Method for fabricating zinc oxide nanostructures and gas sensors
11639910 · 2023-05-02
Assignee
Inventors
Cpc classification
Y02A50/20
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
G01N27/12
PHYSICS
Abstract
The present disclosure provides a gas sensor comprising a gas sensing layer fabricated based on a solution-processed, template-free synthesis method that achieves controllable ZnO nanostructured morphologies. The method is based on promotion and suppression of growth at specific crystallographic dimensions by tuning the polarity of the solvent. The gas sensing layer with the ZnO nanostructures exhibits high response, excellent selectivity and rapid recovery time.
Claims
1. An ammonia gas sensor comprising: a gas sensing layer for sensing variation in a concentration of ammonia gas and generating a change in electrical resistance, the gas sensing layer comprising zinc oxide (ZnO) twinned rods and having a thickness of 200 to 400 microns (μm).
2. The ammonia gas sensor of claim 1, wherein the ZnO twinned rods comprise two ZnO rods, which are connected in series.
3. The ammonia gas sensor of claim 1, wherein the ZnO twinned rods have an elongated-hexagonal shape.
4. The ammonia gas sensor of claim 1, wherein the ZnO twinned rods have an aspect ratio of diameter to height being of 1:4 to 1:10, and an average grain size of 32 to 34 nanometers (nm).
5. The ammonia gas sensor of claim 1, wherein the ZnO twinned rods have a diameter of 500 nm to 3 μm, and a height of 5 μm to 10 μm.
6. The ammonia gas sensor of claim 1 further comprising: a ceramic tube; two electrodes separately attached to an outer surface of the ceramic tube: two electrode lines attached to the two electrode respectively; and a heating element located inside the ceramic tube; wherein the gas sensing layer electrically connects the two electrodes.
7. The ammonia gas sensor of claim 6, wherein the ceramic tube comprises aluminum oxide; each of the two electrodes is a gold electrode; each of the two electrode line is a platinum wire; the heater is a nickel-chromium coil; and the gas sensing layer at least partially covers the outer surface of the ceramic tube.
8. A gas sensor comprising: a gas sensing layer for sensing variation in a concentration of a gas and generating a change in electrical resistance, the gas sensing layer comprising a ZnO structure and having a thickness of 200 μm to 400 μm, the ZnO structure being a twin-rod-shaped ZnO structure, a cross-shaped ZnO structure or a flower-shaped ZnO structure.
9. The gas sensor of claim 8 further comprising: a ceramic tube; two electrodes separately attached to an outer surface of the ceramic tube; two electrode lines attached to the two electrode respectively; and a heating element located inside the ceramic tube; wherein the gas sensing layer electrically connects the two electrodes.
10. The gas sensor of claim 9, wherein the ceramic tube comprises aluminum oxide; each of the two electrodes is a gold electrode; each of the two electrode line is a platinum wire; the heater is a nickel-chromium coil; and the gas sensing layer at least partially covers the outer surface of the ceramic tube.
11. A method for fabricating a zinc oxide (ZnO) structure comprising: providing a polar solvent with a predetermined polarity; mixing zinc nitrate, the polar solvent hexamethylenetramine, polyvinyloyrrolidone and polyvinyl alcohol thereby forming a mixture; heating the mixture under a pressure thereby forming a precipitate; separating the precipitate from the heated mixture; and drying the separated precipitate to form the ZnO structure.
12. The method of claim 11 further comprising calcinating the dried precipitate.
13. The method of claim 11, wherein the ZnO structure is a twin-rod-shaped ZnO structure, a cross-shaped ZnO structure, or a flower-shaped ZnO structure.
14. The method of claim 13, wherein the polar solvent consists of water for forming the twin-rod-shaped ZnO structure; and the polar solvent consists of ethanol for forming the flower-shaped ZnO structure.
15. The method of claim 13, wherein the polar solvent consists of water and ethanol for forming the cross-shaped ZnO structure.
