METHOD OF PRODUCING ELECTRONIC COMPONENTS, CORRESPONDING ELECTRONIC COMPONENT
20210305134 · 2021-09-30
Assignee
Inventors
Cpc classification
H01L23/3142
ELECTRICITY
H01L21/4853
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/49113
ELECTRICITY
H01L2924/20755
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L21/4889
ELECTRICITY
International classification
H01L21/48
ELECTRICITY
Abstract
A method of producing electronic components including at least one circuit having coupled therewith electrical connections including metallic wire bondable surfaces encased in a packaging, the method including bonding stud bumps, in particular copper stud bumps, at determined areas of said wire bondable surfaces.
Claims
1. A device, comprising: a semiconductor die coupled to a die pad of a lead frame; conductive bumps on the lead frame; and a package body over the semiconductor die, the conductive bumps, and portions of the lead frame, wherein the conductive bumps aid in adhering the package body to the lead frame.
2. The device of claim 1, wherein the conductive bumps are on the die pad.
3. The device of claim 1, wherein the conductive bumps are on a ground ring around the die pad.
4. The device of claim 3, wherein the ground ring is set downward from leads of the lead frame.
5. The device of claim 1, wherein the lead frame is a copper lead frame, wherein a silver layer is between the copper lead frame and the conductive bumps.
6. The device of claim 1, wherein the conductive bumps are on the lead frame at a perimeter of the die pad.
7. A device, comprising: a semiconductor die coupled to a die pad of a lead frame, the die pad including a plating layer; first conductive anchoring bumps on the die pad; and a package body over the semiconductor die, the first conductive anchoring bumps, and the die pad, the first conductive anchoring bumps adhere the package body to the die pad.
8. The device of claim 7, wherein the first conductive anchoring bumps are at a perimeter of the die pad.
9. The device of claim 7, wherein: the lead frame includes a ring that extends around the die pad; and second conductive anchoring bumps are on the ring.
10. The device of claim 7, wherein the plating layer is silver.
11. A device, comprising: a lead frame including: a die pad having a first surface; a ground ring having a second surface and being around the die pad; a plurality of leads being around the ground ring and around the die pad; a die being coupled to the first surface of the die pad; a plurality of wires being coupled to the die and to ones of the plurality of leads, the plurality of wires extending from the die to ones of the plurality of wires; and a plurality of conductive bumps on only the second surface of the ground ring, the plurality of conductive bumps extending away from the second surface.
12. The device of claim 11, wherein ones of the plurality of wires overlap ones of the plurality of conductive bumps.
13. The device of claim 11, further comprising a molding compound on the lead frame, the die, the plurality of wires, and the plurality of conductive bumps.
14. The device of claim 13, wherein the plurality of conductive bumps are embedded within the molding compound.
15. The device of claim 11, wherein the plurality of conductive bumps include at least one of a copper material, a silver material, and a gold material.
16. The device of claim 11, wherein the lead frame further comprises a plurality of down set portions extending from the die pad to the ground ring.
17. The device of claim 11, wherein ones of the plurality of wires being coupled to the die and to the ground ring and extending from the die to the ground ring.
18. The device of claim 2, wherein the conductive bumps are only on the die pad.
19. The device of claim 3, wherein the conductive bumps are only on the ground ring.
20. The device of claim 7, wherein the conductive bumps are only on the die pad.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0031] One or more embodiments will now be described, purely by way of non-limiting example, with reference to the annexed figures, wherein:
[0032]
[0033]
[0034]
DETAILED DESCRIPTION
[0035] In the ensuing description, one or more specific details are illustrated, aimed at providing an in-depth understanding of examples of embodiments. The embodiments may be obtained without one or more of the specific details, or with other methods, components, materials, etc. In other cases, known structures, materials, or operations are not illustrated or described in detail so that certain aspects of embodiments will not be obscured.
[0036] Reference to “an embodiment” or “one embodiment” in the framework of the present description is intended to indicate that a particular configuration, structure, or characteristic described in relation to the embodiment is comprised in at least one embodiment. Hence, phrases such as “in an embodiment” or “in one embodiment” that may be present in one or more points of the present description do not necessarily refer to one and the same embodiment. Moreover, particular conformations, structures, or characteristics may be combined in any adequate way in one or more embodiments. That is, one or more characteristics exemplifies in connection with a certain figure can be applied to any embodiment as exemplified in any other figure.
