Method for manufacturing light emitting device, and light emitting device
RE049168 · 2022-08-09
Assignee
Inventors
Cpc classification
H10K71/00
ELECTRICITY
H01L29/786
ELECTRICITY
H05B33/12
ELECTRICITY
H01L29/66772
ELECTRICITY
H01L29/78618
ELECTRICITY
H01L29/66757
ELECTRICITY
H05B33/22
ELECTRICITY
H01L29/66969
ELECTRICITY
H01L29/6656
ELECTRICITY
G09F9/30
PHYSICS
H01L29/7869
ELECTRICITY
H05B33/26
ELECTRICITY
International classification
Abstract
A method for manufacturing a light-emitting device, comprising: forming, over a substrate, a plurality of multilayered light-emitting structures each including a first electrode, a light-emitting layer, and a second electrode; forming, in the substrate, a plurality of grooves that surround the multilayered light-emitting structures individually; forming, over the substrate, a sealing film that covers the multilayered light-emitting structures and the grooves; and separating the multilayered light-emitting structures from one another after forming the sealing film, by cutting the substrate such that, in each groove, part of the sealing film covering a given inner side surface of the groove remains, the given inner side surface being adjacent to any of the multilayered light-emitting structures.
Claims
.[.1. A light-emitting device, comprising: a substrate having a top surface, a bottom surface, and an outer side surface; a multilayered light-emitting structure disposed over the top surface of the substrate, and including a first electrode, a light-emitting layer, and a second electrode; and a sealing film covering the multilayered light-emitting structure, wherein the substrate includes a gas barrier layer that opposes the sealing film via the multilayered light-emitting structure, and the outer side surface of the substrate includes a first region extending from the top surface of the substrate to the gas barrier layer, and a second region extending from the gas barrier layer to the bottom surface of the substrate, the first region being covered by the sealing film, and a part of the second region is covered by the sealing film while another part of the second region is not covered by the sealing film, wherein the gas barrier material is an electrical insulator..].
.[.2. The light-emitting device of claim 1, wherein the substrate further comprises: a thin film transistor layer disposed above the gas barrier layer; and a resin film layer disposed below the gas barrier layer..].
.[.3. The light-emitting device of claim 2, wherein a portion of the resin film layer extends outwards from the outer side surface to be longer than at least one of the thin film transistor layer and the gas barrier layer in a direction of the extension..].
.[.4. The light-emitting device of claim 2, wherein the first electrode and the second electrode contact the thin film transistor layer..].
.[.5. The light-emitting device of claim 2, wherein the thin film transistor layer is a flat structure without protrusions or recesses..].
.Iadd.6. A light-emitting device, comprising: a substrate having a top surface, a bottom surface, and an outer side surface; a multilayered light-emitting structure disposed over the top surface of the substrate, and including a first electrode, a light-emitting layer, and a second electrode; and a sealing film covering the multilayered light-emitting structure, wherein the substrate includes: a gas barrier layer; a thin film transistor layer disposed above the gas barrier layer: and a base layer disposed below the gas barrier layer, a first part of the outer side surface of the substrate, which includes the thin film transistor layer and at least a part of the gas barrier layer, is covered by the sealing film, and a second part of the outer side surface of the substrate, which includes at least a part of the base layer, is not covered by the sealing film, and the gas barrier layer is an electrical insulator..Iaddend.
.Iadd.7. The light-emitting device according to claim 6, wherein the sealing film directly contacts the part of the gas barrier layer..Iaddend.
.Iadd.8. The light-emitting device according to claim 6, wherein the base layer is made of resin..Iaddend.
.Iadd.9. The light-emitting device according to claim 6, wherein a third part of the outer side surface of the substrate, which includes another part of the base layer, is covered by the sealing film..Iaddend.
Description
BRIEF DESCRIPTION OF DRAWINGS
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DETAILED DESCRIPTION
(13) [Outline of an Aspect of the Present Disclosure]
(14) One aspect of the present disclosure is a method for manufacturing a light-emitting device, comprising: forming, over a substrate, a plurality of multilayered light-emitting structures each including a first electrode, a light-emitting layer, and a second electrode; forming, in the substrate, a plurality of grooves that surround the multilayered light-emitting structures individually; forming, over the substrate, a sealing film that covers the multilayered light-emitting structures and the grooves; and separating the multilayered light-emitting structures from one another after foaming the sealing film, by cutting the substrate such that, in each groove, part of the sealing film covering a given inner side surface of the groove remains, the given inner side surface being adjacent to any of the multilayered light-emitting structures.