16. The method of claim 15, wherein a volume ratio of the water to the ethanol is of 0.8:1 to 1.2:1.
17. The method of claim 11, wherein the step of providing a polar solvent comprise mixing a plurality of first polar solvents in a volume ratio to form the polar solvent with the predetermined polarity, wherein the plurality of first polar solvents has different polarities.
18. The method of claim 11, wherein the step of providing a polar solvent comprises mixing a first polar solvent and a second polar solvent in a volume ratio to form the polar solvent with the predetermined polarity, wherein the first polar solvent and the second polar solvent have different polarities.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1) The appended drawings, where like reference numerals refer to identical or functionally similar elements, contain figures of certain embodiments to further illustrate and clarify the above and other aspects, advantages and features of the present invention. It will be appreciated that these drawings depict embodiments of the invention and are not intended to limit its scope. The invention will be described and explained with additional specificity and detail through the use of the accompanying drawings in which:
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(23) Skilled artisans will appreciate that elements in the figures are illustrated for simplicity and clarity and have not necessarily been depicted to scale.
DETAILED DESCRIPTION OF THE INVENTION
(24) It will be apparent to those skilled in the art that modifications, including additions and/or substitutions, may be made without departing from the scope and spirit of the invention. Specific details may be omitted so as not to obscure the invention; however, the disclosure is written to enable one skilled in the art to practice the teachings herein without undue experimentation.
(25) An aspect of the present disclosure provides a gas sensor comprising a gas sensing layer fabricated based on a solution-processed, template-free synthesis method that achieves controllable ZnO nanostructured/structured morphologies. The method is based on promotion and suppression of growth at specific crystallographic dimensions by tuning the polarity of the solvent.
(26) Certain embodiments provide gas sensor comprising: a gas sensing layer for sensing variation in a concentration of a gas and generating a change in electrical resistance, the gas sensing layer comprising a ZnO nanostructure, the ZnO nanostructure being a twin-rod-shaped ZnO nanostructure, a cross-shaped ZnO nanostructure or a flower-shaped ZnO nanostructure.
(27) In certain embodiments, the gas sensor further comprises: a ceramic tube; two electrodes separately attached to an outer surface of the ceramic tube; two electrode lines attached to the two electrode respectively; and a heating element located inside the ceramic tube; wherein the gas sensing layer electrically connects the two electrodes.
(28) In certain embodiments, the ceramic tube comprises aluminum oxide; each of the two electrodes is a gold electrode; each of the two electrode line is a platinum wire; the heater is a nickel-chromium coil; and the gas sensing layer at least partially covers the outer surface of the ceramic tube.
(29) Certain embodiments provide a method for fabricating a zinc oxide nanostructure (or structure) comprising: manipulating polarity of a polar solvent; mixing at least a zinc salt and the polar solvent thereby forming a mixture; heating the mixture beyond 150 degrees C. and under a pressure beyond atmospheric pressure thereby forming a precipitate; separating the precipitate from the heated mixture; and drying the separated precipitate to form the ZnO nanostructure.
(30) In certain embodiments, the method further comprises calcinating the dried precipitate for the purpose of achieving greater crystallinity, thus better sensing performance.
(31) In certain embodiments, the ZnO nanostructure is a twin-rod-shaped ZnO nanostructure, a cross-shaped ZnO nanostructure, or a flower-shaped ZnO nanostructure.
(32) In certain embodiments, the polar solvent consists of water for forming the twin-rod-shaped ZnO nanostructure; and the polar solvent consists of ethanol for forming the flower-shaped ZnO nanostructure.
(33) In certain embodiments, the polar solvent consists of water and ethanol for forming the cross-shaped ZnO nanostructure.
(34) In certain embodiments, a volume ratio of the water to the ethanol is of 0.8:1 to 1.2:1.
(35) In certain embodiments, the step of manipulating polarity of a polar solvent comprise mixing a plurality of first polar solvents in a volume ratio to form the polar solvent, wherein the plurality of first polar solvents has different polarities.