[0037] The references used herein are provided merely for convenience and hence do not define the scope of protection or the scope of the embodiments.
[0038] In general, the solution here described provides, starting from a circuit, such as a chip or die, including metallic wire bondable surfaces to be encased in a packaging, in particular a lead frame, in particular with a pre-plated finishing including a standard Ag spot or Ag ring, increasing resistance to delamination during thermal cycles by placing stud bumps, preferably copper bumps on determined areas of the metallic wire bondable surface, in particular on the lead frame, which are located in critical areas of the frame surface, for example around areas identified as preferential in the delamination propagation.
[0039] A metallic wire bondable surface is a metal surface on which wire bonding, preferably with copper or gold, can be performed. Preferably such metallic wire bondable surface is a silver surface, which usually has also one of the lower adhesion to the mold compound. In variant embodiments said wire bondable surface can be a nickel palladium or nickel phosphorous surface or a surface of an alloy combining nickel, palladium and gold.
[0040] In this regard in
[0041] In
[0042] As shown in
[0043] Stud bumps 16 are for instance bonded on areas characterized by low adhesion with molding compound for example silver plated areas of the lead frame 11 in particular in the critical areas 15 by a bonding technique which in variant embodiments may correspond to that of the wire bonding, specifically ball bonding. In particular, placing the studs bump 16 may include a step of lowering a capillary copper wire to the surface of the lead frame 21, which is preferably heated, then the capillary copper wire is pushed down and the bonding machine applies ultrasonic energy with an attached transducer. The combined heat, pressure, and ultrasonic energy create a weld between the copper ball and the surface of the frame 11. In this case, the wire is then detached by the ball, for instance simply moving transversally the wire so that the wire breaks above the ball, leaving the stud bump 16.
[0044] Thus, as shown above, an embodiment of the method here described may include to place one more stud bumps 16 in one or more determined area 15 corresponding to a down set of bars, i.e., power bars or support bars, of the lead frame 21.
[0045] The plurality of stud bumps 16 placed in critical areas 15 of the standard lead frame 11 determines a mechanical anchoring which improves the resin, i.e., molding compound adhesion.
[0046] In
[0047]
[0048] The die 18 and the lead frame 21 of
[0049] In some embodiments, the conductive bumps are only on a ground ring 17 of the lead frame, only on the die pad 14 of the lead frame, or only on both the ground ring 17 and the die pad 14 of the lead frame.
[0050] As mentioned, the copper stud bonding can be obtained by employ the ball bonding deposition steps of a standard wire bonding process. By way of example a 2.0 millimeters (2.0 mils) Cu wire may be used.
[0051] Without prejudice to the underlying principles, the details and embodiments may vary, even significantly, with respect to what is illustrated herein purely by way of non-limiting example, without thereby departing from the extent of protection.
[0052] Although the solution has been described with reference metallic wire bondable surfaces represented by metallic plated lead frames, the solution here described can be applied to producing electronic components including one or more circuits including metallic wire bondable surfaces which are then encased in a packaging, this meaning that in variant embodiments such metallic wire bondable surfaces can be any metal surface of an integrated circuit on which a wire bonding can be performed. For instance the metallic wire bondable surfaces can be also represented by a plated surface of the die, so that to enhance the adhesion of the mold compound to the die. Also, the electronic component may not include a lead frame, the metallic wire bondable surfaces corresponding to the ones, such as bond fingers and metal rings, of a BGA (Ball Grid Array) based integrated circuit and the stud bumps can be bonded in areas of such bond fingers and/or metal rings.
[0053] The electronic component or package may be formed in any order. For instance, the semiconductor die may be bonded to the die pad after or before the conductive bumps are coupled to the lead frame, such as the perimeter of the die pad and/or the ground ring.
[0054] The various embodiments described above can be combined to provide further embodiments. These and other changes can be made to the embodiments in light of the above-detailed description. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled. Accordingly, the claims are not limited by the disclosure.