Applications, methods and systems for a laser deliver addressable array
11811196 · 2023-11-07
Assignee
Inventors
- Mark S. Zediker (Castle Rock, CO)
- Matthew Silva Sa (Englewood, CO, US)
- Jean Michel Pelaprat (Saratoga, CA, US)
- David Hill (Broomfield, CO, US)
- Mathew Finuf (Castle Rock, CO, US)
Cpc classification
B33Y10/00
PERFORMING OPERATIONS; TRANSPORTING
H01S5/02469
ELECTRICITY
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
H01S3/30
ELECTRICITY
H01S5/4012
ELECTRICITY
G02B27/0922
PHYSICS
H01S5/4062
ELECTRICITY
B22F10/28
PERFORMING OPERATIONS; TRANSPORTING
H01S5/0092
ELECTRICITY
B22F12/47
PERFORMING OPERATIONS; TRANSPORTING
International classification
G02B27/09
PHYSICS
H01S3/30
ELECTRICITY
H01S5/323
ELECTRICITY
Abstract
There is provided assemblies for combining a group of laser sources into a combined laser beam. There is further provided a blue diode laser array that combines the laser beams from an assembly of blue laser diodes. There are provided laser processing operations and applications using the combined blue laser beams from the laser diode arrays and modules.
Claims
1. An addressable array laser processing system, the addressable array laser processing system comprising: at least three laser systems, wherein each laser system comprises: a. at least three laser diode assemblies; b. each of the at least laser diode assemblies comprises at least ten laser diodes, wherein each of the at least ten laser diodes is capable of producing a blue laser beam, having a power of at least about 2 Watts and a beam parameter product of less than 8 mm-mrad, along a laser beam path, wherein each laser beam path is essentially parallel, whereby a space is defined between the laser beams traveling along the laser beam paths; and c. a means for spatially combining and preserving brightness of the blue laser beams positioned on all of the at least thirty laser beam paths, the means for spatially combining and preserving brightness comprising a collimating optic for a first axis of a laser beam, a vertical prism array for a second axis of the laser beam, and a telescope; whereby the means for spatially combining and preserving fills in the space between the laser beams with laser energy, thereby providing a combined laser beam a power of at least about 250 Watts, and a beam parameter product of less than 40 mm-mrad; each of the at least three laser systems configured to couple each of their combined laser beams into a single optical fiber; whereby each of the at least the three combined laser beams being capable of being transmitted along its coupled optical fiber; the at least three optical fibers in optical association with a laser head; and a control system; wherein the control system comprises a program having a predetermined sequence for delivering each of the combined laser beams at a predetermined position on a target material.
2. The addressable array of claim 1, wherein the predetermined sequence for delivering comprises individually turning on and off the laser beams from the laser head, thereby imaging onto a bed of powder to melt and fuse the target material comprising a powder into a part.
3. The addressable array of claim 1, wherein the fibers in the laser head are configured in an arrangement selected from the group consisting of linear, non-linear, circular, rhomboid, square, triangular, and hexagonal.
4. The addressable array of claim 1, wherein the fibers in the laser head are configured in an arrangement selected from the group consisting of 2×5, 5×2, 4×5, at least 5× at least 5, 10×5, 5×10 and 3×4.
5. The addressable array of claim 1, wherein the target material comprises a powder bed; and, comprising: an x-y motion system, capable of transporting the laser head across a powder bed, thereby melting and fusing the powder bed; and a powder delivery system positioned behind the laser source to provide a fresh powder layer behind the fused layer.
6. The addressable array of claim 5, comprising: a z-motion system, capable of transporting the laser head to increment and decrement a height of the laser head above a surface of the powder bed.
7. The addressable array of claim 5, comprising: a bi-directional powder placement device capable of placing powder directly behind the delivered laser beam as it travels in a positive x direction or a negative x direction.
8. The addressable array of claim 5, comprising a powder feed system that is coaxial with a plurality of laser beam paths.