(36) In certain embodiments, the step of manipulating polarity of a polar solvent comprises mixing a first polar solvent and a second polar solvent in a volume ratio to form the polar solvent, wherein the first polar solvent and the second polar solvent have different polarities.
(37) In certain embodiments, wherein the zinc salt is zinc nitrate; and the step of mixing at least a zinc salt and the polar solvent comprises mixing the zinc nitrate, the polar solvent, hexamethylenetetramine, polyvinylpyrrolidone and polyvinyl alcohol thereby forming the mixture.
(38) Another aspect of the present disclosure provides an ammonia gas sensor comprising a gas sensing layer fabricated based on a solution-processed, template-free synthesis method that achieves controllable ZnO nanostructured/structured morphologies. The method is based on promotion and suppression of growth at specific crystallographic dimensions by tuning the polarity of the solvent. Ammonia gas sensors based on three nanostructured morphologies have been fabricated and characterized. Specifically, ZnO twinned rods exhibited the high response and excellent selectivity to ammonia vapor at the operating temperature of 280° C. with a rapid response and recovery times of 10 s and 36 s, respectively. Investigation of the structure-performances relationship reveals that controlled enhancement and suppression to growth along crystallographic dimensions is an effective strategy for achieving desirable gas sensing properties. In certain embodiments, enhanced c-axis growth while suppressing growth in other crystallographic dimensions is an effective way for tuning the gas sensing properties.
(39) Certain embodiments provide an ammonia gas sensor comprising: a gas sensing layer for sensing variation in a concentration of ammonia gas and generating a change in electrical resistance, the gas sensing layer comprising zinc oxide (ZnO) twinned rods.
(40) In certain embodiments, the ZnO twinned rods comprise two crystalline ZnO rods, which are connected in series.
(41) In certain embodiments, the ZnO twinned rods have an elongated-hexagonal shape.
(42) In certain embodiments, the ZnO twinned rods have an aspect ratio of diameter to height being of 1:4 to 1:10, and an average grain size of 32 to 34 nm.
(43) In certain embodiments, the ZnO twinned rods have a diameter of 500 nm to 3 μm, and a height of 5 μm to 10 μm.
(44) In certain embodiments, the gas sensing layer has a thickness of 200 μm to 400 μm.
(45) In certain embodiments, the ammonia gas sensor further comprises: a ceramic tube; two electrodes separately attached to an outer surface of the tube; two electrode lines attached to the two electrode respectively; and a heating element located inside the tube; wherein the gas sensing layer electrically connects the two electrodes.
(46) In certain embodiments, the ceramic tube comprises aluminum oxide; each of the two electrodes is a gold electrode; each of the two electrode line is a platinum wire; the heater is a nickel-chromium coil; and the gas sensing layer at least partially covers the outer surface of the tube.
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EXAMPLES
(52) Materials
(53) Zinc nitrate hexahydrate (Zn(NO.sub.3).sub.2.6H.sub.2O), polyvinylpyrrolidone (PVP, M.sub.W=1.3 Mg mol.sup.−1), polyvinyl alcohol (PVA1788, (CH.sub.2CHOH).sub.n) were purchased from Aldrich. Hexamethylenetetramine HMTA ((CH.sub.2).sub.6N.sub.4) was purchased from BDH Chemicals. All materials were used without further purification.
(54) Synthesis
(55) The preparation of different ZnO nanostructures is depicted in
(56) Characterization
(57) X-Ray diffraction (XRD) analysis was conducted by a Bruker D2 Phaser X-ray diffractometer with Cu K.sub.α radiation (λ=1.54 Å) to analyze the structure of the prepared products. Morphological characterization was performed by field emission scanning electron microscopy (FE-SEM) (JEOL JSM-6335F) with a scan voltage of 5 kV.