(15) The given inner side surface of each groove serves as part of the outer side surface of each separate substrate obtained as a result of the cutting. In the above method for manufacturing a light-emitting device, the substrate is cut into multiple substrates such that, in each groove, part of the sealing film covering the given inner side surface of the groove remains. As a result, part of the outer side surface of each separate substrate obtained as a result of the cutting is covered by the sealing film. This prevents the exposure of the interface between the sealing film and the top surface of each separate substrate obtained as a result of the cutting, allowing for the manufacture of a light-emitting device resistant to the infiltration of moisture and oxygen. Also, according to the above method for manufacturing a light-emitting device, the sealing film is formed before the substrate is cut. Therefore, productivity is not lowered during forming of the sealing film. This allows for manufacturing of a light-emitting device resistant to the infiltration of moisture and oxygen, without causing the lowering of productivity.
(16) When separating the multilayered light-emitting structures, the substrate may be cut along each groove at a position closer to a center of the groove in a width direction thereof than to the given inner side surface of the groove, so that the part of the sealing film covering the given inner side surface remains.
(17) Also, when separating the multilayered light-emitting structures, the substrate may be cut with a cutting width smaller than a width of each groove.
(18) Furthermore, the substrate may include a resin film, a gas barrier layer, and an underlayer. The gas barrier layer may be formed over the resin film. The underlayer may be formed over the gas barrier layer, and the multilayered light-emitting structures may be formed over the underlayer. When forming the grooves, a depth of each groove may be adjusted such that a bottom surface of each groove reaches at least the gas barrier layer.
(19) Also, the sealing film may be formed by atomic layer deposition.
(20) One aspect of the present disclosure is a light-emitting device, comprising: a substrate having a top surface and an outer side surface; a multilayered light-emitting structure formed over the top surface of the substrate and including a first electrode, a light-emitting layer, and a second electrode; and a sealing film covering the multilayered light-emitting structure, wherein the substrate has an extended portion extending outwards from the outer side surface of the substrate, and the sealing film extends along the outer side surface of the substrate to cover a top surface of the extended portion.
(21) One aspect of the present disclosure is a method for manufacturing a light-emitting device, comprising: forming, over a substrate, a plurality of multilayered light-emitting structures each including a first electrode, a light-emitting layer, and a second electrode; forming, in the substrate, a plurality of grooves that surround the multilayered light-emitting structures individually; forming, over the substrate, a sealing film that covers the multilayered light-emitting structures and the grooves; and separating the multilayered light-emitting structures from one another after forming the sealing film, by cutting the substrate into individual substrate pieces along each groove, wherein the substrate includes a gas barrier layer that opposes the sealing film via the multilayered light-emitting structures, when forming the grooves, a depth of each groove is adjusted such that a bottom surface of the groove reaches at least the gas barrier layer, a given inner side surface of each groove, which is adjacent to any of the multilayered light-emitting structures, serves as part of an outer side surface of each individual substrate piece after the multilayered light-emitting structures are separated, and the part of the outer side surface of each individual substrate piece is covered with part of the sealing film.
(22) One aspect of the present disclosure is a method for manufacturing a light-emitting device, comprising: preparing a substrate having a plurality of grooves that surround a plurality of regions individually; forming, in each region of the substrate, a multilayered light-emitting structure including a first electrode, a light-emitting layer, and a second electrode; forming, over the substrate, a sealing film that covers the multilayered light-emitting structures and the grooves; and separating the multilayered light-emitting structures from one another after forming the sealing film, by cutting the substrate into individual substrate pieces along each groove, wherein the substrate includes a gas barrier layer that opposes the sealing film via the multilayered light-emitting structures, a depth of each groove in the substrate has been adjusted such that a bottom surface of the groove reaches at least the gas barrier layer, a given inner side surface of each groove, which is adjacent to any of the multilayered light-emitting structures, serves as part of an outer side surface of each individual substrate piece after the multilayered light-emitting structures are separated, and the part of the outer side surface of each individual substrate piece is covered with part of the sealing film.
(23) [Structure of Light-Emitting Device]
(24) An embodiment of the present disclosure is described in detail with reference to the drawings.
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(26) A light-emitting device 100 is a top emission type organic EL display. The light-emitting device 100 includes: a substrate 10; a multilayered light-emitting structure 20 formed on the substrate 10; and a sealing film 30 that seals the multilayered light-emitting structure 20.
(27) The substrate 10 includes a resin film 11, a gas barrier layer 12, and a TFT (Thin Film Transistor) layer 13. For example, the resin film 11 is made of resin such as polyimide. The gas barrier layer 12 is formed on the resin film 11. For example, the gas barrier layer 12 is made of a material having gas barrier properties such as silicon nitride. The TFT layer 13 is formed on the gas barrier layer 12. The TFT layer 13 has drive circuits provided for respective pixels.