9. The addressable array of claim 5, comprising a gravity feed powder system.
10. The addressable array of claim 5, comprising a powder feed system, wherein the powder is entrained in an inert gas flow.
11. The addressable array of claim 5, comprising a powder feed system that is transverse to N laser beams where N≥1 and the powder is placed by gravity ahead of the laser beams.
12. The addressable array of claim 5, comprising a powder feed system that is transverse to N laser beams where N≥1 and the powder is entrained in an inert gas flow which intersects the laser beams.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
(14)
(15)
(16)
(17)
(18)
(19)
(20)
(21)
(22)
(23)
(24)
(25)
(26)
(27)
(28)
(29)
(30)
(31)
DESCRIPTION OF THE PREFERRED EMBODIMENTS
(32) In general, the present inventions relate to the combining of laser beams, systems for making these combinations and processes utilizing the combined beams. In particular, the present inventions relate to arrays, assemblies and devices for combining laser beams from several laser beam sources into one or more combined laser beams. These combined laser beams preferably have preserved, enhanced, and both, various aspects and properties of the laser beams from the individual sources.
(33) Embodiments of the present array assemblies, and the combined laser beams that they provide can find wide-ranging applicability. Embodiments of the present array assemblies are compact and durable. The present array assemblies have applicability in: welding, additive manufacturing, including 3-D printing; additive manufacturing-milling systems, e.g., additive and subtractive manufacturing; astronomy; meteorology; imaging; projection, including entertainment; and medicine, including dental, to name a few.
(34) Although this specification focuses on blue laser diode arrays, it should be understood that this embodiment is only illustrative of the types of array assemblies, systems, processes and combined laser beams contemplated by the present inventions. Thus, embodiments of the present inventions include array assemblies for combining laser beam from various laser beam sources, such as solid state lasers, fiber lasers, semiconductor lasers, as well as other types of lasers and combinations and variations of these. Embodiments of the present invention include the combining of laser beams across all wavelengths, for example laser beams having wavelengths from about 380 nm to 800 nm (e.g., visible light), from about 400 nm to about 880 nm, from about 100 nm to about 400 nm, from 700 nm to 1 mm, and combinations, variations of particular wavelengths within these various ranges. Embodiments of the present arrays may also find application in microwave coherent radiation (e.g., wavelength greater than about 1 mm). Embodiments of the present arrays can combine beams from one, two, three, tens, or hundreds of laser sources. These laser beams can have from a few mil watts, to watts, to kilowatts.
(35) An embodiment of the present invention consists of an array of blue laser diodes that are combined in a configuration to preferably create a high brightness laser source. This high brightness laser source may be used directly to process materials, i.e. marking, cutting, welding, brazing, heat treating, annealing. The materials to be processed, e.g., starting materials or target materials, can include any material or component or composition, and for example, can include semiconductor components such as but not limited to TFTs (thin film transistors), 3-D printing starting materials, metals including gold, silver, platinum, aluminum and copper, plastics, tissue, and semiconductor wafers to name a few. The direct processing may include, for example, the ablation of gold from electronics, projection displays, and laser light shows, to name a few.
(36) Embodiments of the present high brightness laser sources may also be used to pump a Raman laser or an Anti-Stokes laser. The Raman medium may be a fiber optic, or a crystal such as diamond, KGW (potassium gadolinium tungstate, KGd(WO.sub.4).sub.2), YVO.sub.4, and Ba(NO.sub.3).sub.2. In an embodiment the high brightness laser sources are blue laser diode sources, which are a semiconductor device operating in the wavelength range of 400 nm to 500 nm. The Raman medium is a brightness convertor and is capable of increasing the brightness of the blue laser diode sources. The brightness enhancement may extend all the way to creating a single mode, diffraction limited source, i.e., beam having an M.sup.2 of about 1 and 1.5 with beam parameter products of less than 1, less than 0.7, less than 0.5, less than 0.2 and less than 0.13 mm-mrad depending upon wavelength.