(58) Fabrication of Gas Sensor
(59) The sensor device structure is shown in
(60) Gas Sensing Characterization System
(61) Gas sensing properties were characterized using a custom-built system consisting a computer, data collection system (CGS-8 intelligent gas sensing analysis system and corresponding test software), and custom test chambers (1 L). The characterization system supports the testing of all three samples by simultaneously subjecting them to the same environment, which is critical for an accurate comparison between the devices. Characterization proceeded as follows: in the beginning, sensors were placed into a chamber filled with air until the resistances of all sensors were stable. To prepare the ammonia target gas, a controlled amount of ammonia solution was injected into an evaporator to form ammonia vapor. After the sensor responses reached steady state, the test chamber was flushed with air to allow sensor recovery. To minimize variation across measurements, the entire process of target introduction and recording was fully automated by a computer system.
(62) The gas response
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where R.sub.0, R.sub.g, and ΔR denote the initial resistance of the sensor placed in air, measured resistance exposed to the target gas, and absolute value of resistance changes, respectively. As conventional, τ.sub.res and τ.sub.rec are defined as the time taken by the sensor to achieve 90% of the final resistance value for both the response and recovery times. Specifically, the response time reflects the resistance change from R.sub.0 to R.sub.0−ΔR×90% upon the introduction of the target gas to the sensor. The recovery time is defined as the time taken for the resistance to change from R.sub.g to R.sub.g+ΔR×90% upon the flushing of the test chamber with air.
(64) Morphological Characteristics
(65) The morphologies of the as-synthesized ZnO nanostructures were characterized by FE-SEM.
(66) Structural Characteristics
(67) To characterize the crystal structures of ZnO, the XRD peaks of the as-synthesized samples are shown in
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the average grain sizes of all samples can be obtained, where D is the grain size, κ is a constant related to the crystallite shape, typically taken as 0.9, λ is the X-ray wavelength, β is the peak width of the diffraction peak profile at half maximum height, and θ is the diffraction angle. The average grain size for S1, S2 and S3 can be estimated to be 32.9 nm, 47.0 nm and 47.4 nm, respectively.
(69) Formation Mechanisms Discussion
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(71) For the formation of the twin-rod ZnO crystal (sample S1), when water serves as the solvent, the solvent polarity is the largest among the samples. Thus, the largest amount of O.sup.2− ions are absorbed on the polar surfaces, (0 0 1), leading to the fastest crystal growth along the c-axis, while growth perpendicular to the c-axis is suppressed. For the nanocross morphology (sample S2), as the solvent is a mixture of water and ethanol, with reduced solvent polarity, less O.sup.2− ions are absorbed on the (0 0 1) polar surfaces and more O.sup.2− ions are absorbed on the nonpolar surfaces, leading to slower crystal growth along the c-axis and more growth perpendicular to the c-axis.
(72) For the nanoflower morphology (sample S3), when the solvent contents only ethanol, solvent polarity is the weakest, thus the most O.sup.2− ions are absorbed on the nonpolar surfaces. This leads to the greatest suppression of c-axis growth, but simultaneously, growth in other crystallographic directions is augmented.
(73) Gas Sensing Properties
(74) Gas sensing properties are characterized for the three morphologically different samples. The response and recovery time, τ.sub.res and τ.sub.rec, for all three sensors towards 100 ppm ammonia vapor are shown in
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(77) A selective ammonia sensor should have the ability to recognize the ammonia molecule in the presence of other widely used volatile organic compounds (VOCs). In disease diagnostics applications, ammonia is often required to be sensed in the presence of a variety of bio-generated gases. For example, ammonia is an indication for kidney disease, methanol for lung cancer, acetone for diabetes, upper respiratory tract for isopropanol.