(28) The multilayered light-emitting structure 20 includes an anode layer 21, a light-emitting layer 22, a cathode layer 23, a sealing layer 24, a resin layer 25, and a resin film 26. The anode layer 21 is made of a conductive light-reflective material. Examples of such a material include aluminum and aluminum alloy. The light-emitting layer 22 is provided between the anode layer 21 and the cathode layer 23. When voltage is applied between the anode layer 21 and the cathode layer 23, electric current flows through the light-emitting layer 22, whereby the light-emitting layer 22 emits light.
(29) For example, the sealing film 30 is made of a material having gas barrier properties, such as alumina (Al.sub.2O.sub.3) or silicon nitride. The sealing film 30 covers the multilayered light-emitting structure 20, and extends to the outer side surface of the substrate 10 to cover part of the outer side surface.
(30) [Method for Manufacturing Light-Emitting Device]
(31) The following describes a method for manufacturing a light-emitting device with reference to
(32) First, a large substrate 110 is prepared, and multilayered light-emitting structures 120a, 120b, 120c, 120d, . . . are formed on the substrate 110 (
(33) Next, on the substrate 110, grooves 114a, 114b, 114c, 114d, 114e, 114f, . . . are formed to individually surround the multilayered light-emitting structures 120a, 120b, 120c, 120d, . . . (
(34) Next, a sealing film 130 is formed entirely over the substrate 110 (
(35) Next, cutters 51, each having a width Wb smaller than a width Wa of each groove, are prepared (
(36) The inner side surfaces 110b of the grooves formed in the substrate 110 serve as parts of the outer side surfaces of each separate substrate obtained as a result of the cutting. In the above method for manufacturing a light-emitting device, the substrate 110 is cut into multiple substrates such that, in each groove, part of the sealing film 130 covering the inner side surface 110b of the groove remains. As a result, part of the outer side surface of each separate substrate is covered by the sealing film 130. This prevents the exposure of the interface between the sealing film 130 and the top surface of each separate substrate obtained as a result of the cutting, allowing for manufacturing of a light-emitting device resistant to the infiltration of moisture and oxygen.
(37) Also, according to the above method for manufacturing a light-emitting device, the sealing film 130 is formed before the substrate 110 is cut. Therefore, productivity is not lowered during the step of forming the sealing film 130. This allows for manufacturing of a light-emitting device resistant to the infiltration of moisture and oxygen, without causing the lowering of productivity.
(38) Also, there may be a case where, during cutting of the substrate 110 with use of the cutters 51, mechanical or thermal stress is applied to the cut surfaces of the substrate. As a result, peeling of the sealing film 30 may progress for a certain distance from each of the cut surfaces. However, according to the above method for manufacturing a light-emitting device, the distance from each of the cut surfaces to the corresponding multilayered light-emitting structure is lengthened. As a result, peeling of the sealing film 130 does not easily progress to the multilayered light-emitting structures.
(39) [Modifications]
(40) (1) Modifications Pertaining to Formation of Sealing Film in Grooves
(41) According to the above embodiment, the sealing film is a thin film formed along the inner side surfaces and the bottom surface of each groove. However, it is not limited to such, and there may be a case where the sealing film fills each groove as shown in
(42) First, the multilayered light-emitting structures 120a, 120b, 120c, 120d, . . . are formed on the substrate 110, and grooves 214a, 214b, 214c, . . . are formed to individually surround the multilayered light-emitting structures 120a, 120b, 120c, 120d, . . . (
(43) (2) Modification Pertaining to Region Covered by Sealing Film
(44) According to the above embodiment, as shown in
(45) Also, in a case where the light-emitting device is a lighting device or a passive-matrix display, a TFT layer is not necessary. In such a case, the structure will be as shown in
(46) (3) Modifications Pertaining to Layout of Grooves
(47) According to the above embodiment, one groove extending longitudinally is formed between any two adjacent multilayered light-emitting structures, and one groove extending laterally is formed between any two adjacent multilayered light-emitting structures. However, it is not limited to such as long as the grooves can surround the multilayered light-emitting structures individually. For example, as shown in
(48) (4) Modifications Pertaining to Depth of Each Groove
(49) According to the above embodiment, the depth of each groove is substantially constant over the entirety of the groove. However, it is not limited to such as long as the large substrate can be handled as a whole. For example, the depth of each groove may partially vary, and part of each groove may penetrate through the substrate. In the example of
(50) In this way, although part of each groove penetrates through the large substrate, the substrate is not completely cut into multiple substrates. This allows for handling of the substrate as a whole; therefore, productivity is not lowered. Also, when part of each groove penetrates through the substrate, the distance of cutting at the time of cutting the substrate is correspondingly shortened. This reduces mechanical or thermal stress applied at the cut surfaces of the substrate.