(37) In an embodiment “n” or “N” (e.g., two, three, four, etc., tens, hundreds, or more) laser diode sources can be configured in a bundle of optical fibers that enables an addressable light source that can be used to mark, melt, weld, ablate, anneal, heat treat, cut materials, and combinations and variations of these, to name a few laser operations and procedures.
(38) An array of blue laser diodes can be combined, with an optical assembly, to create a high brightness direct diode laser system, which can provide a high brightness combined laser beam.
(39)
(40)
(41) Turning to
(42) In
(43) The laser diode module 220 is capable of producing a combined laser beam, preferably a combined blue laser beam, having the performance of the curve 101 of
(44) The composite beam from each of the laser diode subassemblies, 210, 210a, 210b, 210c, propagate to a patterned mirror, e.g., 225, which is used to redirect and combine the beams from the four laser diode subassemblies into a single beam, as shown in
(45) In the embodiment of
(46) It being understood that configurations, powers and combined beam numbers are feasible. The embodiment of
(47) Thus, the individual modules, the combined modules, and both can be configured to provide a single combined laser beam or multiple combined laser beams, e.g., two, three, four, tens, hundreds or more. These laser beams can each be launched in a single fiber, or they can be further combined to be launched into fewer fibers. Thus, by way of illustration 12 combined laser beams can be launched into 12 fibers, or the 12 beams can be combined and launched into fewer than 12 fibers, e.g., 10, 8, 6, 4 or 3 fibers. It should be understood that this combining can be of different power beams, to either balance or unbalance the power distribution between individual fibers; and can be of beams having different or the same wavelengths.
(48) In an embodiment the brightness of an array of laser diodes can be improved by operating each array at a different wavelength and then combining them with either a grating or series of narrow band dichroic filters. The brightness scaling of this technology is shown in
(49) In an embodiment an array of blue laser diodes can be converted to near single mode or single mode output with the help of a brightness convertor. The brightness convertor can be an optical fiber, a crystal or a gas. The conversion process proceeds via Stimulated Raman Scattering which is achieved by launching the output from an array of blue laser diodes into an optical fiber or crystal or gas with a resonator cavity. The blue laser diode power is converted via Stimulated Raman Scattering to gain and the laser resonator oscillates on the first Stokes Raman line, which is offset from the pump wavelength by the Stokes shift. For example the embodiment shown in
(50) The brightness of a blue laser source can be further increased by combining the outputs of the brightness converted sources. The performance of this type of embodiment is shown by line 104 of
(51) The technology of the present inventions described in this specification can be used to configure a laser system for a wide range of applications ranging from welding, cutting, brazing, heat treating, sculpting, shaping, forming, joining, annealing and ablating, and combinations of these and various other material processing operations. While the preferred laser sources are relatively high brightness, the present inventions provide for the ability to configure systems to meet lower brightness requirements. Furthermore, groups of these lasers can be combined into a long line, which can be used to perform laser operations on larger areas of target materials, such as for example, annealing large area semiconductor devices such as the TFT's of a flat panel display.