(78) Table I shows a performance comparison between recently reported ammonia sensors. The properties of the ZnO nanorod based sensor are competitive with the other reported ZnO ammonia sensors, demonstrating excellent sensitivity and very fast dynamics. However, unlike the other designs compared, the proposed design involves only a single material, i.e., does not require a heterojunction (e.g. Cr.sub.2O.sub.3/ZnO and CuO/ZnO), and does not require doping (e.g. with tungsten or nickel) to augment its high response. In addition, the proposed material can be prepared in a single step, which improves the scalability of fabrication and lessen the demand on complex equipment. Most importantly, by using the rather facile method of changing the solvent environment, a great degree of morphological control has been achieved.
(79) TABLE-US-00001 TABLE 1 Performance comparison between reported ZnO ammonia sensors. Materials Structures Method Concentration Response Response time Recovery time Cr.sub.2O.sub.3/ZnO Thick film Solid reaction 300 ppm 13.7 25 s 75 s CuO/ZnO Thick film Solid reaction 100 ppm 1.5 / / W/ZnO Thin film Sol-gel 100 ppm 1.5 325 36 s Ni/ZnO Thin film Sol-gel 100 ppm 2.52 49 s 58 s ZnO/rGO Nano-particles Thermal reduction 50 ppm 3.05% 84 s 216 s ZnO Thin film Sol-gel 600 ppm 57.5% 160 s 660 s ZnO Twinned rods Solvo-thermal 100 ppm 25 10 s 36 s
(80) Gas Sensing Mechanism
(81) The difference in response from the three morphologically distinct samples can be further investigates by examining the sensing mechanism. Typically, a change in the electrical resistance results from a metal oxide gas sensor being exposed to the target gas molecule. For an n-type ZnO semiconductor, the resistance change is mainly due to the adsorption and desorption of oxygen at the sensing material surface. The possible chemical reactions of ammonia with the chemisorbed oxygen molecules can be described as follows:
O.sub.2(gas)+2e.sup.−(ads).fwdarw.2O.sup.−(ads) (Equation 1)
2NH.sub.3(gas)+3O.sup.−(ads).fwdarw.2N.sub.2+3H.sub.2O+3e.sup.− (Equation 2)
e.sup.−+h.Math..Math.null (Equation 3)
(82) In air, the atmospheric oxygen absorbed on the surface can be transformed to O.sup.− (ads) by capturing electrons from ZnO. In the temperature range of 100° C. to 500° C., O.sup.− is the dominated adsorbates for a resistance change. As described in Equation 1 and
(83) In the analyte, the adsorbed oxygen species O.sup.− (ads) are consumed by reacting with ammonia, leading to a lower surface coverage of the adsorbates. Electrons are released by the oxygen adsorbates, which reduces the EDL and decreases the resistance. These electrons then return to the conduction band of the ZnO, as described in Equation 2 and Equation 3, resulting in a reduction in the barrier height.
(84) Based on the above analysis, it is evident that the EDL plays an essential role in sensing performance. In general, smaller the crystallite size, the larger the proportion of the EDL layer occupies with respect to the entire crystallite. In fact, it has been reported that the gas induced resistance change is proportional to 1/D, where D is the average grain size. Since the nanorod exhibits the smallest crystal size among the three samples, it has the most depletion, active volume for sensing, thus resulting in the highest response.
(85) Thus, it can be seen that an improved gas sensing layer with ZnO nanostructures/structures and method for fabricating the ZnO nanostructures/structures have been disclosed which eliminates or at least diminishes the disadvantages and problems associated with prior art processes and devices. The present solvent-assisted technique for controlling of the morphology of oxide nanomaterials, which directly maps to various ammonia gas sensing properties. Specifically, by using a polar solvent, the c-axis growth is promoted while growth in the other crystallographic dimensions is suppressed. This results in nanorods with enhancements in gas sensing properties both in terms of sensitivity and dynamic response. Through control of oxide crystal growth, this work paves the way to the rational design of oxide nanomaterials for ammonia and other environmental gas sensing applications.
(86) Although the invention has been described in terms of certain embodiments, other embodiments apparent to those of ordinary skill in the art are also within the scope of this invention. Accordingly, the scope of the invention is intended to be defined only by the claims which follow.