Gas Sensing Device with a Gas Filter

Abstract

A gas sensing device includes chemoresistive gas sensing elements, wherein a material composition of a first chemoresistive gas sensing element is similar to a material composition of a second chemoresistive gas sensing element, wherein the first chemoresistive gas sensing element is exposed to an ambient mixture of gases so that first sensing signals depend on a concentration of a first gas and on a concentration of a second gas, wherein the gas sensing device includes a gas filter so that the second sensing signals depend on the concentration of the first gas to a lesser degree than the first sensor signals and so that the second sensing signals depend on the concentration of the second gas, and wherein the gas sensing device estimates the concentration of the first gas and/or the concentration of the second gas based on the first sensing signals and the second sensing signals.

Claims

1.-11. (canceled)

12. A gas sensing device for sensing a first gas and at least one second gas in an ambient mixture of gases; a gas filter that is less permeable for the first gas than for the at least one second gas; a plurality of chemoresistive gas sensing elements including: a first chemoresistive gas sensing element of the plurality of chemoresistive gas sensing elements configured for providing first sensing signals, wherein the first chemoresistive gas sensing element is exposed to the ambient mixture of gases so that the first sensing signals depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases; and a second chemoresistive gas sensing element of the plurality of chemoresistive gas sensing elements configured for providing second sensing signals, the gas filter arranged so the second sensing signals depend on the concentration of the first gas in the ambient mixture of gases to a lesser degree than the first sensing signals, and the second sensing signals depend on the concentration of the second gas in the ambient mixture of gases, and the gas sensing device configured for estimating at least one of the concentration of the first gas in the ambient mixture of gases or the concentration of the second gas in the ambient mixture of gases based on the first sensing signals and based on the second sensing signals; an enclosed containment including a wall structure, the second chemoresistive gas sensing element being arranged in the enclosed containment and the gas filter being implemented as a portion of the wall structure of the enclosed containment, the wall structure of the enclosed containment being between the first chemoresistive gas sensing element and the second chemoresistive gas sensing element; and an enclosed housing including a wall structure, the first chemoresistive gas sensing element and the second chemoresistive gas sensing element being arranged in the enclosed housing, wherein a wall structure of the enclosed housing includes a particle filter impermeable for particles and permeable for the first gas and for the at least one second gas.

13. The gas sensing device of claim 12, wherein a material composition of the first chemoresistive gas sensing element is similar to a material composition of the second chemoresistive gas sensing element, wherein the material composition is suitable for sensing the first gas and the at least one second gas.

14. The gas sensing device of claim 12, wherein the gas filter is less permeable for the first gas than for the at least one second gas.

15. The gas sensing device of claim 12, wherein the first chemoresistive gas sensing element is exposed to the ambient mixture of gases so that the first sensing signals depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases.

16. The gas sensing device of claim 12, wherein the gas filter is arranged to expose the second chemoresistive gas sensing element to a filtered mixture of gases obtained by filtering the ambient mixture of gases with the gas filter so the second sensing signals depend on the concentration of the first gas in the ambient mixture of gases to a lesser degree than the first sensing signals, and the second sensing signals depend on the concentration of the second gas in the ambient mixture of gases.

17. The gas sensing device of claim 12, wherein the first gas is ozone.

18. The gas sensing device of claim 12, wherein the at least one second gas comprises nitrogen dioxide.

19. The gas sensing device of claim 12, wherein a material composition of the first chemoresistive gas sensing element and of the second chemoresistive gas sensing element comprises a mixed oxide or materials comprising carbon.

20. The gas sensing device of claim 12, wherein the gas filter is implemented as a coating of a gas-sensitive area of the second chemoresistive gas sensing element.

