INTEGRATED CIRCUIT AND ELECTRONIC DEVICE COMPRISING A PLURALITY OF INTEGRATED CIRCUITS ELECTRICALLY COUPLED THROUGH A SYNCHRONIZATION SIGNAL ROUTED THROUGH THE INTEGRATED CIRCUIT
20210242116 · 2021-08-05
Inventors
Cpc classification
H01L2224/73204
ELECTRICITY
H01L2224/0401
ELECTRICITY
H01L2224/12105
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L24/20
ELECTRICITY
H01L2224/73204
ELECTRICITY
H01L2223/6683
ELECTRICITY
H01L2224/04042
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L23/49816
ELECTRICITY
G01S7/028
PHYSICS
H01L2224/131
ELECTRICITY
H01L2223/6627
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2924/16251
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2223/6677
ELECTRICITY
H01L2224/16227
ELECTRICITY
H01L2224/92125
ELECTRICITY
H01L2924/00
ELECTRICITY
H01Q1/2283
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01Q23/00
ELECTRICITY
H01L2223/6655
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2224/14164
ELECTRICITY
H01L2224/04105
ELECTRICITY
H01L24/73
ELECTRICITY
H01L23/14
ELECTRICITY
International classification
H01L23/498
ELECTRICITY
H01L23/14
ELECTRICITY
Abstract
An integrated circuit includes a semiconductor substrate, electronic components integrated in the semiconductor substrate, an electric connection structure overlying the semiconductor substrate, and an conductive region, with elongated shaped, having a first and a second end. The conductive region is formed in the electric connection structure, extends over an entire length of the substrate and is not directly electrically connected to the electronic components. A first and a second synchronization connection element are electrically coupled to the first end and to the second end, respectively, of the conductive region and have each a respective synchronization connection portion facing the coupling face.
Claims
1. An integrated circuit having a coupling face, the integrated circuit comprising: a semiconductor substrate; electronic components integrated in the semiconductor substrate; an electric connection structure overlying the semiconductor substrate; and a conductive region, with elongated shape, having a first end and a second end, the conductive region being formed in the electric connection structure, extending over an entire length of the substrate and not being directly electrically connected to the electronic components, wherein the electric connection structure includes a plurality of connection elements having respective connection portions facing the coupling face, the plurality of connection elements including a first and a second synchronization connection element, the first and the second synchronization connection elements being electrically coupled to the first end and to the second end, respectively, of the conductive region and each having a respective synchronization connection portion facing the coupling face.
2. The integrated circuit according to claim 1, comprising an insulation layer extending over the semiconductor substrate and forming a die therewith, wherein the electric connection structure comprises a dielectric region overlying the die and having a length, and the conductive region extends within the dielectric region approximately throughout the length thereof.
3. The integrated circuit according to claim 2, wherein the first and the second synchronization connection elements include a first and a second solder ball projecting from a respective end of the dielectric region and belonging to a Ball Grid Array bonding structure.
4. The integrated circuit according to claim 3, wherein the dielectric region accommodates at least one redistribution layer of an embedded Wafer Level BGA (eWLB) coupling and the conductive region is formed in the redistribution layer.
5. The integrated circuit according to claim 1, comprising an insulation layer extending over the semiconductor substrate and forming a die therewith, the conductive region extends within the insulation layer, and the first and the second synchronization connection elements include metal connection regions extending in a dielectric region overlying or at least partially surrounding the die and in selective electric contact with the respective synchronization connection portions.
6. The integrated circuit according to claim 5, wherein the connection portions of the plurality of connection elements include solder balls belonging to a Ball Grid Array connection structure forming a Flip Chip-Ball Grid Array (FC-BGA) coupling or an embedded Wafer Level BGA (eWLB) coupling.
7. The integrated circuit according to claim 5, wherein the dielectric region includes a packaging layer, the connection portions of the plurality of connection elements include a plurality of coupling pins, and the metal connection regions include wire connections, wherein the first and the second synchronization connection elements include respective synchronization wire elements coupled between a respective end of the conductive region and a respective coupling pin.
8. The integrated circuit according to claim 1, comprising: a synchronism generator circuit configured to generate a synchronization signal; and an output terminal coupled to the generation circuit, wherein the plurality of connection elements further includes a signal connection element coupled to the output terminal and having a respective signal connection portion of the plurality of connection portions.
9. The integrated circuit according to claim 1, wherein the integrated circuit is a monolithic microwave integrated circuit.