(51) (5) Modifications Pertaining to Cutting Position
(52) According to the above embodiment, only one groove is formed between any two adjacent multilayered light-emitting structures. Therefore, one of the two inner side surfaces of a groove is adjacent to one multilayered light-emitting structure, and the other to another multilayered light-emitting structure. For example, in
(53) First, the multilayered light-emitting structures 120a, 120b, 120c, 120d, . . . are formed on the substrate 110, and a pair of grooves 714a and 715a, a pair of 714b and 715b, a pair of 714c and 715c, . . . are each formed between two adjacent multilayered light-emitting structures (
(54) Alternatively, cutters 54, each having a width Wh smaller than a width We, are prepared (
(55) In the examples of
(56) (6) Modifications Pertaining to Cross-Sectional Shape of Grooves
(57) According to the above embodiment, the cross-sectional shape of each groove is rectangular, and the top surface of the substrate and an inner side surface of each groove form substantially a right angle. However, it is not limited to such. For example, the cross-sectional shape of each groove may be V-shaped or inverted trapezoidal, so that the inner side surfaces of each groove are inclined. This enhances the coverage of the sealing film.
(58) (7) Modifications Pertaining to Means of Cutting Grooves
(59) According to the above embodiment, the grooves are cut with a cutter. However, it is not limited to such. For example, the grooves may be cut through a physical process such as a laser process, or a chemical process such as etching.
(60) (8) Modifications Pertaining to Timing of Forming Grooves
(61) According to the above embodiment, the grooves are formed in the substrate after the multilayered light-emitting structures are formed on the substrate. However, it is not limited to such. The grooves may be formed in the substrate before the multilayered light-emitting structures are formed on the substrate. In this case, first, the grooves 114a, 114b, 114c, . . . are formed to individually surround regions 140a, 140b, 140c, 140d, . . . of the substrate 110 (
(62) Alternatively, the grooves may be formed after part of each multilayered light-emitting structure is formed on the substrate. Thereafter, the remaining part of each multilayered light-emitting structure may be formed.
(63) (9) Additional Sealing Structure
(64) According to the above embodiment, each multilayered light-emitting structure is sealed with the gas barrier layer 12 and the sealing film 30. However, the present disclosure may further include an additional sealing structure. For example, in the example of
(65) (10) Scope of Application
(66) According to the above embodiment, the light-emitting device is an organic EL display. However, the light-emitting device is not necessarily an organic EL display and may be another light-emitting device as long as the device needs sealing. For example, the light-emitting device may be an organic EL lighting apparatus. Note that organic EL displays come in many types. For example, depending on the method for extracting light, there are a top emission type, a bottom emission type, a double-sided emission type, etc. Also, depending on the method for driving, there are an active matrix type, a passive matrix type, etc. The present disclosure is applicable to any type of organic EL display.
(67) [Industrial Applicability]
(68) The present disclosure is applicable to displays and lighting apparatuses, for example.
REFERENCE SIGNS LIST
(69) 10 substrate
(70) 10a top surface of substrate
(71) 10b outer side surface of substrate
(72) 10c top surface of extended portion
(73) 10d outer side surface
(74) 10e extended portion
(75) 11 resin film
(76) 12 gas barrier layer
(77) 13 TFT layer
(78) 16 glass substrate
(79) 20 multilayered light-emitting structure
(80) 21 anode layer
(81) 22 light-emitting layer
(82) 23 cathode layer
(83) 24 sealing layer
(84) 25 resin layer
(85) 26 resin film
(86) 30 sealing film
(87) 41 resin film
(88) 42 outer lead
(89) 43 electrode for touch panel
(90) 51, 52, 53, and 54 cutter
(91) 100 light-emitting device
(92) 110 substrate
(93) 120 multilayered light-emitting structure
(94) 221 bank
(95) 222a hole injection layer
(96) 223a hole transport layer
(97) 224a organic EL layer
(98) 225 electron transport layer
(99) 100a-100d light-emitting device
(100) 110b inner side surface of groove
(101) 110b inner side surface of groove
(102) 111 resin film
(103) 112 gas barrier layer
(104) 113 TFT layer
(105) 114a-114f groove
(106) 120a-120h multilayered light-emitting structure
(107) 121 anode layer
(108) 122 light-emitting layer
(109) 123 cathode layer
(110) 124 sealing layer
(111) 125 resin layer
(112) 126 resin film
(113) 130 sealing film
(114) 214a-214c groove
(115) 314a-314f groove
(116) 414a-414f groove
(117) 415a-415f groove
(118) 514a-514f groove
(119) 515 through-hole
(120) 614a-614f groove
(121) 714a-714c groove
(122) 715a-715c groove