21. A gas sensing system, comprising; a gas filter that is less permeable for a first gas than for at least one second gas; a plurality of chemoresistive gas sensing elements including: a first chemoresistive gas sensing element of the plurality of chemoresistive gas sensing elements configured for providing first sensing signals, wherein the first chemoresistive gas sensing element is exposed to the ambient mixture of gases so that the first sensing signals depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases; and a second chemoresistive gas sensing element of the plurality of chemoresistive gas sensing elements configured for providing second sensing signals, the gas filter arranged so the second sensing signals depend on the concentration of the first gas in the ambient mixture of gases to a lesser degree than the first sensing signals, and the second sensing signals depend on the concentration of the second gas in the ambient mixture of gases, and the gas sensing device configured for estimating at least one of the concentration of the first gas in the ambient mixture of gases or the concentration of the second gas in the ambient mixture of gases based on the first sensing signals and based on the second sensing signals; an enclosed containment including a wall structure, the second chemoresistive gas sensing element being arranged in the enclosed containment and the gas filter being implemented as a portion of the wall structure of the enclosed containment, the wall structure of the enclosed containment being between the first chemoresistive gas sensing element and the second chemoresistive gas sensing element; an enclosed housing including a wall structure, the first chemoresistive gas sensing element and the second chemoresistive gas sensing element being arranged in the enclosed housing, wherein a wall structure of the enclosed housing includes a particle filter impermeable for particles and permeable for the first gas and for the at least one second gas; and a processing device including a gas concentration estimator having a trained model based algorithm processor with an input layer and an output layer, wherein first sensing data derived from the first sensing signals and second sensing data derived from the second sensing signals are fed simultaneously to the input layer, and wherein the concentration of at least one of the first gas in the ambient mixture of gases or the concentration of the second gas in the ambient mixture of gases are estimated based on output data of the output layer.

22. The gas sensing system of claim 21, wherein the first chemoresistive gas sensing element, the second chemoresistive gas sensing element and the processing device are arranged at a common substrate.

23. The gas sensing system of claim 21 further comprising: a first heating device configured for heating the first chemoresistive gas sensing element; a second heating device configured for heating the second chemoresistive gas sensing element; and a heat control device in the processing device, the heat control device configured for controlling the first heating device according to a first temperature profile and for controlling the second heating device according to a second temperature device, wherein a maximum temperature of the first temperature profile is lower than a maximum temperature of a second temperature profile.

24. The gas sensing system of claim 22, wherein the first chemoresistive gas sensing element and the second chemoresistive gas sensing element are arranged at a common side of the common substrate, wherein the processing device is arranged at an opposite side of the common substrate, wherein the first chemoresistive gas sensing element and the second chemoresistive gas sensing element are electrically connected to the processing device by vias.

25. The gas sensing system of claim 21, wherein the first gas is ozone, the at least one second gas comprises nitrogen dioxide, and wherein a material composition of the first chemoresistive gas sensing element and of the second chemoresistive gas sensing element comprises a mixed oxide or materials comprising carbon

26. The gas sensing system of claim 21, wherein the first chemoresistive gas sensing element is exposed to the ambient mixture of gases so the first sensing signals depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases.

27. A method, comprising: exposing a first chemoresistive gas sensing element to an ambient mixture of a first gas and at least one second gas to cause the first chemoresistive gas sensing element to provide first sensing signals that depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases; filtering the ambient mixture of the first gas and at least one second gas with a gas filter to provide a filtered mixture of gases; exposing the second chemoresistive gas sensing element to the filtered mixture of gases to cause the second chemoresistive gas sensing element to provide second sensing signals, the second sensing signals depending on the concentration of the first gas in the ambient mixture of gases to a lesser degree than the first sensing signals and the second sensing signals depending on the concentration of the second gas in the ambient mixture of gases; estimating a concentration of at least one of the first gas in the ambient mixture of gases or the concentration of the second gas in the ambient mixture of gases based on the first sensing signals and based on the second sensing signals; arranging the gas filter, as a portion of a wall structure of an enclosed containment, between the first chemoresistive gas sensing element and the second chemoresistive gas sensing element; and arranging the first chemoresistive gas sensing element and the second chemoresistive gas sensing element in an enclosed housing having a wall structure including a particle filter that is impermeable for particles and permeable for the first gas and for the at least one second gas.

28. The method of claim 27 further comprising coating a gas-sensitive area of the second chemoresistive gas sensing element to form the gas filter.

29. The method of claim 27 further comprising: heating the first chemoresistive gas sensing element according to a first temperature profile; and heating the second chemoresistive gas sensing element according to a second temperature profile, a maximum temperature of the first temperature profile being lower than a maximum temperature of a second temperature profile.