(52) The output of either the laser diodes, laser diode arrays, wavelength combined laser diode arrays, brightness converted laser diode arrays and wavelength combined laser diode arrays can be used to create a unique individually addressable printing machine. Since the laser power from each module is sufficient to melt and fuse plastic, as well as, metal powders, these sources are ideal for the additive manufacturing application, as well as additive-subtractive manufacturing applications (i.e., the present laser additive manufacturing system is combined with traditional removing manufacturing technologies, such as CNC machines, or other types of milling machines, as well as laser removal or ablation). Because of their, capability to provide small spot sizes, precision, and other factors, the present systems and laser configurations may also find applications in micro and nano additive, subtractive and additive-subtractive manufacturing technologies. An array of lasers that are individually connected, can be imaged onto the powder surface to create an object at n times the speed of a single scanned laser source. The speed can be further increased by using a higher power laser for each of the n-spots. When using the brightness converted lasers, a near diffraction limited spot can be achieved for each of the n-spots, thus making it feasible to create higher resolution parts because of the sub-micron nature of the individual spot formed with a blue high brightness laser source. This smaller spot size of the present configurations and systems provides a substantial improvement in the processing speed and the resolution of the printing process, compared to prior art 3-D printing technology. When combined with a portable powder feed device, embodiments of the present systems can continuously print layer after layer at a speeds in excess of 100× the print speeds of prior art additive manufacturing machines. By enabling the system to deposit powder as the positioning devices moves either in a positive or negative direction just behind the laser fusing spots (e.g.,
(53) Turning to
(54)
(55) Turning to
(56) By “addressable array” it is meant that one or more of: the power; duration of firing; sequence of firing; position of firing; the power of the beam; the shape of the beam spot, as well as, the focal length, e.g., depth of penetration in the z-direction, can be independently varied, controlled and predetermined or each laser beam in each fiber to provide precise and predetermined delivery patterns that can create from the target material highly precise end products (e.g., built materials) Embodiments of addressable arrays can also have the ability for individual beams and laser stops created by those beam to perform varied, predetermined and precise laser operations such as annealing, ablating, and melting.
(57) Turning to
(58) Turning to
(59)
(60)
(61)
(62)
(63)
(64)
(65)
(66)
(67)
(68)
(69)
(70)
(71) The following examples are provided to illustrate various embodiments of laser arrays, systems, apparatus and methods of the present inventions. These examples are for illustrative purposes and should not be viewed as, and do not otherwise limit the scope of the present inventions.
Example 1
(72) An array of blue laser diodes that are spatially combined to make a single spot in the far-field that can be coupled into a Solarization resistant optical fiber for delivery to the work piece.
Example 2
(73) An array of blue laser diodes as described in Example 1 that are polarization beam combined to increase the effective brightness of the laser beam.
Example 3
(74) An array of blue laser diodes with space between each of the collimated beams in the fast axis of the laser diodes that are then combined with a periodic plate which reflects the first laser diode(s) and transmits a second laser diode(s) to fill the space between the laser diodes in the fast direction of the first array.
Example 4
(75) A patterned mirror on a glass substrate that is used to accomplish the space filling of Example 3.
Example 5
(76) A patterned mirror on one side of the glass substrate to accomplish the space filling of Example 3 and the glass substrate is of sufficient thickness to shift the vertical position of each laser diode to fill the empty space between the individual laser diodes.
Example 6
(77) A stepped heat sink that accomplishes the space filling of Example 3 and is a patterned mirror as described in Example 4.
Example 7
(78) An array of blue laser diodes as described in Example 1 where each of the individual lasers are locked by an external cavity to a different wavelength to substantially increase the brightness of the array to the equivalent brightness of a single laser diode source.
Example 8
(79) An array of blue laser diodes as described in Example 1 where individual arrays of laser diodes are locked to single wavelength using an external cavity based on a grating and each of the laser diode arrays are combined into a single beam using either narrowly spaced optical filters or gratings.
Example 9
(80) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that has a pure fused silica core to create a higher brightness source and a fluorinated outer core to contain the blue pump light.
Example 10
(81) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that has a GeO.sub.2 doped central core with an outer core to create a higher brightness source and an outer core that is larger than the central core to contain the blue pump light.
Example 11
(82) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that has a P.sub.2O.sub.5 doped core to create a higher brightness source and an outer core that is larger than the central core to contain the blue pump light.
Example 12
(83) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that has a graded index core to create a higher brightness source and an outer core that is larger than the central core to contain the blue pump light.
Example 13
(84) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor fiber that is a graded index GeO.sub.2 doped core and an outer step index core.