10. The integrated circuit according to claim 1, wherein the conductive region is of metal material.
11. An electronic device, comprising: a support having a support face; a plurality of integrated circuits, each integrated circuit having a coupling face coupled to the support face and including: a semiconductor substrate integrating electronic components; an electric connection structure overlying the semiconductor substrate; and a conductive region with an elongated shape, formed within the electric connection structure, the conductive region having a first end and a second end, extending over an entire length of the substrate and not directly electrically connected to the electronic components, wherein: a first integrated circuit of the plurality of integrated circuits is configured to generate a synchronization signal, and each electric connection structure includes a plurality of connection elements, the plurality of connection elements including signal connection elements, electrically coupling the electronic components to respective signal connection portions facing the respective coupling face, and the electric connection structure of at least the first integrated circuit further includes a first and a second synchronization connection element adjacent to the signal connection elements, electrically coupled to the first and the second ends, respectively, of the respective conductive region, having a respective synchronization connection portion facing the coupling face and configured to route the synchronization signal; electronic components bonded to the support face; electric connection tracks extending on the support face and electrically coupling the electronic components to the signal connection portions of the signal connection elements of each integrated circuit; and synchronization conductive track segments extending on the support face and electrically coupling the synchronization connection portions of at least the first integrated circuit to selective signal connection portions of the integrated circuits.
12. The electronic device according to claim 11, wherein the electric connection structure comprises: an insulation layer extending over the semiconductor substrate and forming therewith a die; and a dielectric region, which extends over the die and has a length, wherein the conductive region extends within the dielectric region approximately for the entire length thereof.
13. The electronic device according to claim 12, wherein the connection portions of the plurality of connection elements comprise solder balls, belonging to a Ball Grid Array connection structure.
14. The electronic device according to claim 11, wherein the electric connection structure comprises: an insulation layer extending over the semiconductor substrate and forming a die therewith; and a dielectric region overlying or at least partially surrounding the die, wherein the conductive region extends within the insulation layer, and the first and the second connection elements extend in the dielectric region.
15. The electronic device according to claim 14, wherein the plurality of connection elements includes solder balls belonging to a Ball Grid Array connection structure forming a Flip Chip-Ball Grid Array coupling or an embedded Wafer Level BGA coupling.
16. The electronic device according to claim 14, wherein the connection elements of the plurality of connection elements include wire connections, the dielectric region includes a packaging layer, the signal connection portions and the synchronization connection portions include a plurality of coupling pins, and the first and the second synchronization connection elements include respective wire elements coupled between a respective end of the conductive region and a respective coupling pin.
17. The electronic device according to claim 11, wherein: the first integrated circuit forms a master integrated circuit, the plurality of integrated circuits includes at least a first and a second slave circuit arranged on opposite sides of the master integrated circuit, the master integrated circuit includes an output terminal coupled to a respective signal connection element of the plurality of signal connection elements and configured to supply the synchronization signal, and the synchronization conductive track segments include connection portions extending on the face of the support, between the signal connection portions of the first and the second slave integrated circuits and the synchronization connection portions of the master integrated circuit and between the signal connection portion and the first synchronization connection portion of the master integrated circuit.
18. A device, comprising: a printed circuit board (PCB) having a surface; a semiconductor device package physically coupled to the surface of the PCB, the semiconductor device package including: a semiconductor substrate; electronic components integrated in the semiconductor substrate; an electric connection structure overlying the semiconductor substrate; and a conductive region, with elongated shape, having a first end and a second end, the conductive region being formed in the electric connection structure, extending over an entire length of the substrate and not being directly electrically connected to the electronic components, wherein the electric connection structure includes a plurality of connection elements having respective connection portions facing the coupling face, the plurality of connection elements including a first and a second synchronization connection element, the first and the second synchronization connection elements being electrically coupled to the first end and to the second end, respectively, of the conductive region and each having a respective synchronization connection portion facing the coupling face; a receiving antenna physically coupled to the surface of the PCB and electrically coupled to the semiconductor device package; and a transmitting antenna physically coupled to the surface of the PCB and electrically coupled to the semiconductor device package.
19. The device according to claim 18, wherein the semiconductor device package is disposed between the receiving antenna and the transmitting antenna.