30. The method of claim 27 further comprising: deriving first sensing data from the first sensing signals; deriving second sensing date from the second sending signals; providing simultaneously the first sensing data and the second sensing data to an input layer of a trained model based algorithm processor; and estimating the concentration of at least one of the first gas in the ambient mixture of gases or the concentration of the second gas in the ambient mixture of gases based on output data provided from an output layer of the trained model based algorithm processor.

31. The method of claim 27, wherein each of the first and second chemoresistive gas sensing elements comprises a microelectromechanical system (MEMS) structure.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Preferred embodiments of the invention are subsequently discussed with respect to the accompanying drawings, in which:

[0036] FIG. 1 illustrates a first embodiment of a gas sensing device according to the disclosure in a schematic cross-sectional top view;

[0037] FIG. 2 illustrates the first embodiment of a gas sensing device according to the disclosure in a schematic cross-sectional side view;

[0038] FIG. 3 illustrates a second embodiment of a gas sensing device according to the disclosure in a schematic cross-sectional top view;

[0039] FIG. 4 illustrates the second embodiment of a gas sensing device according to the disclosure in a schematic cross-sectional side view;

[0040] FIG. 5 illustrates the third embodiment of a gas sensing device according to the disclosure in a schematic cross-sectional side view;

[0041] FIGS. 6A and 6B illustrate an exemplary resistance change of a chemoresistive gas sensing element upon applying various concentrations of nitrogen dioxide and ozone with (FIG. 6A) and without (FIG. 6B) a gas filter; and

[0042] FIG. 7 illustrates an exemplary resistance change of a chemoresistive gas sensing element when applying a certain NO2 concentration measured subsequently with different recovery temperatures.

[0043] Equal or equivalent elements or elements with equal or equivalent functionality are denoted in the following description by equal or equivalent reference numerals.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0044] FIG. 1 illustrates a first embodiment of a gas sensing device 1 according to the disclosure in a schematic cross-sectional top view and FIG. 2 illustrates the first embodiment of a gas sensing device 1 according to the disclosure in a schematic cross-sectional side view.

[0045] Disclosed is a gas sensing device for sensing a first gas and at least one second gas in an ambient mixture of gases; [0046] wherein the gas sensing device 1 comprises a plurality of chemoresistive gas sensing elements 2, 3, wherein a first chemoresistive gas sensing element 2 of the plurality of chemoresistive gas sensing elements 2, 3 is configured for providing first sensing signals S1, and wherein a second chemoresistive gas sensing element 3 of the plurality of chemoresistive gas sensing elements 2, 3 is configured for providing second sensing signals S2; [0047] wherein a material composition of the first chemoresistive gas sensing element 2 is similar to a material composition of the second chemoresistive gas sensing element 3, wherein the material composition is suitable for sensing the first gas and the at least one second gas; [0048] wherein the first chemoresistive gas sensing element 2 is exposed to the ambient mixture of gases so that the first sensing signals S1 depend on a concentration of the first gas in the ambient mixture of gases and on a concentration of the second gas in the ambient mixture of gases; [0049] wherein the gas sensing device 1 comprises a gas filter 4, which is less permeable for the first gas than for the at least one second gas, wherein the gas filter 4 is arranged in such way that the second chemoresistive gas sensing element 3 is exposed to a filtered mixture of gases obtained by filtering the ambient mixture of gases with the gas filter 4 so that the second sensing signals S2 depend on the concentration of the first gas in the ambient mixture of gases to a lesser degree than the first sensor signals S1 and so that the second sensing signals 2 depend on the concentration of the second gas in the ambient mixture of gases; [0050] wherein the gas sensing device 1 is configured for estimating the concentration of the first gas in the ambient mixture of gases and/or the concentration of the second gas in the ambient mixture of gases based on the first sensing signals S1 and based on the second sensing signals S2.

[0051] According to some embodiments, the second chemoresistive gas sensing element 3 is arranged in an enclosed containment 5, wherein the gas filter 4 is implemented as a portion of a wall structure 6 of the enclosed containment 5.

[0052] In the example of FIGS. 1 and 2, the enclosed containment 5 is formed by the gas filter 4, the wall structure 6 and the common substrate 9.

[0053] According to some embodiments, the first gas is ozone.

[0054] According to some embodiments, the at least one second gas comprises nitrogen dioxide.