Example 14
(85) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor fiber that is a graded index P.sub.2O.sub.5 doped core and an outer step index core.
Example 15
(86) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor fiber that is a graded index GeO.sub.2 doped core.
Example 16
(87) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor fiber that is a graded index P.sub.2O.sub.5 doped core and an outer step index core.
Example 17
(88) Other embodiments and variations of the embodiment of Example one are contemplated. An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as diamond to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as KGW to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as YVO.sub.4 to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as Ba(NO.sub.3).sub.2 to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor that is a high pressure gas to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a rare-earth doped crystal to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump a rare-earth doped fiber to create a higher brightness laser source. An array of blue laser diodes as described in Example 1 that is used to pump an outer core of a brightness convertor to create a higher ratio of brightness enhancement.
Example 18
(89) An array of Raman converted lasers that are operated at individual wavelengths and combined to create a higher power source while preserving the spatial brightness of the original source.
Example 19
(90) An Raman fiber with dual cores and a means to suppress the second order Raman signal in the high brightness central core using a filter, fiber Bragg grating, difference in V number for the first order and second order Raman signals or a difference in micro-bend losses.
Example 20
(91) N laser diodes where N≥1 that can be individually turned on and off and can be imaged onto a bed of powder to melt and fuse the powder into a unique part.
Example 21
(92) N laser diode arrays where N≥1 of Example 1 whose output can be fiber coupled and each fiber can be arranged in a linear or non-linear fashion to create an addressable array of high power laser beams that can be imaged or focused onto a powder to melt or fuse the powder into a unique shape layer by layer.
Example 22
(93) One or more of the laser diode arrays combined via the Raman convertor whose output can be fiber coupled and each fiber can be arranged in a linear or non-linear fashion to create an addressable array of N where N≥1 high power laser beams that can be imaged or focused onto a powder to melt or fuse the powder into a unique shape layer by layer.
Example 23
(94) An x-y motion system that can transport the N where N≥1 blue laser source across a powder bed while melting and fusing the powder bed with a powder delivery system positioned behind the laser source to provide a fresh powder layer behind the fused layer.
Example 24
(95) A z-motion system that can increment/decrement the height of the part/powder bed of Example 20 after a new layer of powder is placed.
Example 25
(96) A z-motion system can increment/decrement the height of the part/powder of Example 20 after the powder layer has been fused by the laser source.
Example 26
(97) A bi-directional powder placement capability for Example 20 where the powder is placed directly behind the laser spot(s) as it travels in the positive x direction or the negative x direction.
Example 27
(98) A bi-directional powder placement capability for Example 20 where the powder is placed directly behind the laser spot(s) as it travels in the positive y direction or the negative y direction.
Example 28
(99) A powder feed system which is coaxial with N laser beams where N≥1.
Example 29
(100) A powder feed system where the powder is gravity fed.
Example 30
(101) A powder feed system where the powder is entrained in an inert gas flow.
Example 31
(102) A powder feed system which is transverse to the N laser beams where N≥1 and the powder is placed by gravity just ahead of the laser beams.
Example 32
(103) A powder feed system which is transverse to the N laser beams where N≥1 and the powder is entrained in an inert gas flow which intersects the laser beams.
Example 33
(104) A second harmonic generation system which uses the output of the Raman convertor at for example 460 nm to generate light at half the wavelength of the source laser or 230 nm that consists of an externally resonant doubling crystal such as KTP but does not allow the short wavelength light to propagate through the optical fiber.
Example 34
(105) A third harmonic generation system which uses the output of the Raman convertor at for example 460 nm to generate light at 115 nm using an externally resonant doubling crystal but does not allow the short wavelength light to propagate through the optical fiber.
Example 35
(106) A fourth harmonic generation system which uses the output of the Raman convertor at for example 460 nm to generate light at 57.5 nm using an externally resonant doubling crystal but does not allow the short wavelength light to propagate through the optical fiber.
