groove bottom surface 1053 is at least 50 μm less than the width of the solid grounded copper layer 1011. That is, correspondingly, the width of the solid grounded copper layer 1011 shall be designed to be greater than or equal to 100 μm, a width of the groove top surface 1051 is designed to be three to six times of the width of the groove bottom surface 1053, and a depth of the groove wall surface 1052 is designed to be 50% or more of a depth of the whole groove 105.
[0070] S104: filling a solder filling body 106 in the groove 105, and making contact with the solid grounded copper layer 1011.
[0071] Please also refer to
[0072] The main component of the solder filling body 106 is a silver powder shielding material, such that the solder filling body 106 makes contact with the solid grounded copper layer 1011 through the groove bottom surface 1053 to form a metal separating wall, i.e., the silver powder shielding material is bonded with a copper material to form a metal separating wall, so a position of the solder filling body 106 corresponds to a position of the solid grounded copper layer 1011, i.e., the groove bottom surface 1053 corresponds to the position of the solid grounded copper layer 1011.
[0073] S105: forming a shielding layer 107 on the upper surface and lateral surfaces of the plastic encapsulation 104, an upper surface of the solder filling body 106 and lateral surfaces of the substrate 101.
[0074] Please also refer to
[0075]
[0076] As shown in
[0077] As shown in
[0078] Of course, the invention also may have various other embodiments, and those skilled in the art shall make various corresponding modifications and variations according to the invention without departing from spirit and essence of the invention, but these corresponding modifications and variations shall belong to the scope protected by the appended claims of the invention.