[0055] According to some embodiments, the material composition of the first chemoresistive gas sensing element 2 and of the second chemoresistive gas sensing element 3 comprises a mixed oxide or materials comprising carbon like e. g. graphene, carbon nanotubes etc.

[0056] According to some embodiments, the gas sensing device 1 comprises a processing device 7 comprising a gas concentration estimator 8 comprising a trained model based algorithm processor having an input layer and an output layer, wherein first sensing data derived from the first sensing signals S1 and second sensing data derived from the second sensing signals S2 are fed simultaneously to the input layer, and wherein the concentration of the first gas in the ambient mixture of gases and/or the concentration of the second gas in the ambient mixture of gases are estimated based on output data of the output layer.

[0057] According to some embodiments, the first chemoresistive gas sensing element 2, the second chemoresistive gas sensing element and the processing device 7 are arranged at a common substrate 9.

[0058] According to some embodiments, the first chemoresistive gas sensing element 2 and the second chemoresistive gas sensing element 3 are arranged in an enclosed housing wherein a wall structure ii of the enclosed housing 10 comprises a particle filter 12, which is impermeable for particles and permeable for the first gas and for the at least one second gas.

[0059] In the example of FIGS. 1 and 2, the enclosed housing 10 is formed by the common substrate 9, the wall structure 11 and the particle filter 12.

[0060] In the example of FIGS. 1 and 2, the first chemoresistive gas sensor element 2 comprises one gas sensitive area 13 and the second chemoresistive gas sensor element 3 comprises one gas sensitive area 14. The first sensing signals S1 are transmitted over first electrical connectors is from the first chemoresistive gas sensing element 2 to the processing device 7. Similarly, the second sensing signals S2 are transmitted over second electrical connectors 16 from the second chemoresistive gas sensing element 3 to the processing device 7.

[0061] In the example of FIGS. 1 and 2, the gas sensing device 1 comprises two chemoresistive gas sensing elements 2, 3 with the same type of material composition and controlled by the same processing device 7. Each of the chemoresistive gas sensing elements 2, 3 has one or multiple gas sensing areas 13, 14. All the chemoresistive gas sensing elements 2, 3 are located inside the same package and one (or more) of the chemoresistive gas sensing elements 2, 3 is protected by a gas filter 4, which filters out ozone. The two (or more) chemoresistive gas sensing elements 2, 3 can be on different microelectromechanical systems and then the chemoresistive gas sensing element 3 with the gas filter 4 will have an enclosed containment 5 with a wall structure 6 (e.g., a small lid with a big opening) that will mechanically support the gas filter for on top. The chemo resistive gas sensing element 2 without the gas filter 4 will react to nitrogen dioxide and ozone and should be operated at a temperature low enough in order to avoid oxidation of the material due to the presence of ozone. The chemoresistive gas sensing element 3 with the gas filter 4 will not react to ozone and, therefore, is sensitive for nitrogen dioxide only.

[0062] FIG. 3 illustrates a second embodiment of a gas sensing device 1 according to the disclosure in a schematic cross-sectional top view and FIG. 4 illustrates the second embodiment of a gas sensing device 1 according to the disclosure in a schematic cross-sectional side view.

[0063] According to some embodiments, the gas filter 4 is implemented as a coating of a gas-sensitive area 14 of the second chemoresistive gas sensing element 3.

[0064] According to some embodiments, the gas sensing device 1 comprises a first heating device 17 configured for heating the first chemoresistive gas sensing element 2 and a second heating device 18 configured for heating the second chemoresistive gas sensing element 3, wherein the processing device 7 comprises a heat control device 19 configured for controlling the first heating device 17 according to a first temperature profile and for controlling the second heating device 18 according to a second temperature device, wherein a maximum temperature of the first temperature profile is lower than a maximum temperature of the second temperature profile.

[0065] In the example of FIGS. 3 and 4, the first chemoresistive gas sensing element 2 is heated by a first heating device 17 and the second chemoresistive gas sensing element 3 is heated by a second heating device 18. The processing device 7 comprises a heat control device 19, which supplies a first electrical energy E1 over third electrical connectors 22 the first heating device 17, and which supplies second electrical energy E2 over the fourth electrical connectors 23 to the second heating device 18. By these features, an operational temperature of the first chemoresistive gas sensing element 2 may be controlled independently from an operational temperature of the second chemoresistive gas sensing element 3. In other embodiments, a common heating device could be used for heating both of the gas sensing elements 2, 3.