20. The device according to claim 18, wherein the semiconductor device package is a monolithic microwave integrated circuit package.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0023] For a better understanding of the present disclosure, some embodiments thereof are now described, purely by way of non-limiting example, with reference to the attached drawings, wherein:
[0024]
[0025]
[0026]
[0027]
[0028]
[0029]
[0030]
[0031]
[0032]
[0033]
[0034]
[0035]
[0036]
[0037]
DETAILED DESCRIPTION
[0038]
[0039] With reference to
[0040] With reference once again to
[0041] Hereinafter, to enable better understanding, the Slave MMICs 54-56 are also referred to as first, second, and third Slave MMICs 54, 55, and 56. In the embodiment shown (see, in particular,
[0042] The MMICs 53-56 (see also
[0043] As may be noted in
[0044] In this way, the row J defines an empty or missing row, i.e., the solder balls 65 arranged on the adjacent rows (rows K and H in
[0045] As represented by a dashed line in
[0046] With reference to
[0047] In particular (see also
[0048] In practice, in the embodiment shown in
[0049] Slave MIMIC 85, even though all the MMICs 53-56 have the empty row, and the branching portions 66B are connected to two solder balls 65 (solder balls 65A and 65B in
[0050] However, the rectilinear portion 66A is not necessarily formed by a single segment that traverses the Master MIMIC 53 and the second Slave MIMIC 85, but may be formed by a broken line, only the portions thereof crossing the single MMICs 53 and 55 being preferably linear.
[0051] The synchronization track 66 may be formed in the same way as the surface electrical connections 63 formed on the first face 67A of the PCB 52, for example, as a copper track, and typically has a much lower thickness than the solder balls 65, even when these are slightly deformed after soldering, as visible in
[0052]
[0053] In
[0054] Furthermore, as in
[0055] Specifically, as regards the embodiment of
[0056] The conductive strips 71 are here formed using a redistribution layer RDL.
[0057]
[0058] Here, the electronic device, designated by 70′, has conductive strips 71′ formed in a metal layer similar to the ones used for forming metal connection lines 88, similar to the metal connection lines 18 of
[0059] In both cases of
[0060] It should be noted that, in this context, the term width of the MMICs 53-56 indicates the size in the adjacency direction of the MMICs 53-56.
[0061] As shown in
[0062] In detail, the synchronization line 96 is here formed by the conductive strips 71, 71′ of the Master MMIC 83 and of the second Slave MMIC 85 (arranged in
[0063] As an alternative to the above, the conductive strips 71, 71′ of the first Slave MMIC 84 and of the third Slave MMIC 86 may be connected to respective solder balls 95, but these are not connected to any metal line, or are possibly connected only to a common ground line, if envisaged.
[0064] The track portions 94 formed on the PCB 92 enable connection of the synchronization line 96 to the input terminals LOin of the MMICs 83-86 and to the output terminal LOout of the Master MMIC 83. In detail, with reference to
[0065] It should be noted that this solution can be applied also in case of a wire-bonding/solder ball mixed technique, as evident to the person skilled in the art.
[0066]
[0067] In detail, as shown in
[0068] In practice, in this case, the conductive strips 101 forming the microstrips or coplanar waveguides are manufactured at wafer level, together with the components 74, and are already present when the wafer is diced to the individual dice 73.
[0069] This solution may moreover be applied both in case of bonding using the FC-BGA bonding technique (in which case, the conductive strips 101 are electrically coupled to the solder balls 95 through bumps and a bonding support as shown in
[0070] For instance,
[0071] In particular, in the example shown in
[0072] The dice 73 and the bonding wires 115 are covered by a packaging layer 117 or a layer containing dielectric material, for example, molded resin (but the packaging layer may be formed according to any known packaging technique, as obvious to the person skilled in the art). The packaging layer 117 embeds also the pins 116 on all sides, except for the backside, where they are in direct electrical contact with the track portions 94 of the synchronization line 96.
[0073] As in
[0074] The MMICs and the electronic device described herein have numerous advantages.
[0075] In particular, the described solution allows the synchronization signal generated by the Master MIMIC to be carried to the Slave MMICs without requiring an additional connection level in the PCB scheme, and thus at low costs.
[0076] The described packaging structure allows the synchronization signal LO to be carried using (at least in part) the same conduction layer of the radiofrequency signals exchanged with the antenna structures 60, 61, 90, 91.
[0077] The path of the synchronization signal LO is simplified and may be minimal, thus reducing loss phenomena or layout complexity.
[0078] Finally, it is clear that modifications and variations may be made to the integrated circuit and to the electronic device described and shown herein, without thereby departing from the scope of the present disclosure. For instance, the described different embodiments may be combined so as to provide further solutions.
[0079] For example, the MMICs may be arranged also not aligned to each other, but simply arranged side-by-side between the RX and TX antenna structures. In this case, the synchronization track 70 may comprise a broken line.
[0080] The electronic device may comprise integrated circuits of a different type, even operating at different frequencies from radiofrequencies.
[0081] The various embodiments described above can be combined to provide further embodiments. These and other changes can be made to the embodiments in light of the above-detailed description. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled. Accordingly, the claims are not limited by the disclosure.