Example 36
(107) A second harmonic generation system which uses the output of a rare-earth doped brightness convertor such as Thulium that lases at 473 nm when pumped by an array of blue laser diodes at 450 nm to generate light at half the wavelength of the source laser or 236.5 nm using an externally resonant doubling crystal but does not allow the short wavelength light to propagate through the optical fiber.
Example 37
(108) A Third harmonic generation system which uses the output of a rare-earth doped brightness convertor such as Thulium that lases at 473 nm when pumped by an array of blue laser diodes at 450 nm to generate light at 118.25 nm using an externally resonant doubling crystal but does not allow the short wavelength light to propagate through the optical fiber.
Example 38
(109) A fourth harmonic generation system which uses the output of a rare-earth doped brightness convertor such as Thulium that lases at 473 nm when pumped by an array of blue laser diodes at 450 nm to generate light at 59.1 nm using an externally resonant doubling crystal but does not allow the short wavelength light to propagate through the optical fiber.
Example 39
(110) All other rare-earth doped fibers and crystals that can be pumped by a high power 450 nm source to generate visible, or near-visible output can be used in Examples 34-38.
Example 40
(111) Launch of high power visible light into a non-circular outer core or clad to pump the inner core of either the Raman or rare-earth doped core fiber.
Example 41
(112) Use of polarization maintaining fiber to enhance the gain of the Raman fiber by aligning the polarization of the pump with the polarization of the Raman oscillator.
Example 42
(113) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that is structured to create a higher brightness source of a specific polarization.
Example 43
(114) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber that is structured to create a higher brightness source of a specific polarization and maintain the polarization state of the pump source.
Example 44
(115) An array of blue laser diodes as described in Example 1 that is used to pump a Raman convertor such as an optical fiber to create a higher brightness source with a non-circular outer core structured to improve Raman conversion efficiency.
Example 45
(116) The embodiments of Examples 1 to 44 may also include one or more of the following components or assemblies: a device for leveling the powder at the end of each pass prior to the laser being scanning over the powder bed; a device for scaling the output power of the laser by combining multiple low power laser modules via a fiber combiner to create a higher power output beam; a device for scaling the output power of the blue laser module by combing multiple low power laser modules via free space to create a higher power output beam; a device for combining multiple laser modules on a single baseplate with imbedded cooling.
(117) It is noted that there is no requirement to provide or address the theory underlying the novel and groundbreaking performance or other beneficial features and properties that are the subject of, or associated with, embodiments of the present inventions. Nevertheless, various theories are provided in this specification to further advance the art in this important area, and in particular in the important area of lasers, laser processing and laser applications. These theories put forth in this specification, and unless expressly stated otherwise, in no way limit, restrict or narrow the scope of protection to be afforded the claimed inventions. These theories many not be required or practiced to utilize the present inventions. It is further understood that the present inventions may lead to new, and heretofore unknown theories to explain the operation, function and features of embodiments of the methods, articles, materials, devices and system of the present inventions; and such later developed theories shall not limit the scope of protection afforded the present inventions.
(118) The various embodiments of lasers, diodes, arrays, modules, assemblies, activities and operations set forth in this specification may be used in the above identified fields and in various other fields. Additionally, these embodiments, for example, may be used with: existing lasers, additive manufacturing systems, operations and activities as well as other existing equipment; future lasers, additive manufacturing systems operations and activities; and such items that may be modified, in-part, based on the teachings of this specification. Further, the various embodiments set forth in this specification may be used with each other in different and various combinations. Thus, for example, the configurations provided in the various embodiments of this specification may be used with each other; and the scope of protection afforded the present inventions should not be limited to a particular embodiment, configuration or arrangement that is set forth in a particular embodiment, example, or in an embodiment in a particular Figure.
(119) The invention may be embodied in other forms than those specifically disclosed herein without departing from its spirit or essential characteristics. The described embodiments are to be considered in all respects only as illustrative and not restrictive.