[0066] In the example of FIGS. 3 and 4, both gas sensing elements 2, 3 are arranged on a common microelectromechanical system. The gas sensing element 3 has a layer of material which catalyzes the ozone decomposition (e.g., MnO2) deposited or grown on the top of the sensing material.

[0067] The gas sensing elements 2, 3 can have independent heating devices 17, 18 or just one heating device.

[0068] FIG. 5 illustrates the third embodiment of a gas sensing device 1 according to the disclosure in a schematic cross-sectional side view.

[0069] According to some embodiments, the first chemoresistive gas sensing element 2 and the second chemoresistive gas sensing element 3 are arranged at a common side of the common substrate 9, wherein the processing device 7 is arranged at an opposite side of the common substrate 9, wherein the first chemoresistive gas sensing element 2 and the second chemoresistive gas sensing element 3 are electrically connected to the processing device by vias 22, 23, 24, 25.

[0070] In the example of FIG. 5, the first chemoresistive gas sensing element 2 and the second chemoresistive gas sensing element 3 are arranged at a top side of the common substrate 9, wherein the processing device 7 is arranged at a bottom side of the common substrate 9. The first sensing signals S1 are transmitted over a first group of vias 22 to the processing device 7. The second sensing signals are transmitted over a second group of vias 23 to the processing device 7. The first electrical energy E1 is provided to the first heating device 17 using a third group of vias 24. Similarly, the second electrical energy E2 is provided to the second heating device 18 using a fourth group of wires 25.

[0071] The gas sensing device 1 could be extended to other gases which cause a similar response in the material composition of the gas sensing elements, using two (or more) second chemoresistive gas sensing elements 3, where one (or more) of the second chemoresistive gas sensing elements 3 is covered with a gas filter for filtering out a first gas of the gases and the other second chemoresistive gas sensing element free (or sensors) has a gas filter for filtering out a further gas of the gases.

[0072] FIGS. 6A and 6B illustrate an exemplary resistance change of a chemoresistive gas sensing element 2, 3 upon applying various concentrations of nitrogen dioxide and ozone with (FIG. 6A) and without (FIG. 6B) a gas filter 4.

[0073] The same measurement was done with the same chemoresistive sensing element 2, 3 twice—once without a gas filter 4 and once with a gas filter 4. The gas filter 4 was consisting of a standard filter paper which was impregnated with indigo—a material which decomposes ozone. The sensor response to ozone (measured by a change of the resistance of the gas sensitive area 13, 14) is very low when using a gas filter 4 as can be observed in FIG. 6A. Moreover, the recovery of the chemoresistive sensing element 2, 3 is faster and the damage on the chemoresistive sensing element 2, 3 (resistance increase of the baseline resembling an oxidation of the sensing material) is lowered.

[0074] FIG. 7 illustrates an exemplary resistance change of a chemoresistive gas sensing element 2, 3 when applying a certain NO2 concentration measured subsequently with different recovery temperatures.

[0075] When the chemoresistive sensing element 3 is protected from exposure to high concentration of ozone, then a higher operational temperature can be used without damaging the chemoresistive sensing element 3. This would improve the overall sensor performance of the second chemoresistive sensing element 3, thanks to a faster response and recovery and a more stable reaction to gases. The slightly lower sensitivity at higher temperature is not a limitation since the sensitivity is still above the detection limit for the concentration of interest (>20 ppb) of the target gas.

[0076] Using 200° C. as recovery temperature results in a more pronounced sensitivity but the response time as well as the recovery time are longer compared to a measurement with 300° C. recovery temperature.

[0077] Although some aspects have been described in the context of an apparatus, it is clear that these aspects also represent a description of the corresponding method, where a block or device corresponds to a method step or a feature of a method step. Analogously, aspects described in the context of a method step also represent a description of a corresponding block or item or feature of a corresponding apparatus.

[0078] The above described is merely illustrative, and it is understood that modifications and variations of the arrangements and the details described herein will be apparent to others skilled in the art. It is the intent, therefore, to be limited only by the scope of the impending claims and not by the specific details presented by way of description and explanation above.